Principles of Electron Optics, Volume 2: Applied Geometrical Optics

Cover
Principles of Electron Optics
Copyright
Preface to the Second Edition
Preface to the First Edition (Extracts)
Acknowledgments
Part VII: Instrumental Optics
35 Electrostatic Lenses
	35.1 Introduction
	35.2 Immersion Lenses
		35.2.1 The Single Aperture
		35.2.2 The Two-Electrode Lens
			35.2.2.1 Adjacent cylinders
			35.2.2.2 Cylinders separated by a small gap
			35.2.2.3 Two cylinders separated by an arbitrary distance
			35.2.2.4 Cylinders of different radius
			35.2.2.5 A unified representation
		35.2.3 Three or More Electrodes
			35.2.3.1 Zoom lenses
			35.2.3.2 Accelerators
			35.2.3.3 Other studies
	35.3 Einzel Lenses
		35.3.1 The Principal Potential Models
			35.3.1.1 Regenstreif’s model
			35.3.1.2 Schiske’s model
			35.3.1.3 The model of Kanaya and Baba
			35.3.1.4 The theory of Wendt
			35.3.1.5 Shimoyama’s contribution
			35.3.1.6 Crewe’s model
			35.3.1.7 Ura’s unified representation
		35.3.2 Measurements and Exact Calculations
		35.3.3 Miniature Lenses
	35.4 Grid or Foil Lenses
	35.5 Conical Lenses and Coaxial Lenses
	35.6 Cylindrical Lenses
36 Magnetic Lenses
	36.1 Introduction
		36.1.1 Modes of Operation
		36.1.2 Practical Design
		36.1.3 Notation
	36.2 Field Models
		36.2.1 Symmetric Lenses: Glaser’s Bell-Shaped Model
			36.2.1.1 Paraxial properties
			36.2.1.2 Aberrations
	36.3 Related Bell-Shaped Curves
		36.3.1 The Grivet–Lenz Model
		36.3.2 The Exponential Model
		36.3.3 The Power Law Model
		36.3.4 The Convolutional Models
		36.3.5 A Generalized Model
		36.3.6 Unsymmetric Lenses
		36.3.7 Hahn\'s Procedure
		36.3.8 Other Models
	36.4 Measurements and Universal Curves
		36.4.1 Introduction
		36.4.2 Unsaturated Lenses
		36.4.3 Saturated Lenses
	36.5 Ultimate Lens Performance
		36.5.1 Tretner’s Analysis
			36.5.1.1 Chromatic aberration, electrostatic case
			36.5.1.2 Spherical aberration, electrostatic case
			36.5.1.3 Spherical aberration, magnetic case, L1
			36.5.1.4 Spherical aberration, magnetic case, L2
			36.5.1.5 Chromatic aberration, magnetic case L1
			36.5.1.6 Chromatic aberration, magnetic case L2
		36.5.2 Earlier Studies
		36.5.3 Optimization
	36.6 Lenses of Unusual Geometry
		36.6.1 Mini-Lenses, Pancake Lenses and Single-Polepiece Lenses
		36.6.2 Laminated Lenses
	36.7 Special Purpose Lenses
		36.7.1 Unsymmetrical Round Lenses
		36.7.2 Superconducting Shielding Lenses or Cryolenses
		36.7.3 Permanent-Magnet Lenses
		36.7.4 Triple-Polepiece Projector Lenses
		36.7.5 Objective Lens With Low Magnetic Field at the Specimen Capable of Good Resolution
		36.7.6 Probe-Forming Lenses for Low-Voltage Scanning Electron Microscopes
		36.7.7 Hybrid TEM–STEM Operation: the Twin and Super-Twin Geometries
		36.7.8 The Lotus-Root Multibeam Lens
37 Electron Mirrors, Low-Energy-Electron Microscopes and Photoemission Electron Microscopes, Cathode Lenses and Field-Emiss...
	37.1 The Electron Mirror Microscope
	37.2 Mirrors in Energy Analysis
	37.3 Cathode Lenses, Low-Energy-Electron Microscopes and Photoemission Electron Microscopes
	37.4 Field-Emission Microscopy
	37.5 Ultrafast Electron Microscopy
38 The Wien Filter
39 Quadrupole Lenses
	39.1 Introduction
	39.2 The Rectangular and Bell-Shaped Models
	39.3 Isolated Quadrupoles and Doublets
	39.4 Triplets
	39.5 Quadruplets
	39.6 Other Quadrupole Geometries
		39.6.1 Arc Lenses
		39.6.2 Crossed Lenses
		39.6.3 Biplanar Lenses
		39.6.4 Astigmatic Tube Lenses
		39.6.5 Transaxial Lenses
		39.6.6 Radial Lenses
40 Deflection Systems
	40.1 Introduction
	40.2 Field Models for Magnetic Deflection Systems
		40.2.1 Field of a Closed Loop in Free Space
		40.2.2 Approximate Treatment of Ferrite Shields
		40.2.3 The Axial Harmonics
	40.3 The Variable-Axis Lens
		40.3.1 Theoretical Considerations
		40.3.2 Practical Design
	40.4 Alternative Concepts
	40.5 Deflection Modes and Beam-Shaping Techniques
Part VIII: Aberration Correction and Beam Intensity Distribution (Caustics)
41 Aberration Correction
	41.1 Introduction
	41.2 Multipole Correctors
		41.2.1 Quadrupoles and Octopoles
		41.2.2 Sextupole Optics and Sextupole Correctors
		41.2.3 Practical Designs
		41.2.4 Measurement of Aberrations
	41.3 Foil Lenses and Space Charge
		41.3.1 Space Charge Clouds
		41.3.2 Foil Lenses
	41.4 Axial Conductors
	41.5 Mirrors
	41.6 High-Frequency Lenses
		41.6.1 Spherical Correction
		41.6.2 Chromatic Correction
	41.7 Other Aspects of Aberration Correction
	41.8 Concluding Remarks
42 Caustics and Their Uses
	42.1 Introduction
	42.2 The Concept of the Caustic
	42.3 The Caustic of a Round Lens
	42.4 The Caustic of an Astigmatic Lens
	42.5 Intensity Considerations
	42.6 Higher Order Focusing Properties
	42.7 Applications of Annular Systems
Part IX: Electron Guns
43 General Features of Electron Guns
	43.1 Thermionic Electron Guns
	43.2 Schottky Emission Guns
	43.3 Cold Field Electron Emission Guns
	43.4 Beam Transport Systems
44 Theory of Electron Emission
	44.1 General Relations
	44.2 Transmission Through a Plane Barrier
	44.3 Thermionic Electron Emission
	44.4 The Tunnel Effect
	44.5 Field Electron Emission
	44.6 Schottky Emission
	44.7 Concluding Remarks
45 Pointed Cathodes Without Space Charge
	45.1 The Spherical Cathode
	45.2 The Diode Approximation
	45.3 Field Calculation in Electron Sources with Pointed Cathodes
		45.3.1 Analytic Field Models
		45.3.2 Rigorous Methods
	45.4 Simple Models
		45.4.1 A Diode-Field Model
		45.4.2 Thermionic Triode Guns
46 Space Charge Effects
	46.1 The Spherical Diode
	46.2 Asymptotic Properties and Generalizations
	46.3 Determination of the Space Charge
	46.4 The Boersch Effect
		46.4.1 Introduction
		46.4.2 The Shift of the Mean Energy
		46.4.3 Thermodynamic Considerations
			46.4.3.1 Transverse temperatures
			46.4.3.2 The longitudinal temperature
			46.4.3.3 The thermodynamic limit
			46.4.3.4 The beam entropy
		46.4.4 Analytical Calculations
47 Brightness
	47.1 Application of Liouville’s Theorem
	47.2 The Maximum Brightness
	47.3 The Influence of Apertures
	47.4 Lenz’s Brightness Theory
		47.4.1 Rotationally Symmetric Electrostatic Fields
		47.4.2 The Generalized Theory
	47.5 Measurement of the Brightness
	47.6 Coulomb Interactions and Brightness
	47.7 Aberrations in the Theory of Brightness
48 Emittance
	48.1 Trace Space and Hyperemittance
	48.2 Two-Dimensional Emittances
		48.2.1 General Emittance Ellipses
		48.2.2 Acceptance and Matching
	48.3 Brightness and Emittance
	48.4 Emittance Diagrams
49 Gun Optics
	49.1 The Fujita–Shimoyama Theory
	49.2 Rose’s Theory
	49.3 Matching the Paraxial Approximation to a Cathode Surface
50 Complete Electron Guns
	50.1 Justification of the Point Source Model
	50.2 The Lens System in Field-Emission Devices
	50.3 Hybrid Emission
	50.4 Conventional Thermionic Guns
	50.5 Pierce Guns
	50.6 Multi-electron-beam Systems
	50.7 Carbon Nanotube Emitters
	50.8 Further Reading
Part X: Systems with a Curved Optic Axis
51 General Curvilinear Systems
	51.1 Introduction of a Curvilinear Coordinate System
	51.2 Series Expansion of the Potentials and Fields
	51.3 Variational Principle and Trajectory Equations
	51.4 Simplifying Symmetries
	51.5 Trajectory Equations for Symmetric Configurations
	51.6 Aberration Theory
		51.6.1 Magnetic Systems
		51.6.2 Compound Systems
			51.6.2.1 Aberrations of second rank
			51.6.2.2 Third-rank aberrations
52 Sector Fields and Their Applications
	52.1 Introduction
	52.2 Magnetic Devices with a Circular Optic Axis
	52.3 Radial (Horizontal) Focusing for a Particular Model Field
	52.4 The Linear Dispersion
	52.5 The Axial (Vertical) Focusing
	52.6 Fringing Field Effects
	52.7 Aberration Theory: The Homogeneous Magnetic Field (n=0)
	52.8 Optimization Procedures
		52.8.1 Single Deflection Prisms
		52.8.2 Use of Symmetries
	52.9 Energy Analysers and Monochromators
		52.9.1 Introduction
		52.9.2 In-column Energy Analysers
		52.9.3 Details of the Various Filters
		52.9.4 The Möllenstedt and Ichinokawa Analysers
		52.9.5 Postcolumn Spectrometers
		52.9.6 Monochromators
53 Unified Theories of Ion Optical Systems
	53.1 Introduction
	53.2 Electrostatic Prisms
	53.3 A Unified Version of the Theory
	53.4 The Literature of Ion Optics
Notes and References
	Part VII, Chapter 35
	Part VII, Chapter 36
	Part VII, Chapters 37–40
	Part VIII, Chapters 41 and 42
	Part IX, Chapters 43–50
	Part X, Chapters 51–53
	Conference Proceedings
Index
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