Ultra-Fast Material Metrology

Ultra-fast Material Metrology......Page 5
 A Personal Foreword......Page 9
Contents......Page 11
 Preface to the First Edition......Page 15
 Acknowledgment......Page 17
1.1 Motivation......Page 19
1.3 Guideline......Page 22
1.4 Matrix of Laser Effects and Applications......Page 23
1.5.1 Metrology Techniques Before the Advent of Laser......Page 24
1.5.2 Ultra-fast Pump and Probe Metrology......Page 25
2.1 Ultra-fast Laser Sources......Page 29
2.1.1 General Aspects for Ultra-precise Engineering......Page 30
2.1.2 General Aspects on Ultra-fast Lasers for Ultra-fast Metrology......Page 31
2.1.3 Laser Oscillator......Page 33
2.1.4 Amplifier......Page 36
2.1.5 Facilities......Page 43
2.2.1 Ultra-small Laser Focus......Page 44
2.2.2 Gaussian Beam......Page 45
2.2.3 Beam Parameters of Gaussian Radiation......Page 47
2.2.4 Pulse Duration......Page 50
2.2.5 Beam Stability......Page 52
2.2.6 Key Parameters for Ultra-precision Machining and Diagnostics......Page 53
2.3 Beam Positioning and Scanning......Page 54
2.3.1 Positioning......Page 55
2.3.2 Scanning Systems......Page 57
2.4 New Challenges to Ultra-fast Metrology......Page 59
2.4.2 Spatial Domain......Page 60
2.5 Domains of Optical Pump and Probe Techniques for Process Diagnosis......Page 61
3.1.1 Linear Optics: Group Velocity Dispersion and Chirp......Page 63
3.1.2 Non-linear Processes......Page 66
3.2.1 Absorption of Laser Radiation in Matter......Page 72
3.2.2 Energy Transfer from Electrons to Matter......Page 74
3.2.3 Melting and Vaporization......Page 76
3.2.4 Melt Dynamics......Page 78
3.2.5 Onset of Ablation......Page 80
3.2.6 Ionization......Page 81
3.3.1 Absorption of Radiation in a Plasma......Page 82
3.3.2 Plasma Heating......Page 87
3.3.3 Ionization of a Plasma......Page 90
3.3.4 Electron Transitions and Energy Transport......Page 92
3.3.5 Dielectric Function of a Plasma......Page 95
3.3.6 Ponderomotive Force......Page 96
4.1 Ultra-fast Laser Radiation......Page 99
4.1.2 Dispersion......Page 100
4.1.3 Coherence......Page 101
4.2 Preparation of States and Conditions for Probe Beams......Page 103
4.2.2 Preparation of States by Spectro-Temporal Shaping......Page 104
4.2.3 Measurement of States......Page 106
4.2.4 Measurement of Radiation Properties......Page 107
4.3.1 Diffraction Theory and Incoherent Illumination......Page 109
4.3.2 Image Formation by Microscopy and Coherent Illumination......Page 113
4.4 Temporal Delaying......Page 115
4.4.1 Mechanical Delay......Page 116
4.4.2 Non-mechanical Delay......Page 119
5 Examples for Ultra-fast Detection Methods......Page 123
5.1.1 Transient Absorption Spectroscopy (TAS)......Page 124
5.1.2 Temporal Shaped Pulses......Page 131
5.2 Imaging Detection......Page 136
5.2.1 Non-coherent Methods......Page 137
5.2.2 Coherent Methods......Page 142
6 Applications of Pump and Probe Metrology......Page 151
6.1.2 Measurement of Ejected Plasma, Vapor and Melt......Page 152
6.2.1 Introduction......Page 155
6.2.2 Detection of Plasma Dynamics......Page 156
6.3.1 Introduction......Page 158
6.3.2 Detection of Laser-Induced Defects......Page 159
6.3.3 Detection of Refractive-Index Changes and Cracking......Page 161
6.4.1 Introduction......Page 163
6.4.2 Detection of Laser-Induced Melting......Page 164
7 Perspectives for the Future......Page 169
7.1 Laser and Other Sources......Page 170
7.2.2 Beam Shaping......Page 171
8 Summary......Page 173
Appendix A Lock-in Amplifier......Page 177
B.1 Abbe Sine Condition......Page 179
B.2 Quantitative Phase Microscopy......Page 180
C.1.2 Thermal Conductivity......Page 183
C.1.3 Diffusivity of Electrons......Page 184
C.1.4 Viscosity......Page 185
C.2 Debye Length......Page 186
C.3 Plasma Oscillations and Waves......Page 187
C.4 Coupling Between Electrons and Ions......Page 189
C.5 Hydrodynamic Instabilities......Page 190
Appendix D Facilities......Page 191
E.1 Abbreviations......Page 195
E.2 Symbols......Page 196
References\n......Page 201
Glossary......Page 213
Index......Page 217