Design, fabrication and characterization of nano-photonic components based on silicon and plasmonic material

Contents......Page 7
List of Papers......Page 9
Acronyms......Page 11
1.1 Background......Page 13
1.2 Scope and Structure of the Thesis......Page 15
2.2 Finite-Difference Time-Domain Method......Page 17
2.2.1 Basic Formulas......Page 18
2.2.2 Introducing Dispersion......Page 20
2.2.3 Boundary Condition......Page 22
2.2.4 Source Setup and Result Analysis......Page 23
2.2.5 Simplified Treatment for Circular Symmetric Structures......Page 25
2.3 Full-Vectorial Finite-Difference Mode Solver......Page 26
2.3.2 E-Form VS. H-Form......Page 27
3.1 Introduction......Page 31
3.2.1 Plasma Enhanced Chemical Vapor Deposition......Page 32
3.2.2 Electron-Gun Evaporation......Page 34
3.3.1 Electron-Beam Lithography......Page 35
3.3.2 Resist Selection......Page 37
3.4 Pattern Transfer......Page 39
3.4.1 Reactive Ion Etching......Page 40
3.4.2 Lift-off......Page 42
3.5 Characterization Method......Page 43
4.2 Arrayed Waveguide Gratings Based on Silicon Nanowires......Page 45
4.2.1 Design......Page 46
4.2.3 Measurement Results......Page 49
4.3 Photonic Crystal Based Polarization Beam Splitter......Page 51
4.3.1 Design......Page 52
4.3.2 Fabrication Process......Page 53
4.3.3 Measurement Results......Page 55
5.1 Surface Plasmon Waveguides and Components......Page 57
5.1.1 Surface Plasmon Waveguides......Page 58
5.1.2 Nano-Photonic Components Based on Surface Plasmon Waveguides......Page 61
5.2.1 Metal-Cladded Near-Field Fiber Probes......Page 67
5.2.2 Solid Immersion Lens with a Left Handed Material Slab......Page 69
6 Summary, Conclusion, and Future Work......Page 73
7 Description of Original Work......Page 77
Bibliography......Page 81