Fundamentals of laser micromachining

 Content: Introduction  Laser Theory and Operation Brief Review of Laser Physics CO2 Lasers Solid-State Nd3+ Lasers Excimer Lasers Fiber Lasers Disk Lasers Ultrashort Pulse (USP) Lasers Comparisons of Laser Sources  Optics  Optics Beam Delivery Systems-Imaging and Focusing Steps to an Effective Optical Setup  Light-Material Interaction Photoablation and Material Interaction with UV Light Thermal Effects Taper Fluence  System Integration Processing System Considerations General Requirements Part Viewing Systems Motion Control Part Handling Laser Support Systems  Software Safety  Discussion of Some Processing Techniques Aligning to Fiducials Laser Drilling Large Numbers of Really Small, High-Aspect Ratio Holes Gas Assist Micromarking Patterning Thin Films Multiple Hole Drilling Using Galvos In-Volume Selective Laser Etching (ISLE)  Applications Microelectronics and Semiconductors  Medical Devices Defense/Aerospace Renewable Energy Other  Materials Metals Ceramics Glasses Silicon and Gallium Arsenide Polymers Diamond  Metrology and Cleaning Metrology  Postlaser Cleaning  Conclusion  Appendix: Additional Reading  Index