Simulation of Semiconductor Devices and Processes: Vol.5

Front Matter....Pages i-xx
Challenges to Achieving Accurate Three-Dimensional Process Simulation....Pages 1-8
Modeling Nano-Structure Devices....Pages 9-16
About Boltzmann Equations for Transport Modeling in Semiconductors....Pages 17-20
Applied TCAD in Mega-Bits Memory Design....Pages 21-24
Process Flow Representation within the VISTA Framework....Pages 25-28
A Powerful TCAD System Including Advanced RSM Techniques for Various Engineering Optimization Problems....Pages 29-32
Modeling of VLSI MOSFET Characteristics Using Neural Networks....Pages 33-36
Coupling a Statistical Process-Device Simulator with a Circuit Layout Extractor for a Realistic Circuit Simulation of VLSI Circuits....Pages 37-40
Simulation of Self-Heating Effects in a Power p-i-n Diode....Pages 41-44
Impact of Cell Geometries and Electrothermal Effects on IGBT Latch-Up in 2D-Simulation....Pages 45-48
On the Influence of Thermal Diffusion and Heat Flux on Bipolar Device and Circuit Performance....Pages 49-52
2-D Electrothermal Simulation and Failure Analysis of GTO Turn-off with Complete Chopper Circuit Parasitics....Pages 53-56
3D Thermal/Electrical Simulation of Breakdown in a BJT Using a Circuit Simulator and a Layout-to-Circuit Extraction Tool....Pages 57-60
Nonlocal Oxide Injection Models....Pages 61-64
Electron Transport in Silicon Dioxide at Intermediate and High Electric Fields....Pages 65-68
Efficient and Accurate Simulation of EEPROM Write Time and its Degradation Using MINIMOS....Pages 69-72
Influence of Oxide-Damage on Degradation-Effects in Bipolar-Transistors....Pages 73-76
The Application of Sparse Supernodal Factorization Algorithms for Structurally Symmetric Linear Systems in Semiconductor Device Simulation....Pages 77-80
Newton-GMRES Method for Coupled Nonlinear Systems Arising in Semiconductor Device Simulation....Pages 81-84
Practical Use of a Hierarchical Linear Solver Concept for 3D MOS Device Simulation....Pages 85-88
Further Improvements in Nonsymmetric Hybrid Iterative Methods....Pages 89-92
Rigorous Microscopic Drift-Diffusion Theory and its Applications to Nanostructures....Pages 93-96
Atomistic Evaluation of Diffusion Theories for the Diffusion of Dopants in Vacancy Gradients....Pages 97-100
Self Diffusion in Silicon Using the Ackland Potential....Pages 101-104
Three-Dimensional Numerical Simulation for Low Dopant Diffusion in Silicon....Pages 105-108
3-D Diffusion Models for Chemically-Amplified Resists Using Massively Parallel Processors....Pages 109-112
Improvement of Initial Solution Projection in Solving General Semiconductor Equations Including Engery Transport....Pages 113-116
A Numerical Implementation of the Energy Balance Equations Based on Physical Considerations....Pages 117-120
Construction of Stable Discretization Schemes for the Hydrodynamic Device Model....Pages 121-124
Three-Dimensional Implementation of a Unified Transport Model....Pages 125-128
Mixed-Mode Multi-Dimensional Device and Circuit Simulation....Pages 129-132
Modeling High Concentration Boron Diffusion with Dynamic Clustering: Influence of the Initial Conditions....Pages 133-136
Simulation of High-Dose Ion Implantation-Induced Transient Diffusion and of Electrical Activation of Boron in Crystalline Silicon....Pages 137-140
Physical Modeling of the Enhanced Diffusion of Boron Due to Ion Implantation in Thin Base npn Bipolar Transistors....Pages 141-144
Simulation of Denuded Zone Formation in CZ Silicon....Pages 145-148
A Closed Hydrodynamic Model for Hot-Carrier Transport in Submicron Semiconductor Devices....Pages 149-152
Critical Assessment of Different Hydrodynamical Models for Avalanche Multiplication Calculation in Silicon Bipolar Transistors....Pages 153-156
Dual Energy Transport Model with Coupled Lattice and Carrier Temperatures....Pages 157-160
Inclusion of Electron-Electron Scattering in the Spherical Harmonics Expansion Treatment of the Boltzmann Transport Equation....Pages 161-164
Quantitative 2D Stress Dependent Oxidation with Viscoelastic Model....Pages 165-168
Oxidation Simulation and Growth Kinetics of Thin SiO 2 in Pure N 2 O ....Pages 169-172
Accurate Simulation of Mechanical Stresses in Silicon During Thermal Oxidation....Pages 173-176
Mechanical Stress Simulation During Gate Formation of MOS Devices Considering Crystallization-Induced Stress of p-Doped Silicon Thin Films....Pages 177-180
Monte Carlo Simulation of Carrier-Carrier Interaction for Silicon Devices....Pages 181-184
Monte Carlo MOSFET Simulator Including Inversion Layer Quantization....Pages 185-188
Three-Dimensional Monte Carlo Simulation of Submicronic Devices....Pages 189-192
Monte Carlo Analysis of Voltage Fluctuations in Two-Terminal Semiconductor Devices....Pages 193-196
Simulation of Sputter Deposition Process by DUPSIM....Pages 197-200
Process Simulation for Nonplanar Structures with the Multigrid Solver LiSS....Pages 201-204
Multizone Adaptive Grid Generation Technique for Multilayer Multistep Process Simulation....Pages 205-208
Process Optimization in a Production Environment Using Simulation and Taguchi Methods....Pages 209-212
Optimization of DMOS Transistors for Smart Power Technologies by Simulation and Response Surface Methods....Pages 213-216
Improved Technology Understanding through Using Process Simulation and Measurements....Pages 217-220
Hot Carrier Suppression for an Optimized 10V CMOS Process....Pages 221-224
Electrical Parameter Sensitivity of Deep Submicron and Micron MOSFET Devices with Variation in Processing Conditions....Pages 225-228
Predicting Manufacturing Variabilities for Deep Submicron Technologies: Integration of Process, Device, and Statistical Simulations....Pages 229-232
An Investigation of Coupled and Decoupled Iterative Algorithms for Energy Balance Calculations....Pages 233-236
On the Scharfetter-Gummel Box-Method....Pages 237-240
A Spectral Method for the Numerical Simulation of Transit-Time Devices....Pages 241-244
PARDESIM — A Parallel Device Simulator on a Transputer Based MIMD-Machine....Pages 245-248
An Efficient and Accurate Method to Calculate the Two-Dimensional Scattering Rates in Heterostructure Semiconductors....Pages 249-252
Two-Dimensional Numerical Analysis on the Diffusion-Induced Degradation of A1GaAs/GaAs Heterojunction Bipolar Transistors....Pages 253-255
High Speed Performance of Si Homo-and Si/Si 1- x Ge x Heterojunction Bipolar Transistors....Pages 257-260
Analysis of a CMOS-Compatible Vertical Bipolar Transistor....Pages 261-264
Finite Element Simulation of Recess Gate MESFETs and HEMTs: The Simulator H2F....Pages 265-268
A Smallsignal Databased HEMT Model for Nonlinear Time Domain Simulation....Pages 269-272
Noise in Si / Si 1- x Ge x n-channel HEMTs and p-channel FETs....Pages 273-276
Drift Velocities and Momentum Distributions of Hot Carriers in MOSFETs at Low Supply Voltages....Pages 277-280
Numerical Simulation of MOSFETs Gate Capacitances for the Evaluation of Hot-Carrier Generated Interface States and Trapped Carriers....Pages 281-284
An Analytical Device Model Including Velocity Overshoot for Subquartermicrometer MOSFET....Pages 285-288
Numerical Modeling of Electrothermal Effects in Semiconductor Devices....Pages 289-292
Analysis of Charge Storage in Polysilicon Contacts....Pages 293-296
Simulation of the Conduction Mechanisms in Polycrystalline Silicon Thin Film Transistors....Pages 297-300
Extraction of Parameters for Balance Equations from Monte-Carlo Simulations....Pages 301-304
The Influence of Technological Parameters on Ultra-Short Gate Si-NMOS Transistor Performances....Pages 305-308
Semianalytical Universal Simulation of the Electrical Properties of the Permeable Base Transistor....Pages 309-312
The Static and Dynamic Behaviour of NPT-IGBTs with Different p + -Anode Designs....Pages 313-316
Numerical Modeling and Simulation of Multi-Electrode Semiconductor Optical Amplifiers....Pages 317-320
Simulation of Carrier Heating Induced Picosecond Operation of GaInAsP/InP Laser Diode....Pages 321-324
Computer Simulation of Inverse Problems of Crystal Growth and Photoconductivity of Graded Band Gap Semiconductors....Pages 325-328
Charge Distribution and Capacitance of Double Barrier Resonant Tunneling Diodes....Pages 329-332
Generation and Amplification of Microwave Power in Submicron n + nn + Diodes....Pages 333-336
Modelling of IGBTs and LIGBTs for Power Circuit Simulation....Pages 337-340
Physical IGBT Model for Circuit Simulations....Pages 341-344
Model-Independent Distortion Analysis in SPICE Realized for Complex Modelled Bipolar and MOS Transistors....Pages 345-348
A Newly Proposed Delay Improvement on CMOS/SOI Future Technology....Pages 349-352
Simulation of a Novel Scheme for 700–1000 V Wiring Applications....Pages 353-356
A General Simulation Method for Etching and Deposition Processes....Pages 357-360
Two Dimensional Monte Carlo Simulation of Ion Implantation in Crystalline Silicon Considering Damage Formation....Pages 361-364
MOSFET Two-Dimensional Doping Profile Determination....Pages 365-368
Determination of EBIC Response by Two-Dimensional Device Simulation....Pages 369-372
Radiative Heat Transfer with Quasi Monte Carlo Methods....Pages 373-376
Numerical Simulation of Piezo-Hall Effects in n-Doped Silicon Magnetic Sensors....Pages 377-380
Electro-Elastic Simulation of Piezoresistive Pressure Sensor....Pages 381-384
Models for the Chemo-Physical Reactions at the Sensitive Layer of Semiconductor Gas Sensors and their Application in the Simulation of these Devices....Pages 385-388
Two-Dimensional Numerical Simulations of High Efficiency Silicon Solar Cells....Pages 389-392
Simulation in High Efficiency Solar Cell Research....Pages 393-396
Modeling of Breakdown in SOI MOSFETs....Pages 397-400
3D Simulation of MOS Transistors with Inversion Condition in Two Directions....Pages 401-404
Quasi Two-Dimensional Numerical Simulation of SiGe/Si MOSFETs....Pages 405-408
Large-Signal RF and DC Performance of p-Type Diamond FETs....Pages 409-412
3D Grid Generation for Semiconductor Devices Using a Fully Flexible Refinement Approach....Pages 413-416
Grid and Geometry Techniques for Multi-Layer Process Simulation....Pages 417-420
Multigrid Becomes a Competitive Algorithm for some 3D Device Simulation Problems....Pages 421-424
A 2D Analytical Model of Current-Flow in Lateral Bipolar Transistor Structures....Pages 425-428
Consistent Treatment of Carrier Emission and Capture Kinetics in Electrothermal and Energy Transport Models....Pages 429-432
Modeling of Electron-Hole Scattering in Semiconductor Power Device Simulation....Pages 433-436
Modeling of Localized Lifetime Tailoring in Silicon Devices....Pages 437-440
Analytical Model of the Metal-Semiconductor Contact for Device Simulation....Pages 441-444
Nonlinear Contact Resistance and Inhomogeneous Current Distribution at Ohmic Contacts....Pages 445-448
Simulations of Carrier-Blocking Effects on Cutoff Frequency Characteristics for AlGaAs/GaAs HBTs with Insulating and Semi-Insulating External Collectors....Pages 449-452
Non-Stationary Transport HBT Modeling Under Non-Isothermal Conditions....Pages 453-456
An Enhanced Two Dimensional Hydrodynamic Energy Model for Transient Time Simulation of Complex Heterostructure Field Effect Transistors....Pages 457-460
Evaluation of Effective Device Parameters by Comparison of Measured and Simulated C-V Characteristics for Conventional and Pseudomorphic HEMTs....Pages 461-464
Helena: A Physical Modeling for the DC, AC, Noise and Non Linear HEMT Performance....Pages 465-468
Lifetime Calculations of MOSFET’s Using Depth-Dependent Non-Local Impact Ionization....Pages 469-472
Inverse Modeling of Impact Ionization Rate Formula Through Comparison Between Simulation and Experimental Results of MOS Device Characteristics....Pages 473-476
The MicroMOS 3D Monte Carlo Simulation Program – a Tool for Verifying the MINIMOS Mobility Models....Pages 477-480
Accurate Determination of Silicon Inversion Layer Mobility by the Monte Carlo Method....Pages 481-484
Importance of Hole Generation on Modeling and Simulation of Schottky and MESFET Structures....Pages 485-488
Thermionic Current in Direct-Indirect Energy-Gap GaAs/Al x Ga 1-x As Interfaces....Pages 489-492
Preliminary Results of Quantum Directional Coupler Simulation Using a Beam Propagation Method....Pages 493-496
Numerical Simulation of Auger-Induced Hot Electron Transport in InGaAsP/InP Double Heterojunction Laser Diodes: Hydrodynamics versus Drift and Diffusion....Pages 497-500
Back Matter....Pages 501-507