Initiatives of Precision Engineering at the Beginning of a Millennium: 10th International Conference on Precision Engineering (ICPE) July 18–20, 2001, Yokohama, Japan

Front Matter....Pages i-xxvii
Machining of Precision Parts and Microstructures....Pages 3-11
Roles of Quantum Nanostructures in Advanced Electronics....Pages 12-17
Design Of New Precision Machine Elements....Pages 18-24
The Concept of Active Deflection Compensation and its Application in Precision Forging....Pages 27-31
Coining of Thin Plates to Produce Micro Channel Structures....Pages 32-36
Three-dimensional Micro-forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region....Pages 37-41
Precision Cold Forging - Methods for Reduction of Working Pressure....Pages 42-46
Burr Formation in Micro-machining Aluminum, 6061-T6....Pages 47-51
Micro Structuring of High Aspect Ratio and Array by Means of Mechanical Machining....Pages 52-56
Influence of Micro Machining on Strength Degradation of a Silicon Nitride Ceramic....Pages 57-61
Micro Material Processing Using UV Laser and Femtosecond Laser....Pages 62-66
Subnanometer Fabrication of Optics by Plasma Chemical Vaporization Machining....Pages 67-71
Micro Fabrication Using EDM Deposition....Pages 72-76
Manufacture of Aspherical Fresnel Lens with Ideal Cross-sectional Profile with Oxygen-free Copper and Acrylic Resin....Pages 77-81
Non-circular machining using two convex milling cutters....Pages 82-86
A Method to Machine Three-dimensional Thin Parts....Pages 87-91
Control of Surface Pattern of Mold Generated by Ball-end Milling....Pages 92-96
High-speed Cutting-fundamentals and Machine Tool Development....Pages 97-101
Dry Cutting of Stainless Steel Using Indexable Inserts Having Self-heat Absorbing Capability....Pages 102-106
Measurement of Lubricant Applying Effect Influence on Lubrication by Oil-submerged Cutting....Pages 107-111
Development of Inclined Ultrasonic-vibration Cutting Tool Capable of Mounting Commercial Indexable Inserts....Pages 112-116
The Greentape Laser Sintering Method and its Applications....Pages 117-121
Conceptual Data Model for Advanced Rapid Prototyping....Pages 122-126
Machine Parts Manufacturing by Sheet Steel Lamination Technology....Pages 127-131
Textured Surface Produced by Anisotropic Etching of Silicon and Its Frictional Properties....Pages 132-136
A Mechanical Vibration Assisted Plasma Etcher for Etch Rate Improvement....Pages 137-141
Micromolding of Three-dimensional Components....Pages 142-146
Surface Roughness of FIB Sputtered Silicon....Pages 147-151
Micromachining in the Third Dimension....Pages 152-156
Optimization of Deep Hole Drilling Processes with Smallest Drilling Diameters....Pages 157-163
Prediction of High Frequency Vibration in Fine Boring by Extended Chatter Model....Pages 164-168
Thrust Force Analysis of Drilling Burr Formation Using Finite Element Method....Pages 169-173
Basic Studies on the Wear Behaviour of Modified and Coated Diamond Tools for Precision Machining of Ferrous Materials....Pages 174-178
Difference in Wear Patterns of Diamond Cutting Tool Depending on Work Materials....Pages 179-183
Ductile Mode Cuttingof Single-crystal Silicon by Ultrasonic Vibration....Pages 184-188
Regenerative Chatter Vibration in Ball End Milling of Curved Surfaces....Pages 189-193
Ultra-high speed Discharge Control for Micro Electric Discharge Machining....Pages 194-198
Study of Contouring Micro EDM Characteristics....Pages 199-203
Development of Desk-top Micro Electric Discharge Machine....Pages 204-208
Improving Process Characteristics of Dry-WEDM....Pages 209-213
U-shaped Curved Hole Creation by Means of Electrical Discharge Machining....Pages 214-218
High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM....Pages 219-223
Laser Ablation of Sapphire with a Pulsed Ultra-violet Laser Beam....Pages 224-228
Metal Deposition on Glass by Laser Irradiation from Metal Powders....Pages 229-233
Ultra-precision Cutting of Difficult-to-cut Metals....Pages 234-238
A Study on Metal Cutting Under High Hydrostatic Pressure....Pages 239-243
A New Interpolation Algorithm for Ultraprecision CNC Machining....Pages 244-248
Six-axis Control Character Line Finishing Using Ultrasonic Vibrational Cutting Tool....Pages 249-253
A New Diamond Turning Method for Fabrication of Convex Aspheric Surface on Hard Brittle Material....Pages 254-258
Fracture Phenomena of Aramid Fiber During Oblique Cutting....Pages 259-263
Development of a Practical Laser-guided Deep-hole Boring Tool....Pages 264-268
Oil Film on Water Fog Metalworking Fluid....Pages 269-273
On the On-set of Chip Formation and the Process Stability in Cutting at Atomic Level....Pages 274-278
Analysis of Tool Temperature in High-speed Milling....Pages 279-283
Research on Precise Cutting Performance of CVD Diamond....Pages 284-288
Machinability of TiAl Intermetallic Compounds....Pages 289-293
MDS Study on the Effect of Cutting Edge Radius of Diamond Tools in Nanometric Cutting Process for Brittle Materials....Pages 294-298
An Attempt to Develop a Short Lasting Machinability Test for Steels....Pages 299-303
Micro Surface Damage Detecting and Repairing System by Precise Micro Robots....Pages 304-308
Effect of Minimal Quantities of Lubricant in Micro Milling....Pages 309-313
Development of Mems IC Probe Card Utilizing Fritting Contact....Pages 314-318
Simulation of Wedm Using Discharge Location Searching Algorithm....Pages 319-323
Comparative Study of HSM and EDM in Injection Mould Manufacturing....Pages 324-328
Net-shaping Via Aluminium Foaming....Pages 329-333
Development of Warm Forming Technique to Produce Thin Wall Magnesium Components....Pages 334-338
Gas Flow Characteristics in A Laser Cut Kerf....Pages 339-343
A New Method for Reduction of Residual Stress of Welded Joint Using Ultrasonic Vibrational Load....Pages 344-348
Three-dimensional Microcasting....Pages 349-353
Improvement of Properties of SIC Mirror Surface Epitaxially Grown on Silicon Substrate....Pages 354-358
Precision Grinding of Micro Aspherical Surface....Pages 361-365
Mirror Grinding of Silicon Wafer with Silica EPD Pellets....Pages 366-370
New Fabrication Process of Deep Paraboloidal Mirror by Combination of Elid-grinding and Electro-forming Techniques for Laman Spectroscopy Instrument....Pages 371-375
A Study on the Surface Integrity of Single Crystal Silicon Ground by CIFB-diamond Wheels(ELID) and Resin-bonded Diamond Wheels....Pages 376-380
A Study on Scratch Reduction Using the Sonic Dispersion of CMP Slurry....Pages 381-385
A Study on the Chemical Mechanical Micro Machining (C3M) of Silicon....Pages 386-390
Development of a Lapping Film Utilizing Agglomerative Superfine Silica Abrasives for Edge Finishing of a Silicon Wafer....Pages 391-395
Cryogenic Polishing Method of Optical Materials....Pages 396-400
Characteristics of Small Rotary Tool in Polishing of Fused Silica....Pages 401-405
Development of Electrostrictive Polyurethane(PU) Films and its Characterization....Pages 406-410
Precision Machining of Future Silicon Wafers....Pages 411-415
High Speed Grinding Performance and Material Removal Mechanism of Silicon Nitride....Pages 416-420
Precision Manufacturing of Micro Moulding Tools of Glass and Sintered Carbide....Pages 421-425
An Experimental Study on Bore Honing Operation....Pages 426-430
Investigations Regarding the Operating Range of Ultrathin Grinding Wheels on AlTiC....Pages 431-435
Errors Analysis of Ball-headed Wheel Discharge Dressing and Study on Grinding Experiments in Ultra-precision Aspheric Grinding System....Pages 436-440
Simulation on High Integrity Surface Generation of φ 300 Si Wafer with Fixedabrasive Solution....Pages 441-445
Effect of Wheel Revolutional Speed on Striped Pattern on Surfaces Finished by High-speed Reciprocation Grinding....Pages 446-450
Mechanisms for the Formation of Glossy Workpiece Surfaces in Grinding and Polishing of Natural Stones....Pages 451-455
Mechanical Properties and Grinding Characteristics of High Purity Polycrystalline CBN Grits....Pages 456-460
Influence of Cutting Edge Wear on Ductile- Mode Grinding of Fine Ceramics With Coarce Grain Size Diamond Wheel....Pages 461-465
Study on Internal Grinding of Small Bore....Pages 466-470
A Basic Study on Profile Grinding with Elid....Pages 471-475
Grinding Characteristics of Cemented Carbide Concave Mirror by Desk-top Type 4-axes Machine “TRIDER-X” with ELID System....Pages 476-480
Finish Surface Grinding of Titanium Alloys....Pages 481-485
Flattening of Micro-functional Parts by ELID Lap Grinding....Pages 486-490
Development of Small Tool by Micro Fabrication System Applying Elid Grinding Technique....Pages 491-495
Effect of Polishing Pads in Finishing of Large Optical Elements....Pages 496-500
Effects of Changes in Fluid Composition on Magnetorheological Finishing (MRF) of Glasses and Crystals....Pages 501-505
Study of Magnetic Abrasive Finishing Process Using Pulsed Finishing Pressure and its Processing Characteristics....Pages 506-510
Chain Forming Process of Magnetic Brush Development System Used in Laser Printer....Pages 511-515
Precision Machine Tools....Pages 519-523
Effects of Bearing Surface Geometries on the Inclination Stiffness of Aerostatic Thrust Bearings....Pages 524-528
Development Of A Three Axes Travelling Column Ultraprecision Milling Machine....Pages 529-533
Development of Hydrostatic Bearings with Groove Structures....Pages 534-538
Assessment of Thermophysical Properties at Design Stage of Machine Tool Structure with Thermal Symmetricity....Pages 539-543
Concrete-based Constrained Layer Damping....Pages 544-548
Effects of Manufacturing Errors on the Accuracy for TRR-XY Hybrid PKM....Pages 549-553
Effect of Static Stiffness of Grinding Systems on a Generating Mechanism of Workpiece Geometrical Accuracy....Pages 554-558
Development of a New Reseatable Mechanism with High Accurate Positioning Reproducibility....Pages 559-563
Compensation of Periodic Errors by Gain Tuning in Multi-probe Sensors....Pages 564-568
Precision Positioning of a Surface Motor-driven XYΘ z Stage using a Surface Encoder....Pages 569-573
Feedforward Tracking Controller Design Based on a Limited Bandwidth Desired Model....Pages 574-578
Fuzzy-pid Hybrid Vibration Control of Slide Carriage of Ultraprecision Machine Tool....Pages 579-583
Nanometrology - The Frontier of Precision....Pages 584-588
Developmemt of Ultraprecision 5-axis Machine Tool Equipped with Elliptical Vibration Cutting Device....Pages 589-593
Development of on-machine Profile Measuring System With Contact-type Probe....Pages 594-598
An Instrument to Measure the Stiffness of Mems Mechanisms....Pages 599-603
Development of X-ray Stepper With High Overlay Accuracy for 100-Nm LSI Lithography....Pages 604-608
Wide Range Capacitive Gap Sensor with Reproducible Nano-meter-order Resolution....Pages 609-613
Design and Development of Multi-function Sensor Using a Group of Micro Cantilevers....Pages 614-618
A Tool to Estimate the Adhesive Forces between Microcomponents among Each Other and between Microcomponents and Grippers or Magazines....Pages 619-623
High Precision Collimation Using Talbot Interferometry....Pages 624-628
A Novel Approach For Simultaneous Measurement Of The Linear Guideway Errors Of A Machine Tool With A Volumetric Optical Encoder....Pages 629-633
Evaluation of Stages of Nano-CMM....Pages 634-638
Evaluation Method of Thermal Displacement of Machine Tools....Pages 639-643
Taut Wire Straightedge Reversal Artifact....Pages 644-648
Automated System for Three-dimensional Roughness Testing....Pages 649-653
Development of Micro-roughness Measuring Probe Using Longitudinal Tapping Mode by Ultrasonic Vibration Sensor....Pages 654-658
Effects of Surface Roughness of Si Substrate and Pt-C Multilayer Coated Film on X-ray Reflectivity....Pages 659-663
Detection of Surface Defects on Steel Ball in Bearing Production Process Using a Capacitive Sensor : Performance of Prototype System ....Pages 664-668
Advanced 3D-measuring Techniques for Quality Control of Cutting Inserts....Pages 669-673
Autonomous Profiling Measurement of Two Dimensional Section Forms Using Small-sized Ultrasonic Probe....Pages 674-678
Interferometry with Null Optics for Testing Aspherical Surfaces at 1nm Accuracy....Pages 679-683
Analysis of Defects on SiO 2 Filmed Wafer....Pages 684-688
Palmtop Pantograph Mechanism with Large-deflective Hinges for Miniature Surface Mount Systems....Pages 689-693
Dynamics of Pin Electrode in Pin-to-plate Gas Discharge System Used for Ozone-less Charger in Laser Printer....Pages 694-698
Effects of Part Flexibility on Dynamic Behaviors of Machine Systems with Clearances in the Joints....Pages 699-703
Analysis of Feed Drive System of X-Y Table Considering the Friction....Pages 704-708
Rotational Accuracy and Positioning Resolution of an Air-bearing Spindle with Active Inherent Restrictors....Pages 709-713
Precision Control of Radial Magnetic Bearing....Pages 714-718
The Effects of Joint Clearance on the Motion Precision of the Machines....Pages 719-723
Tool Trajectory Error for Table-tilting Machines....Pages 724-728
Automated Calibration for Assembly Device Installation Based on Plug & Produce Concept....Pages 729-733
Calibration of 2-DOF Parallel Mechanism....Pages 734-738
Development of a Calibration Equipment Using Laser Interferometer Combining a Variable Length Vacuum Cell....Pages 739-743
Development of Calibration Equipment Using Laser Interferometer Combining a Variable Length Vacuum Cell....Pages 744-748
A Measurement Force Estimation Method of Tapping Stylus....Pages 749-753
Investigation of the Plastic Deformation and Fracture of Carbon Nanotubes....Pages 754-758
Molecular Dynamics Simulation on Dependence of Atomic-scale Stick-slip Phenomenon upon Probe Tip Shape....Pages 759-763
Tool Wear Monitoring in Milling Process with Laser Scan Micrometer....Pages 764-768
Study On A Modified Concave Filter For Multi-oscillating Modalities Compensation In Ultra-precision Machine Tool....Pages 769-773
New Practical Control of Point-topoint Positioning Systems : Robustness Evaluation....Pages 774-778
The Research of an Intelligent Open CNC System....Pages 779-783
Robot Intelligence Augmented by Information Technology....Pages 784-788
Standard API for Open-architecture CNC and It’s Application to HMI and Operation Monitoring....Pages 789-793
Development of Large Ultraprecision Mirror Surface Grinding System with Elid....Pages 794-798
Development of a new measurement system for straightness error by a heterodyne interferometer with a grating....Pages 799-803
Development of Measuring System Equipped with Wire Probe to Measure Fine Contour Shape of Penetrated Specimen....Pages 804-808
Development of Ultra Precision Long end Standard Installing Vacuumed Optical Path Laser Interferometer....Pages 809-813
Flatness Measurement System using Fizeau Type Solid Interferometer with High Speed Acquiring Multi-phase Interferograms and Highly Effective Error Decreasing Algorithm....Pages 814-818
Proposal of Absolute Length Measuring Machine by Combining Crystalline Lattice Scale and Laser Interferometry....Pages 819-823
Evaluation of acceleration and deceleration profile of velocity and a new design method using Gaussian distribution curve....Pages 824-828
Thermal and mechanical FEA (Finite Element Analysis) of wafer heating for EB stepper....Pages 829-833
Modeling of Machining Process Planning Based on Inverse Form-shaping Function....Pages 837-841
Easy Construction of 3D Model From 2D Information....Pages 842-846
Virtual Reality For NC-programming....Pages 847-851
Development and Estimation of Case Retrieval Model for Machining Knowledge Support System on Machine Design....Pages 852-856
Integrated Process Planning and Production Control....Pages 857-861
Dynamic Job Shop Scheduling Using A Neural Network....Pages 862-866
An Organizational Concept for Manufacturing of High Precision Products....Pages 867-871
Considering Feature Interactions for the Development of a Process Planning System....Pages 872-876
Strategic Product Development Decision-making Based on Optimization Incorporating the QFD Method....Pages 877-881
Development of a Logistic Operating Curve for an Entire Manufacturing Department....Pages 882-886
Fixturing Feature for Determining Optimum Clamping Points....Pages 887-891
Feature-based Fixture Planning for Workpieces....Pages 892-896
Simulation of Manufacturing System Design for Uncertain Market Conditions....Pages 897-901
Construction of Master Model from 3D Scanned Data Using Recursive Subdivision Scheme....Pages 902-906
A Study on Knowledge Engineering for Equipment Design and Production....Pages 907-911
Life Cycle Support of Mechanical Products Using Network Agent....Pages 912-916
Aesthetic Design Based on “Kansei Language”....Pages 917-921
A Design Review and Redesign System for Nurbs Models with a Haptic Device....Pages 922-926
Free-form Surface Manufacture for TRR-XY Hybrid Parallel Link Machine Tool....Pages 927-931
Manufacturing Process Control Based on the Delta Operator....Pages 932-936
Assembly Reliability Evaluation Method (AREM)....Pages 937-941
Maintenance Support System Equipped with Monitoring Function....Pages 942-946
Development of Software Platform for Realizing the Dynamic Reconstruction of Software Applications of Manufacturing Systems....Pages 947-951
Mechatronic Service and Investigation on the Example of a Forming and Milling Machine....Pages 952-956
Gaussian-based Free Form Deformation and its Application to Fashion Design....Pages 957-961
A Proposal of Assembly Model Framework Specialized for Unified Parametrics....Pages 962-966
Precision Machining of Thin-walled Workpiece by NC Compensating Deflection....Pages 967-971
Back Matter....Pages 973-977