Nonthermal Plasma Surface Modification of Materials

Preface
Contents
About the Author
1 Fundamentals of Nonthermal Plasma Technologies
	1.1 Introduction
	1.2 Generation of Atmospheric-Pressure Nonthermal Plasmas
	1.3 What Are Plasmas?
	1.4 Types of Plasmas
	1.5 Pulse Corona Plasmas
	1.6 Dielectric Barrier Discharge-Induced Plasmas
	1.7 High-Frequency Plasmas
		1.7.1 Surface Discharge Plasma
		1.7.2 Radio-Frequency Plasma
		1.7.3 Microwave-Generated Plasma
	1.8 Plasma Jet
	1.9 Conclusions
	References
2 Fundamentals of Surface Treatment Technologies and Characterization
	2.1 Introduction
	2.2 Mechanism of Surface Modification
	2.3 Plasma Graft Polymerization
	2.4 Apparatus for Surface Treatment
	2.5 Surface Characterization Methods
		2.5.1 Contact Angle Measurement
		2.5.2 Evaluating Adhesive Properties by Peeling Test
		2.5.3 Result of Surface Analysis by ESCA (XPS)
		2.5.4 Result of FTIR Analysis
		2.5.5 Result of SEM Analysis
	2.6 Conclusion
	References
3 Hydrophilic Treatment for Polymer Surfaces and Its Applications
	3.1 Introduction
	3.2 Plasma Treatment and Plasma Graft Polymerization Treatment
		3.2.1 Plasma
		3.2.2 Examples of Plasma Treatment Electrodes
		3.2.3 Principle and Example of Hydrophilic Plasma Treatment
		3.2.4 Plasma Surface Treatment and Plasma Graft Polymerization Surface Treatment Mechanism
		3.2.5 Structure of the Three Electrodes with Different Potentials
		3.2.6 Principle of Atmospheric-Pressure Plasma Graft Polymerization and Adhesion Improvement Mechanism
	3.3 Atmospheric-Pressure Plasma Graft Polymerization Treatment
		3.3.1 Atmospheric-Pressure Plasma Graft Polymerization Apparatus
		3.3.2 Surface Treatment Evaluation for PTFE Metal Plating
		3.3.3 XPS Analysis Results
	3.4 Applicability of PTFE/Plastics in Millimeter-Wave Devices
		3.4.1 Plastic Properties: Dielectric Constant, Dielectric Loss Tangent, and Hydrophobicity
		3.4.2 Small High-Performance Millimeter-Wave Band Antennas
		3.4.3 Applicability to High-Frequency Coaxial Cables
		3.4.4 Method of Copper Plating on PTFE and Results
		3.4.5 Surface Treatment of Dielectric Cable
		3.4.6 Method of Nickel Plating on PTFE and Results
		3.4.7 Microfabrication of Nickel Plating on PTFE
		3.4.8 Applicability to Radome
		3.4.9 Plasma Hybrid Surface Treatment of Fiber-Reinforced Composite Materials
	3.5 Development of OLEDs on PCTFE
		3.5.1 Flexible OLED Element
		3.5.2 Peeling Strength for PCTFE
		3.5.3 XPS Analysis Results
		3.5.4 SEM Observation Results
		3.5.5 Prototype Fabrication Procedure for OLED Device on PCTFE
	3.6 Improved Adhesion of Fluoroplastic Film to Butyl Rubber
		3.6.1 Application Example: Prefilled Syringe
		3.6.2 Butyl Rubber and PTFE Film Composite Material
		3.6.3 Peeling Test of Fluoroplastic Film–Butyl Rubber Composite
		3.6.4 Peeling Strength of the Composite Material
		3.6.5 Molecular-Level Adhesion Mechanism Between Rubber and PTFE
	3.7 Conclusions
	References
4 Hydrophilic Treatment Technology for Textiles, Filters, and Glass and Its Applications
	4.1 Introduction
	4.2 Surface Treatment of Textiles and Apparels
		4.2.1 Principle of Functional Surface Treatment
		4.2.2 Experimental Apparatus and Methods
		4.2.3 Experimental Results and Discussion
	4.3 Deodorization Technology Using Low-Temperature Nonthermal Plasma
		4.3.1 Plasma Deodorization Technology
		4.3.2 Methods for Producing and Measuring Performance of Functional Filters
		4.3.3 Experimental Results and Explanation
	4.4 Increased Glass Surface Hydrophilicity by Nonthermal Plasma Treatment
		4.4.1 Definition of Contact Angle
		4.4.2 Glass Surface Treatment Using Atmospheric-Pressure NTP Irradiation
		4.4.3 Glass Surface Hydrophilicity Dynamically Controlled by Nonthermal Plasma Actuator
	4.5 Conclusions
	References
5 Hydrophobic Treatment for Polymer Surfaces
	5.1 Introduction
	5.2 Preparing a Hydrophobic Material Surface by Fluorocarbon Plasma Treatment
	5.3 Radio-Frequency Plasma Reactors with Chemical Vapor Deposition Apparatus
	5.4 Nonthermal Plasma Technology for Surface Modification
	5.5 Reaction Between Plasma and Polymer
	5.6 Surface Hydrophobicity by Laser Microfabrication
	5.7 Diamond-Like Carbon-Based Plasma Surface Treatment
	5.8 Plasma-Treated Catalyst Surfaces
	5.9 Trends in Other Plasma-Based Surface Treatments
	5.10 Conclusions
	References
6 Hydrophobic Treatments for Plastic, Glass, and Metal Surfaces and Their Applications
	6.1 Introduction
	6.2 Definition of Plasma and Its Characteristics
		6.2.1 Definition of Plasma
		6.2.2 Plasma Parameters
		6.2.3 Thermal Equilibrium and Nonequilibrium Plasma
		6.2.4 Method to Evaluate Ionization Degree in Plasma
	6.3 Principles of Plasma Cleaning and Surface Activation Methods
		6.3.1 Overview of Plasma Cleaning
		6.3.2 Example of Electrode Systems for Reduced-Pressure Plasma Treatment
		6.3.3 Cleaning Using Atmospheric-Pressure Plasmas
		6.3.4 Effects of Atmospheric-Pressure Plasma Cleaning
		6.3.5 Remote Plasma Cleaning and Cleaning by Ozone
	6.4 Example of Plasma Cleaning and Enhanced Activation of Hydrophilicity
		6.4.1 Hybrid Plasma-Hydrophobic–Chemical Process
		6.4.2 Experimental Apparatus and Method
		6.4.3 Test Results Obtained for Cleaning and Hydrophilicity and Discussion
		6.4.4 Hydrophobic Approach
	6.5 Hybrid Plasma–Anti-corrosion Process Treatment (Aluminum Plate Surface Treatment)
		6.5.1 Ordinary and Hybrid Plasma Treatments
		6.5.2 Plasma Apparatus
		6.5.3 Treatment After Plasma Irradiation and Increased Anti-corrosion Effect
		6.5.4 Results and Discussion
		6.5.5 Corrosion Test Results
	6.6 Conclusions
	References
7 Plasma and Electron-Beam Technologies Used for Surface Treatment Applications
	7.1 Introduction
	7.2 Plasma Hybrid Hydrophilic Treatment Process
		7.2.1 Principles
		7.2.2 Examples of the Adhesion of Glass and PTFE
	7.3 Anti-fog Using Electron-Beam Irradiation Treatment Process
		7.3.1 Principles
		7.3.2 Anti-fog Treatment Application Example
	7.4 Plasma Treatment for Medical Applications
		7.4.1 Surface Treatment for an Endoscope
		7.4.2 Plasma Jet Sterilization of Surfaces
	7.5 Conclusions
	References
8 Measurement Technology for Functional Groups Generated by Plasma Treatment
	8.1 Introduction
	8.2 Analysis of Functional Groups Generated by Plasma Treatment
		8.2.1 Functional Group Analysis of Plasma Graft-Polymerized Acrylic Acid Film on PTFE by FTIR
		8.2.2 Functional Group Analysis of Plasma Graft-Polymerized Acrylic Acid Film on PTFE by XPS
	8.3 Analysis of Chemical Species Formed by Plasma Treatment
		8.3.1 Analysis of Byproducts During Treatment of Ammonia Gas and Acetaldehyde Gas with Plasma by FTIR
		8.3.2 Analysis of Byproducts During Treatment of CF4 Gas with ICP by FTIR
		8.3.3 Analysis of Byproducts During Treatment of Xylene Gas with Plasma by FTIR
		8.3.4 Analysis of Byproducts During Plasma Treatment of TEOS by FTIR
	8.4 Conclusions
	References
Concluding Remarks
Appendix
A.1 Historical Image of Sakai City
A.2 Principle Explanation of XPS Measurement
A.3 Principle Explanation of SEM Measurement
A.4 Principle Explanation of FTIR Measurement
Reference