Metrics for high-quality specular surfaces

Content: Preface --
List of Abbreviations--
List of Symbols. Chapter 1 Surface Metrics, 1.1 Introduction 
 1.2 Why Measure Surfaces? 1.2.1 System function. 1.2.2 Appearance. 1.2.3 Manufacturing efficiency. 1.2.4 Benefits 
 1.3 Definition of Surface Metrics. 1.3.1 Surface metrics influencing quality. 1.3.2 Causes of defects in surface topography 
 1.4 Chapter Conclusions 
 References. Chapter 2 Surface Form, 2.1 Introduction 
 2.2 Optical Height Probes 
 2.3 Optical Slope Probe 
 2.4 Interferometers. 2.4.1 Twyman-Green interferometer. 2.4.2 Laser Fizeau interferometer. 2.4.3 Four-step measurement of phase. 2.4.4 Interlaboratory comparison of interferometers. 2.4.5 Interferometer error sources and calibration
 2.5 Form Tolerances. 2.5.1 Approximating a spherical surface. 2.5.2 Sagitta error. 2.5.3 Irregularity function. 2.5.4 Irregularity. 2.5.5 Approximating an aspheric surface. 2.5.6 Rotationally symmetric irregularity. 2.5.7 Total RMS deviation (RMSt). 2.5.8 RMS irregularity (RMSi). 2.5.9 RMS asymmetry (RMSa.) 2.5.10 Form indication on drawings 
 2.6 Chapter Conclusions 
 References. Chapter 3 Surface Roughness, 3.1 Introduction 
 3.2 Typical Optical Component Roughness Values 
 3.3 Deterministic Methods. 3.3.1 Stylus method. 3.3.2 Profilometry metrics. 3.3.3 Microinterferometer 
 3.4 Parametric Methods. 3.4.1 Surface point spread functions. 3.4.2 Total integrated scatter measurement 
 3.5 Surface Roughness Indications in Drawings 
 3.6 Chapter Conclusions 
 References --
Chapter 4 Surface waviness, 4.1 Introduction 
 4.2 Fourier Analysis of Height Profile 
 4.3 Spatial Frequency Zones 
 4.4 Computation of Texture 
 4.5 Chapter Conclusions 
 References. Chapter 5 Surface Imperfections, 5.1 Introduction 
 5.2 Imperfections and Subconscious Thoughts 
 5.3 Effect of Surface Imperfections 
 5.4 Impact of Imperfections on Market Access 
 5.5 Description of Imperfections. 5.5.1 Terminology. 5.5.2 Size of imperfections. 5.5.3 Substrates/materials. 5.5.4 Location. 5.5.5 Characteristics
 5.6 Influence of Imperfections on Quality. 5.6.1 Cosmetic influence. 5.6.2 Functional influence 
 5.7 Causes of Imperfections 
 5.8 Reduction of Damage 
 5.9 Imperfection Measurement. 5.9.1 Why measure imperfections? 5.9.2 Characterization and measurement of imperfections 
 5.10 Comparison of Measurement Methods 
 5.11 Imperfection Size Versus Visibility. 5.11.1 Surface step as an imperfection. 5.11.2 Step measurement by interferometry 
 5.12 The Eye as a Sensor. 5.12.1 Benefits. 5.12.2 Disbenefits 
 5.13 Disbenefits of Inspection 
 5.14 National Standards for Scratch Assessment. 5.14.1 United States. 5.14.2 Germany. 5.14.3 France. 5.14.4 United Kingdom 
 5.15 Level of Agreement Achieved Using National Standards 
 5.16 Scratch Reference Standards 
 5.17 Target Specification for Imperfection Measurement 
 5.18 Need for Standards 
 5.19 ISO TC 172 Optics and Optical Instruments 
 5.20 Comparison of Two Methods Proposed by ISO in 1996. 20.1 Method I. 5.20.2 Method II. 5.20.3 Comparison of Methods I and II 
 5.21 Chapter Conclusions 
 References. Chapter 6 Measurement of Imperfections by Obscuration, 6.1 Introduction 
 6.2 Optical Component Inspection 
 6.3 Radiometric Obscuration by Imperfections 
 6.4 Calibration Graticules 
 6.5 LEW and SED Measurement Requirements 
 6.6 LEW and SED Simple Viewing System 
 6.7 Analogue Microscope Image Comparator (AMIC). 6.7.1 Description. 6.7.2 Theory. 6.7.3 Method of operation 
 6.8 Digital Microscope Image Comparator (DMIC. 6.8.1 Description. 6.8.2 Results and discussion 
 6.9 Chapter Conclusions 
 References. Chapter 7 Surface Imperfection Quality Control, 7.1 Introduction 
 7.2 Survey of Tolerances. 7.2.1 British Standard BS4301 (1991). 7.2.2 American Standard MIL-O-13830A:1963. 7.2.3 German Standard DIN 3140: Part 7, 1978. 7.2.4 French Standard 
 7.3 Acceptable Thresholds for Scratches and Roughness 
 7.4 Inspection and Measurement Flow Diagram 
 7.5 Chapter Conclusions 
 References. Chapter 8 Far-Field Nanoscopy, 8.1 Introduction 
 8.2 Comparison between Subjective and Objective Measurements of Imperfections 
 8.3 Relative Contrast of Standard Scratches 
 8.4 Measurement of Imperfections and Contamination in Assemblies 
 8.5 Measurement of Imperfections in Coatings 
 8.6 Use of MIC to Measure Surface Texture 
 8.7 Use of MIC to Examine Phase Objects 
 8.8 Use of MIC in AC Mode 
 8.9 Use of MIC On-Machine 
 8.10 Chapter Conclusions 
 References. Chapter 9 Strip Product Inspection, 9.1 Introduction 
 9.2 Laser Beam Scanners 
 9.3 Camera Inspection Systems 
 9.4 Chapter Conclusions 
 Acknowledgment 
 References --
Appendix 1. Quality Metrics for Digital Cameras --
Appendix 2. Surface Cleaning --
Glossary --
Contacts and Further Reading --
Index.