Transducers ’01 Eurosensors XV: The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany

Front Matter....Pages i-xxxii
Front Matter....Pages 1-1
Technologies for Microturbomachinery....Pages 2-5
MEMS Meets Insects....Pages 6-9
Front Matter....Pages 11-11
Retina Implant — A BioMEMS Challenge....Pages 12-18
MEMS—the view back…and the vistas ahead....Pages 20-23
Front Matter....Pages 25-25
Miniaturized Thermoelectric Generators Based on Poly-Si and Poly-SiGe Surface Micromachining....Pages 26-29
A Combustion-Based MEMS Thermoelectric Power Generator....Pages 30-33
An Integrated Combustor-Thermoelectric Micro Power Generator....Pages 34-37
A Laser-micromachined Vibrational to Electrical Power Transducer for Wireless Sensing Systems....Pages 38-41
Micro Generator Systems....Pages 42-45
The Modelling of a Piezoelectric Vibration Powered Generator for Microsystems....Pages 46-49
Front Matter....Pages 51-51
A Miniaturized, Autonomous, Programmable Stress Monitoring Device, part of a Dental Prosthesis....Pages 52-55
Monolithic Surface-Micromachined Sensor System for High Pressure Applications....Pages 56-59
Dedicated Interface Electronics for Capacitively-Coupled Conductivity Detection in On-chip Capillary Electrophoresis....Pages 60-63
Sensitivity Enhancement of MEMS Inertial Sensors Using Negative Springs and Active Control....Pages 64-67
A Smart Wind-Sensor based on Thermal Sigma-Delta Modulation....Pages 68-71
High Mass and Spatial Resolution Mass Sensor based on Resonating Nano-Cantilevers Integrated with CMOS....Pages 72-75
Position Sensing System Using Integrated Magnetic Sensors and Neural Networks....Pages 76-79
An Accurate CMOS Smart Temperature Sensor with Dynamic Element Matching and Second-Order Curvature Correction....Pages 80-83
The Scaling of Multiple Sensor Signals with a Wide Dynamic Voltage Range....Pages 84-87
Integrated multi-sensor system for intelligent data carrier....Pages 88-91
Front Matter....Pages 51-51
Novel Surface-Micromachined Low-Power Fuses for On-Chip Calibration....Pages 92-95
Sensors Linearity Improvement by Means of Dithering: Feasibility and Limits....Pages 96-99
Electronic protection of the conductivity detector in a micro capillary electrophoresis channel....Pages 100-103
Sophisticated Interface Electronics for QCM....Pages 104-107
Front Matter....Pages 109-109
Bimorph Piezoelectric Acoustic Transducer....Pages 110-113
High-Directivity Array of Ultrasonic Micro Sensor Using PZT Thin Film on Si Diaphragm....Pages 114-117
Self-Calibrating Micromachined Microphones with Integrated Optical Displacement Detection....Pages 118-121
Single-Chip Low-Voltage Analog-to-Digital Interface for Encapsulation with Electret Microphone....Pages 122-125
Silicon Microphones with Low Stress Membranes....Pages 126-129
Fabrication of a Biomimetic Corrugated Polysilicon Diaphragm with Attached Single Crystal Silicon Proof Masses....Pages 130-133
Front Matter....Pages 135-135
Reference Magnetic Actuator for self Calibration of a very small Hall Sensor Array....Pages 136-139
A Vertical Hall Device in CMOS High-Voltage Technology....Pages 140-143
Single deposition GMR sensors for rotational speed sensing....Pages 144-147
High Directional Sensitivity of Micromachined Magnetic Fluxgate Sensors....Pages 148-151
Magnetic Sensor Based on Stabilized MOSFET Field Emitter Arrays....Pages 152-155
A New Highly Sensitive Parallel — Field Hall Microsensor....Pages 156-159
High Sensitivity Hall Magnetic Sensors Using Planar Micro and Macro Flux Concentrators....Pages 160-163
Ferromagnetic Micromechanical Magnetometers....Pages 164-167
A study on narrow-range angle sensors based on wiggles in angular dependence of pseudo-Hall effect in permalloy thin films....Pages 168-171
Stochastically distributed nanowires with micro-lithographic interconnects for magnetic field sensors....Pages 172-175
Front Matter....Pages 177-177
Selective Encapsulation Using a Polymeric or Bonded Silicon Constraint Dam for Media Compatible Pressure Sensor Applications....Pages 178-181
Wafer-Level Packaging Using Localized Mass Deposition....Pages 182-185
“Cavity-Micromachining” Technology: Zero-Package Solution for Inertial Sensors....Pages 186-189
Accelerated Hermeticity Testing of a Glass-Silicon Package Formed by RTP Aluminum-to-Silicon Nitride Bonding....Pages 190-193
An Ultra-Thin Hermetic Package Utilizing Electroplated Gold....Pages 194-197
Plastic BGA Package and Direct Filter Attachment for CMOS Thermal Imagers....Pages 198-201
Novel optical transceiver with compound parabolic concentrator for graded index plastic optical fiber....Pages 202-205
Mounting of Si-Chips with Plastically Bent Cantilevers....Pages 206-209
Anisotropic Conductive Adhesion of Microsensors Applied in the Instance of a Low Pressure Sensor....Pages 210-213
Nanosecond-Pulsed Laser Bonding with a Built-in Mask for MEMS Packaging Applications....Pages 214-217
Local Laser Bonding for Low Temperature Budget....Pages 218-221
An 8-inch Wafer Bonding Apparatus with Ultra-High Alignment Accuracy Using Surface Activated Bonding (SAB) Concept....Pages 222-225
Si-Si Bonding Using RF and Microwave Radiation....Pages 226-229
Anodic-Bonding on Glass Layers Prepared by a Spin-on Glass Process: Preparation Process and Experimental Results....Pages 230-233
Silicon Pyrex Electrostatic Bonding : Applicability to Industrial Microdevices Production....Pages 234-237
Front Matter....Pages 239-239
Improved Coupled-Field FE Analysis of Micromachined Electromechanical Transducers....Pages 240-243
Theoretical Analysis of the Tilting Effect in Silicon Micro-Switches....Pages 244-247
Macromodeling of an Electrostatic Torsional Actuator....Pages 248-251
A Novel Topology Design Scheme for the Multi-Physics Problems of Electro-Thermally Actuated Compliant Micromechanisms....Pages 252-255
An Analytical Model of the Piezojunction Effect for Arbitrary Stress and Current Orientations....Pages 256-259
Front Matter....Pages 239-239
Computational Methods for Reduced Order Modeling of Coupled Domain Simulations....Pages 260-263
Automatic Reduced-Order Modeling in MEMCAD using Modal Basis Functions....Pages 264-267
Modeling and Simulation of Microelectromechanical Systems with an Analog Hardware Description Language....Pages 268-271
Automatic transfer from bulk-silicon technology simulation into the FEM-environment....Pages 272-275
Efficient Numerical Predictions of MEMS Fluid-Structure Interaction Damping....Pages 276-279
Layout Extraction for Integrated Electronics and MEMS Devices....Pages 280-283
A High Torque Density MEMS Magnetic Induction Machine....Pages 284-287
Modeling the Pull-In Parameters of Electrostatic Actuators with a Novel Lumped Two Degrees of Freedom Pull in Model....Pages 288-291
On the Effect of Residual Charges on the Pull-In Parameters of Electrostatic Actuators....Pages 292-295
Low Voltage Driven Capillary Electrophoresis Chips Using Travelling Electric Field Design....Pages 296-299
Modeling and Characterization of Lamé-mode Microresonators Realized by UV-LIGA....Pages 300-303
Design and Simulation of Capacitive, Piezoresistive and Piezoelectric Triaxial Accelerometers Using a Highly Symmetrical Quad-Beam Structure....Pages 304-307
Fet Pressure Sensor and Iterative Method for Modelling of the Device....Pages 308-311
Dielectric micro-hotplate for integrated sensors: An electro-thermo-mechanical analysis....Pages 312-315
On-Chip Integrated Silicon Bulk-Micromachined Soil Moisture Sensor Based on the DPHP Method....Pages 316-319
Front Matter....Pages 321-321
A Dielectrophoresis-based Array Cytometer....Pages 322-325
Fabrication of Directly Synthesized DNA Chip using Photolithography for Rapid and Parallel Gene Analysis....Pages 326-329
Immobilized Two Dimensional Protein Arrays by μ-Stamp and Protein Well....Pages 330-333
Electrochemical Gene Detection with PCR Chip....Pages 334-337
Soft Lithographic Techniques for Guidance of Hippocampal Neurons on Micro-Electrode Arrays....Pages 338-341
Front Matter....Pages 321-321
Development of superoxide sensor by superoxide dismutase immobilization....Pages 342-345
Bioelectronic Nose for Methyl Mercaptan Vapor using a Xenobiotic Metabolizing System....Pages 346-349
Radial Artery Pulse Detection System based on EIGHT Constitutional Medicine Theory....Pages 350-353
Development of a Multichannel Integrated Interferometer Immunosensor....Pages 354-357
Flexible BIOMEMS with Electrode Arrangements on Front and Back Side as Key Component in Neural Prostheses and Biohybrid Systems....Pages 358-361
Self-assemblage of redox proteins and nucleic acids onto a lipidic biosensor....Pages 362-365
Development of Receptor Based Affinity Microassay....Pages 366-369
An In-Line Osmometer for Application in Tissue Based Biosensor Systems....Pages 370-373
A Biosensor for Escherichia coli Based on a Potentiometric Alternating Biosensing (PAB) Transducer....Pages 374-377
Sensing Nitric Oxide Neuronal Messengers Using Screen-Printed Carbon Micro-Electrode Arrays....Pages 378-381
Cuff Actuator for Adaptive Holding Condition around Nerves....Pages 382-385
Intracellular Neuronal Recording with High Aspect Ratio MEMS Probes....Pages 386-389
Analysis of Microelectrode-Recorded Signals from a Cardiac Cell Line as a Tool for Pharmaceutical Screening....Pages 390-393
The Fabrication of the Novel Micro Time-of-Flight (TOF) Mass Spectrometer with a Micro Ion Source....Pages 394-397
Discrimination of D-Amino Acids from L-Amino Acids Using Membrane Characteristics Change....Pages 398-401
Design of Miniaturized Solid-State Sensors Based on Silicon Structure with Back-Side Contacts....Pages 402-405
Front Matter....Pages 407-407
A Miniaturized Analysis System Based on Capillary Electrophoresis and Contactless Conductivity Detection....Pages 408-411
Fabrication of a Micro Needle for a Trace Blood Test....Pages 412-415
A 256-Site 3D CMOS Microelectrode Array for Multipoint Stimulation and Recording in the Central Nervous System....Pages 416-419
A Disposable Intelligent Mosquito with a Reversible Sampling Mechanism Utilizing the Volume Phase Transition of a Gel....Pages 420-423
Front Matter....Pages 407-407
Micromachined Ultrasonic Ophthalmic Microsurgical Tool with Integrated Pressure Sensor....Pages 424-427
Front Matter....Pages 429-429
Inertial Sensors for Automotive Applications....Pages 430-433
RASTA: the Real-Acceleration-for-Self-Test Accelerometer....Pages 434-437
Fiber Optic — MEMS Accelerometer with high mass displacement resolution....Pages 438-441
A Monolithic Three-Axis Accelerometer with Symmetric Properties....Pages 442-445
5-Axis Capacitive Motion Sensor Fabricated by Silicon Micromachining Technique....Pages 446-449
A 19-Element Shock Sensor Array for Bi-Directional Substrate-Plane Sensing Fabricated by Sacrificial LIGA....Pages 450-453
Front Matter....Pages 455-455
A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes....Pages 456-459
A Link Beam Driven, Triple Axis Angular Rate Sensor Based on a Double Gimbal Structure....Pages 460-463
New Approach for Frequency Matching of Tuning Fork Gyroscopes by Using a Nonlinear Driving Concept....Pages 464-467
Self-Test for Resonant Structure Sensors Applied to a Tuning Fork Gyro and a Resonant Accelerometer....Pages 468-471
New Digital Readout Electronics for Capacitive Sensors by the Example of Micro-Machined Gyroscopes....Pages 472-475
A Bulk-Micromachined Single Crystal Silicon Gyroscope Operating at Atmospheric Pressure....Pages 476-479
Front Matter....Pages 481-481
A Piezoresistive Low-Pressure Sensor Fabricated Using Silicon-on-Insulator (SOI) for Harsh Environment Applications....Pages 482-485
High Temperature Characterization of Ceramic Pressue Sensors....Pages 486-489
The NanoPirani — Presumably the World’s Smallest Pressure Sensor....Pages 490-493
Miniaturized pressure sensor using a free hanging strain-gauge with leverage effect for increased sensitivity....Pages 494-497
Capacitive Silicon Microsensor for Force and Torque Measurement....Pages 498-501
A New Vacuum Friction Gauge Based on a Si Tuning Fork....Pages 502-505
A Servo-Controlled Capacitive Pressure Sensor with a Three-Mask Fabrication Sequence....Pages 506-509
Front Matter....Pages 481-481
High temperature pressure sensor with monolithically integrated CMOS readout circuit based on SIMOX technology....Pages 510-513
Fabrication and Testing of Single Crystalline 3C-SiC Piezoresistive Pressure Sensors....Pages 514-517
Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High Temperature and Harsh Environments....Pages 518-521
Front Matter....Pages 523-523
Transmission-Type Optical Sensors Fabricated by Si Micromachining....Pages 524-527
Miniature CO2 Gas Sensor (1 cm3) using Silicon Microbolometers and Micro Variable Infrared Filter....Pages 528-531
CMOS integrated wavefront sensor....Pages 532-535
Development of a Micro-Optical Distance Sensor with Electrical I/O Interface....Pages 536-539
Bias dependent photocurrent collection in p-i-n a-Si:H/SiC:H heterojunction....Pages 540-543
Photochemical Reaction By Nanometer-scale Light Emitting Diode-Antifuses....Pages 544-547
Fabrication and Optical Measurements of Multi-slit Grating Based Infrared micro-spectrometer....Pages 548-551
Si Micromachined Optical Encoder Based on Grating Imaging....Pages 552-555
CMOS Micromachined Infrared Imager Pixel....Pages 556-559
Wavelength-Differential Imaging Using Variable Interferometer and Visualization of Gas Flow....Pages 560-563
An Uncooled Infrared Sensor of Dielectric Bolometer Mode Using a New Detector Technique of Operation Bias Voltage....Pages 564-567
Pyroelectric High-Resolution Linear Array with 256 Micromachined Lithium Tantalate Pixels....Pages 568-571
Front Matter....Pages 573-573
A Chopperless Pyroelectric Active Pixel Infrared Image Sensor Using Chip Shift Operation....Pages 574-577
Laser scanned photodiodes (LSP) for Image sensing....Pages 578-581
Electron Emission Type Infrared Imaging Sensor Using Ferroelectric Thin Plate....Pages 582-585
A Millimeter-wave Image Sensor using Antenna Coupled Micro Thermocouple....Pages 586-589
A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope....Pages 590-593
Front Matter....Pages 595-595
Micromachining of Piezoelectric MEMS....Pages 596-599
Methods for Fabrication of Released Nickel Comb-Drive Devices on CMOS....Pages 600-603
Anisotropic Si Etching Technique for Optically Smooth Surfaces....Pages 604-607
Ultra-Fast Anisotropic Silicon Etching with Resulting Mirror Surfaces in Ammonia Solutions....Pages 608-611
Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures....Pages 612-615
Fabrication of Micromechanical Structures of Titania and Titanium with Electrophoretic Deposition....Pages 616-619
Surface Micromachining Process for C-Si as Active Material....Pages 620-623
Advanced Sacrificial Poly-Si Technology for Fluidic Systems....Pages 624-627
A new processing technique to prevent stiction using silicon selective etching for SOI-MEMS....Pages 628-631
Electrochemical Etching for n-type Silicon using a Novel Etchant....Pages 632-635
A Novel Sub-Micron Gap Fabrication Technology Using Chemical-Mechanical Polishing (CMP): Application to Lateral Field Emission Device (FED)....Pages 636-639
Micro- and Nanopatterning of Sensor Chips by Means of Macroporous Silicon....Pages 640-643
Microfluidic Channel Routing with Protected Convex Corners....Pages 644-647
A New Explanation of Mask-corner Undercut in Anisotropic Silicon Etching: Saddle Point in Etching Rate Diagram....Pages 648-651
BrF3 Dry Release Technology for Large Freestanding Parylene MEMS....Pages 652-655
Front Matter....Pages 657-657
Nanoelectromechanical Systems....Pages 658-661
Why is (111) Silicon a Better Mechanical Material for MEMS?....Pages 662-665
Analyzing Fluid Compression Effects in Complicated Micro-machined Devices....Pages 666-669
Physically-based Modeling of Squeeze Film Damping by Mixed Level System Simulation....Pages 670-673
Microdischarge Device Fabricated In Silicon By Micromachining Technique with Pyramidal Cavity....Pages 674-677
Front Matter....Pages 657-657
Using the Pull-In Voltage as Voltage Reference....Pages 678-680
Front Matter....Pages 681-681
Parallel Linear Actuator System with High Accuracy and Large Stroke....Pages 682-685
A High-Frequency, High-Stiffness Piezoelectric Micro-Actuator for Hydraulic Applications....Pages 686-689
A Monolithic Piezoelectric Miniature Robot with 5 DOF....Pages 690-693
A Novel Micromachined Electromagnetic Loudspeaker for Hearing Aid....Pages 694-697
An Active Guide Wire With Shape Memory Alloy Bending Actuator Fabricated By Room Temperature Process....Pages 698-701
The Floating Mass Vibration Transducer Using Polyimide Elastic Body for Implantable Hearing Aid....Pages 702-705
Bistable thin film composites with TiHfNi-shape memory alloys....Pages 706-709
SMA Microgripper System....Pages 710-713
Compliant MicroTransmissions for Rectilinear Electrothermal Actuators....Pages 714-717
Bulk Micromachined Durable Air-Flow Microactuator Array for Robust Conveyance Systems....Pages 718-721
A New Micro Pneumatic Actuator for Micromechanical Systems....Pages 722-725
Influence of Elastic Deformation in Surface Acoustic Wave Motor Friction Drive....Pages 726-729
Front Matter....Pages 731-731
Design, Fabrication and Testing of New Comb Actuators Realizing Three-Dimensional Continuous Motions....Pages 732-735
Optimal Shape Design for Electrodes of a Rotary Microactuator....Pages 736-739
Electrostatically-Driven-Leverage Actuator as an Engine for Out-of-plane Motion....Pages 740-743
Self-reciprocating Radioisotope-powered Cantilever....Pages 744-747
A Micromechanical Switch with Electrostatically Driven Liquid-Metal Droplet....Pages 748-751
Fabrication of Micro XY-Stage with Large-Area Rectangular Shuttle using Anodic Bonding Process....Pages 752-755
A Novel Electrostatic Vertical Actuator Fabricated in one Homogeneous Silicon Wafer Using Extended SBM Technology....Pages 756-759
Front Matter....Pages 731-731
New Current Drive Method to Extend the Stable Operation Range of Electrostatic Actuators: Experimental Verification....Pages 760-763
3D Self-assembled Micro-actuators for Optical Applications....Pages 764-767
Front Matter....Pages 769-769
The Emergence of Physical Chemosensors and Biosensors....Pages 770-775
MEMS Spectrometer for Infrared Gas Analysis based on a Tunable Filter of Porous Silicon....Pages 776-779
A Photoacoustic Gas Sensing Silicon Microsystem....Pages 780-783
High-Q Factor RF Planar Microcoils on Glass Substrates for NMR Spectroscopy....Pages 784-787
Micromachined Mass Spectrometer....Pages 788-791
Front Matter....Pages 793-793
Design and fabrication of a Hydrodynamic Chromatography Chip....Pages 794-797
Chemical Images by an Artificial Olfactory Bulb....Pages 798-801
Miniaturized Flame Ionization Detector for Gas Chromatography....Pages 802-805
New Type of Thermal Conductivity Sensor for Gas Detection....Pages 806-809
Impedance Imaging of Chemical and Biochemical Systems....Pages 810-813
Front Matter....Pages 815-815
Preparation of Thermally Stable Mesoporous Tin Oxide as a Semiconductor Gas Sensor Material....Pages 816-819
Silicon Planar Microcalorimeter Employing Nanostructured Films....Pages 820-823
Screen Printed Metal Oxide Gas Sensors with Microminiature Gas Separation Systems....Pages 824-827
Group III-Nitride based Gas Sensors for Exhaust Gas Monitoring....Pages 828-831
Pt/CeO2 SIC Schottky diodes with high response to hydrogen and hydrocarbons....Pages 832-835
Comparison of Single and Binary Oxide MoO3, TiO2 and WO3 Sol-gel Gas Sensors....Pages 836-839
Gas Sensing Properties of P-type Semiconducting Cr-doped TiO2 Thin Films....Pages 840-843
Polysilicon mesoscopic wires coated by Pd as high sensitivity H2 sensors....Pages 844-847
Front Matter....Pages 815-815
New Material for Thin Film Filament of Micromachined Hot-plate....Pages 848-851
Front Matter....Pages 853-853
Microsystems in Space Exploration....Pages 854-857
A Hybrid Cold Gas Microthruster System for Spacecraft....Pages 858-861
High-Density Micromachined Acoustic Ejector Array For Micro Propulsion....Pages 862-865
“Water Needle”—A New Phenomenon for Ink-Jet Printing....Pages 866-869
A High-Impulse Low-Power Microthruster Using Liquid Propellant with High-Viscous Fluid-Plug....Pages 870-873
A Micromachined Monolithic Inkjet Print Head with Dome Shape Chamber....Pages 874-877
A Surface Micromachined Electrostatic Drop Ejector....Pages 878-881
Performance Improvement in Dome Jet Inkjet Print Head by Measuring Temperature of Heater....Pages 882-885
Front Matter....Pages 887-887
The Optimized SMA Micro Pump Chip Applicable to Liquids and Gases....Pages 888-891
A Micromachined Silicon Low-Voltage Parallel-Plate Electrokinetic Pump....Pages 892-895
Pneumatic Silicon Microvalves with Piezoelectric Actuation....Pages 896-899
Electrostatic Microvalves in Silicon with 2-Way-Function for Industrial Applications....Pages 900-903
Micro Flow Switches Using Thermal Gelation of Methyl Cellulose for Biomolecules Handling....Pages 904-908
Batch Fabrication of Silicon Micropumps....Pages 908-911
High-Speed and Bi-Stable Electrolysis-Bubble Actuated Gate Valves....Pages 912-915
Front Matter....Pages 917-917
A Pneumatically-Actuated Silicon Microvalve and its Application to Functional Fluidic Integrated Circuits....Pages 918-921
Characterization of a Micro-Mixing, Pumping, and Valving System....Pages 922-925
Smart Passive Microfluidic Systems Based on Ferrofluids for μTAS Applications....Pages 926-929
A Frequency Addressable Ultrasonic Microfluidic Actuator Array....Pages 930-933
Front Matter....Pages 917-917
Stainless Steel-Based Integrated Mass-Flow Controller for Reactive and Corrosive Gases....Pages 934-937
Thermal Bubble Powered Microfluidic Mixer with Gas Bubble Filter....Pages 938-941
A Portable Drug Delivery System with Silicon Capillaries as Key Components....Pages 942-945
Development of a High Density, Planar, Modular Microfluidic Interconnect System....Pages 946-949
Front Matter....Pages 951-951
Epitaxial Technology for MEMS Applications....Pages 952-955
Novel Low-Temperature CVD Process for Silicon Carbide MEMS....Pages 956-959
Poly SiGe, a Promising Material for MEMS Post-Processing on Top of Standard CMOS Wafers....Pages 960-963
A Bonded-Micro-Platform Technology for Modular Merging of RF MEMS and Transistor Circuits....Pages 964-967
Front Matter....Pages 969-969
Performance Characterization of Ultra-Thin N-Type Piezoresistive Cantilevers....Pages 970-973
Single Crystalline Silicon Nano Wire Piezoresistors for Mechanical Sensors....Pages 974-977
The temperature-stable piezoelectric material GaPO4 and its sensor applications....Pages 978-981
Thermophysical Characterisation of PolySi0.7Ge0.3 for Use in Thermoelectric Devices....Pages 982-985
Investigation of 4H-SiC as a New Material for Hall or Temperature Sensors Working up to 500 °C....Pages 986-989
PZT thin films for piezoelectric micro-actuator applications....Pages 990-993
High Aspect Ratio Soft Micromolding of Piezoceramic Thick Films....Pages 994-997
Properties of 1–3 PZT Composite for Ultrasonic Transducer Array Fabricated by Micro-pressing and Dicing Methods....Pages 998-1001
Front Matter....Pages 1003-1003
Low Force Electrical Contact Measurements Using Piezoresistive MEMS Cantilevers to Characterize Thin-Film Metallization....Pages 1004-1007
Analysis and Experiments for Evaluating Adhesion of Arbitrary-Shaped Microstructures using Optimization Method....Pages 1008-1011
Controlled Part-to-Substrate Micro-Assembly via Electrochemical Modulation of Surface Energy....Pages 1012-1014
Ultrahydrophobic Surface Selectively Modified by Pulse Electrodeposition from Aqueous Dispersion of PTFE Particles....Pages 1015-1019
Front Matter....Pages 1003-1003
Conformal Coating Process of Anti-sticking Thin Film Using C4F8 and Ar Plasma without Additional Equipment....Pages 1020-1023
Front Matter....Pages 1025-1025
The “Millipede”—More than 1000 Tips for Parallel and Dense Data Storage....Pages 1026-1029
Microsystem for Vertical Profile Measurement of High Aspect-ratio Microstructures....Pages 1030-1033
Nanometric Sensing and Processing with Micromachined Functional Probe....Pages 1034-1037
Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits....Pages 1038-1041
Formation of ultra-shallow p+/n junctions using BF2 implantation for the fabrication of improved piezoresistive cantilevers....Pages 1042-1045
CMOS 10-Cantilever Array for Constant-Force Parallel Scanning AFM....Pages 1046-1049
On a MEMS-Based Parametrically Amplified Atomic Force Sensor....Pages 1050-1053
A Longitudinally Vibrating Touch Probe Sensor Using PZT Thin Film Vibrator....Pages 1054-1057
Fabrication of a Nanoneedle Array....Pages 1058-1060
Fabrication of Various Shapes Nano Structure using Si Anisotropic Etching and Silicidation....Pages 1062-1063
Front Matter....Pages 1065-1065
A 10-MHz Micromechanical Resonator Pierce Reference Oscillator for Communications....Pages 1066-1069
High Q Achieved in Microwave Inductors Fabricated by Parallel Self-Assembly....Pages 1070-1073
14 MHz Micromechanical Oscillator....Pages 1074-1077
Much Enlarged Resonant Amplitude of Micro-resonator with Two-degree-of-freedom (2-DOF) Mechanical Coupling Scheme....Pages 1078-1081
Embedded Solenoid Inductors for RF CMOS Power Amplifiers....Pages 1082-1085
Measurement Techniques for Capacitively-Transduced VHF-to-UHF Micromechanical Resonators....Pages 1086-1089
Front Matter....Pages 1090-1093
Honeycomb-Shaped Deep-Trench Oxide Posts Combined with the SBM Technology for Micromachining Single-Crystal Silicon Without Using SOI....Pages 1095-1095
A Novel High Aspect Ratio Technology for MEMS Fabrication Using Standard Silicon Wafers....Pages 1096-1099
Front Matter....Pages 1100-1103
Pillar Structures with the Space of Sub-Microns Fabricated by the Macroporous Based Micromachining....Pages 1095-1095
Extension of Surface/Bulk Micromachining: One-Mask Fabrication Technology Enabling the Integration of 6-DoF Inertial Sensors on a Single Wafer....Pages 1104-1107
Three-Dimensional Micromachining of Silicon Nitride for Power Microelectromechanical Systems....Pages 1108-1111
Front Matter....Pages 1112-1115
Disposable Plastic Microfluidic Arrays for Applications in Biotechnology....Pages 1117-1117
Droplet Manipulation on a Superhydrophobic Surface for Microchemical Analysis....Pages 1118-1121
Hydrodynamic Adressing; A Flow Cell for Improved Signal Quality in Bioanalytical Systems....Pages 1122-1125
Microfluidic Chips with MxN Continuous Sample Introduction Function Using Hydrodynamic Flow Switching....Pages 1126-1129
PMMA (Poly-Methylmethacrylate) Microchips for On-line DNA Preconcentration and Electrophoresis....Pages 1130-1133
Glass-Silicon Bonding Technology with Feed-Through Electrodes for Micro Capillary Electrophoresis....Pages 1134-1137
Polycarbonate-Based Capillary Electrophoresis Devices for DNA Analysis....Pages 1138-1141
High Aspect Ratio Channels for Capillary Electrophoresis....Pages 1142-1145
Experimental verification of an improved method for conductivity detection in on-chip capillary electrophoresis systems....Pages 1146-1149
Si Based Thin-Film Filter with High Visible-Over-UV Selectivity for Biochemical Fluorescence Analysis....Pages 1150-1153
A Chemiluminescence-Based Multi-Sensor System for the Analytical Detection of Gases....Pages 1154-1157
On-chip impedance-spectroscopy for flow-cytometry using a differential electrode sensor....Pages 1158-1161
Multi-Inlet Chip for Electrokinetic Immunometric Heterogeneous Immunoassay....Pages 1162-1165
A Durable Sensor for Blood Cell Counter Using MEMS Technology....Pages 1166-1169
Manufacturing and Integration of Diffractive Optical Elements with Microfluidic CD Devices....Pages 1170-1173
Characterization of a Mixing Layer Microdevice....Pages 1174-1176
Fabrication of Flexible, Implantable Microelectrodes with Embedded Fluidic Microchannels....Pages 1178-1181
Front Matter....Pages 1182-1185
Microfluidic Bioanalysis Cartridge with Interchangeable Microchannel Separation Components....Pages 1117-1117
Universal integrated diagnostic sample preparation for rapid quantitative and qualitative nucleic acid analysis....Pages 1186-1189
Front Matter....Pages 1190-1193
A Foldable Artificial Lens with an Integrated Transponder System for Measuring Intraocular Pressure....Pages 1195-1195
Design of a Self-Contained 3D microvalve in PDMS....Pages 1196-1199
Novel Liquid Injection Method with Wedge-Shaped Microchannel on a PDMS Microchip System for Diagnostic Analyses....Pages 1200-1203
Modular biosystem for the culture and characterisation of scarce epithelial cell tissues....Pages 1204-1207
A New Fixed-Volume Metering Microdispenser Module based on sPROMs Technology....Pages 1208-1211
Front Matter....Pages 1212-1215
Improved Recovery Time for ISFET Glucose Sensor....Pages 1217-1217
A Simple pH Detector Based on an Organic Field-Effect Transistor....Pages 1218-1221
Single Drop Acid-Rain Analysis Using Microsensors....Pages 1222-1225
Study of Gas Ionization Schemes for Micro Devices....Pages 1226-1229
Thermolysin as a Recognition Element for Microdetermination of Zinc(II) Ions Based on the Apoenzyme Reactivation Methods....Pages 1230-1233
Front Matter....Pages 1234-1237
Increasing Probability of a Success for High-Tech Startup Companies....Pages 1239-1239
Competitive Position of the Micro System Technologies for Wavelength Handling in all-optical Networks for Telecom....Pages 1240-1247
Development of Micro-machined Three-axis Sensors in Venture Business....Pages 1248-1251
MEMS Commercialization: Slow but Steady....Pages 1252-1255
Front Matter....Pages 1256-1259
Micromirrors for Adaptive-Optics Arrays....Pages 1261-1261
Dual-Mode micromirrors for Optical Phased Array Applications....Pages 1262-1265
Torsional Micromirrors with Lateral Actuators....Pages 1266-1269
Micromachined multi-lever linkage angular motion amplifier....Pages 1270-1273
Front Matter....Pages 1274-1277
Mechanical Behavior of a Silicon Micro-Optical Attenuator....Pages 1261-1261
High resolution micromachined scanning mirror....Pages 1278-1281
Integrated Micromachined Tunable Lasers for All-Optical Network Applications....Pages 1282-1285
Front Matter....Pages 1286-1289
Fabrication and Experiments on Electromagnetic Micromirror Array with Bulk Silicon Mirror Plate and Aluminum Spring....Pages 1291-1291
Optical Switch Using Draw-Bridge Micromirror for Large Array Crossonnects....Pages 1292-1295
A Novel Optical Scanner with Integrated Two-Dimensional Magnetostrictive Actuation and Two-Dimensional Piezoresistive Detection....Pages 1296-1299
4×4 Matrix Switch Based on MEMS Switches and Integrated Waveguides....Pages 1300-1303
Technology of reflective membranes for spatial light modulators....Pages 1304-1307
A Latching, Bistable Optical Fiber Switch Combining LIGA Technology with Micromachined Permanent Magnets....Pages 1308-1311
Waveguiding in MEMS Compatible 3-D, Silicon Photonic Lattices....Pages 1312-1315
Focal Length Control by Microfabricated Planar Electrodes-based Liquid Lens (μPELL)....Pages 1316-1319
Front Matter....Pages 1320-1323
Friction and Wear Properties of Microstructures in MEMS....Pages 1325-1325
Electronic Transport Mechanisms in WO3-Based Ultra-Thin Film Chemiresistive Sensors....Pages 1326-1329
Fast thermal characterization of nano-liter fluid volumes....Pages 1330-1333
Effect of Temperature on Mechanical Properties of Polysilicon....Pages 1334-1337
The Design and Analysis of Shock Resistant Microsystems (MEMS)....Pages 1338-1341
In-situ Mechanical Characterization of a 100 Nanometer Thick Freestanding Aluminum Film in TEM Using MEMS Force Sensors....Pages 1342-1345
Tensile Testing System for Sub-Micrometer Thick Films....Pages 1346-1349
Fabrication, Test and Simulation of a Parylene Diaphragm....Pages 1350-1353
Silicon, Parylene, and Silicon/Parylene Micro-Needles for Strength and Toughness....Pages 1354-1357
Front Matter....Pages 1358-1361
Uniaxial Stress Effect on Copper Energy Levels in Silicon....Pages 1325-1325
Fracture Properties of LPCVD Silicon Nitride Thin Films from the Load-Deflection of Long Membranes....Pages 1362-1365
Temperature Dependent Thermal Conductivities of CMOS Layers by Micromachined Thermal van der Pauw Test Structures....Pages 1366-1369
A Study on Nonlinear Torsional Characteristics of Polyimide Hinges....Pages 1370-1373
Die-level Characterization of Bulk-etched MEMS using Resonant Ultrasound Spectroscopy....Pages 1374-1377
The Silicon Optical Absorption Coefficient Revisited....Pages 1378-1381
n-Type β-SiC Piezoresistance Analysis Under High Temperature and High Impurity Concentration....Pages 1382-1385
Strength and Leak Testing of Plasma Activated Bonded Interfaces....Pages 1386-1389
Characteristics of Low Force Contact Process for MEMS Probe Cards....Pages 1390-1393
Analysis of Ultrasonic Wire Bonding by In-situ Piezoresistive Microsensors....Pages 1394-1397
A Tactile Sensor Instantaneously Evaluating Friction Coefficients....Pages 1398-1401
Front Matter....Pages 1402-1405
Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array....Pages 1407-1407
A Novel Micromachined Flow Sensor Using Periodic Flapping Motion of a Planar Jet Impinging on a V-Shaped Plate....Pages 1408-1411
Time of Flight Micro Flow Sensor for Aqueous Fluids Using In-Situ Produced Tracer....Pages 1412-1415
AC-Driven Temperature-Balance Flow Sensor....Pages 1416-1419
A Thermal Flow Sensor For Common Rail Injection Systems....Pages 1420-1423
High Resolution Level Sensors for Harsh Environments....Pages 1424-1427
A Micormachined Coriolis-Force-Based Mass Flowmeter for Direct Mass Flow and Fluid Density Measurement....Pages 1428-1431
Thermal Flow Sensors for Very Small Flow Rate....Pages 1432-1435
A Novel Low Cost Lead-frame Air Flow Anemometer....Pages 1436-1439
Front Matter....Pages 1440-1443
Low-Cost Flow Transducer Fabricated with the Amanda-Process....Pages 1407-1407
A MEMS surface fence sensor for wall shear stress measurement in turbulent flow areas....Pages 1444-1447
An electronical characterisation method for an acoustic and thermal flow sensor....Pages 1448-1451
A Resonant Temperature Sensor Based on Electrical Spring Softening....Pages 1452-1455
Micromachined inclinometer with high sensitivity and very good stability....Pages 1456-1459
Thermal and Gas-Sensing Properties of a Micromachined Thermal Conductivity Sensor....Pages 1460-1463
Thermal Performance and Stability of Poly Si/Pt(Ni) Thin Film Temperature Sensors on GaAs....Pages 1464-1467
Temperature Sensors with High Irradiation Resistance for Atomic Application....Pages 1468-1471
Front Matter....Pages 1472-1475
Compact Squeezed-Film Damping Model for Perforated Surface....Pages 1477-1477
Planar Micro-Fluidic Devices for Controlled Vortex Generation....Pages 1478-1481
Study of Boiling Regimes and Transient Signal Measurements in Microchannels....Pages 1482-1485
Fluid Filling into Microfabricated Reservoirs....Pages 1486-1489
Mechanistic Model of Diffusion and Reaction in Thin Sensor Layers — The DIRMAS-Model....Pages 1490-1493
Front Matter....Pages 1494-1497
Integrated RF MEMS for Single Chip Radio....Pages 1499-1499
Fabrication of a 94 GHz LIGA Klystrino....Pages 1500-1503
Scalability of Capacitive RF MEMS Switches....Pages 1504-1507
A 3-Voltage Actuated Micromachined RF Switch for Telecommunications Applications....Pages 1508-1510
A Novel MEMS LC Tank for RF Voltage Controlled Oscillator(VCO)....Pages 1512-1515
Copper Interconnect Low-K Dielectric Post-CMOS Micromachining....Pages 1516-1519
A Micromachined Millimeter Wave Phase Shifter Using Semi-Lumped Elements....Pages 1520-1523
Front Matter....Pages 1524-1527
Reducing the Effect of Parasitic Capacitance on MEMS Measurements....Pages 1499-1499
Performance and Dynamics of a RF MEMS Switch....Pages 1528-1531
Fabrication of a Solenoid-Type Microwave Transformer....Pages 1532-1535
Front Matter....Pages 1536-1539
3D MEMS Fabrication Using Low-Temperature Wafer Bonding With Benzocyclobutene (BCB)....Pages 1541-1541
Novel Shaped Microstructures Processed by Deep X-Ray Lithography....Pages 1542-1545
Direct Microfabrication Using an X-Ray Micro-Beam....Pages 1546-1549
Plastic Deformation Magnetic Assembly (PDMA) Of 3D Microstructures: Technology Development and Application....Pages 1550-1553
Fabrication of an Electrostatic Lens Array with Separate Electrodes and Shield Membranes Using the UV-Liga Process....Pages 1554-1557
A 3-Dimensional Wafer-Level Stacking Technology with Precise Vertical Interconnections to MEMS Applications....Pages 1558-1561
A Low Temperature, Wafer Level Transfer Integration Technology....Pages 1562-1565
Parallel Discharge with Partitioned Electrode Arrays for Accelerated Batch Mode Micro-EDM....Pages 1566-1569
Fabrication Method for Out-of-Plane Coil by Surface Micromachining....Pages 1570-1573
Demonstration of a Microscale Heat Exchanger for a Silicon Micro Gas Turbine Engine....Pages 1574-1577
Magnetic Flux Generator for Balanced Membrane Loudspeaker....Pages 1578-1581
Front Matter....Pages 1582-1585
Application and Investigation of In-Plane Compliant SU8-Structures for MEMS....Pages 1587-1587
Fabrication of Ultrathick Micromolds Using JSR THB-430N Negative UV Photoresist....Pages 1588-1591
Fabrication of Complex Micro Channel Systems Inside Optically-Transparent 3D Substrates by Laser Processing....Pages 1592-1595
Innovative Concept for the Fabrication of Micromechanical Sensor and Actuator Devices Using Selectively Metallized Polymers....Pages 1596-1599
Photoplastic shadow-masks for rapid resistless multi-layer micropatterning....Pages 1600-1603
A Novel UV-LIGA Process Using PMER as a Mold Material for Optical Switch Application....Pages 1604-1607
Front Matter....Pages 1608-1611
Micro Plastic Embossing Process: Experimental and Theoretical Characterizations....Pages 1587-1587
Derivatization of Fluorinated Polymers and their Potential Use for the Construction of Biosensors....Pages 1612-1615
Front Matter....Pages 1616-1619
Biomimetic Sensing Systems for Acoustic Measurement and Visual Tracking....Pages 1621-1621
Sound Source Localization Sensor with Mimicking Barn Owls....Pages 1622-1625
Multi-parameter Catheter Sensor System with Intravascular Navigation....Pages 1626-1629
Exploring Insect Biomechanics with Micromachined Force Sensors....Pages 1630-1633
The Mechanical Property of the Coiled Axon of Meissner Corpuscles for Human Tactile Sensing and its Application to a Biomimetic Tactile Sensor with a Helical Structure....Pages 1634-1637
Front Matter....Pages 1638-1641
Wavelet Transform and Fuzzy ARTMAP Based Pattern Recognition for Fast Gas Identification Using a Micro-Hotplate Gas Sensor....Pages 1643-1643
Improvement of Olfactory Video Camera — Gas/Odor Flow Visualization System —....Pages 1644-1647
Diffusion Equation-Based Study of Thin Film Semiconductor Gas Sensor -Response Transient-....Pages 1648-1651
Selective Ammonia Exhaust Gas Sensor for Automotive Applications....Pages 1652-1655
SOI-based Micro-hotplate Microcalorimeter Gas Sensor With Integrated BiCMOS Transducer....Pages 1656-1659
Solid-State Dissolved Oxygen Sensor Test Matrix Using a Pulsed-Plasma Deposited PTFE Film....Pages 1660-1663
Highly Sensitive and Selective Gas Sensors Using the Polythiophen Derivatives Controlled the Temperature....Pages 1664-1667
Thermal Optimization of a Novel Micro Gas Sensor Array With Different Operating Temperatures....Pages 1668-1671
A New Micro Sensor Array With Porous Tin Oxide Thin Films and Micro-hotplate Dangled by Wires in Air....Pages 1672-1675
A Novel Micro Gas Sensor Array Using Temperature Gradient on the Single Glass....Pages 1676-1679
A Data Acquisition System for A Hand-Held Electronic Nose (H2EN)....Pages 1680-1683
Front Matter....Pages 1684-1687
Sensing Properties to Dilute Chlorine Gas of Indium Oxide Based Thin Film Sensors Prepared by EB Evaporation....Pages 1689-1689
Diffusion equation-based analysis of thin film semiconductor gas sensor -sensitivity dependence on film thickness and operating temperature-....Pages 1690-1693
Front Matter....Pages 1694-1697
NO2 and ozone monitoring in an urban atmosphere using Pd/Ge/Pd/InP(p) pseudo Schottky junctions....Pages 1689-1689
High Temperature NOx Sensor Based on Stabilized Zirconia and ZnFe2O4 Electrode....Pages 1698-1701
Trace benzene monitoring in the outdoor air: comparative results between measurements carried out with an innovative approach and a std. GC tool....Pages 1702-1705
High H2 Sensing Performance of Anodically Oxidized TiO2 Film Contacted with Pd....Pages 1706-1709
A Selective Ethanol Sensor: TiO2 and W/TiO2 by a Novel Sol-Gel Technique....Pages 1710-1713
Classification of Indoor Environmental Gases Using Temperature Modulation of Two SnO2 Sensing Films on a Substrate....Pages 1714-1717
Thick Film Sensor Chip for CO Detection in Pulsing Mode: Detection Mechanism, Design, and Realization....Pages 1718-1721
Evaluation of on-line hot flue gas measurements....Pages 1722-1725
Influence of the Gate Material and Temperature on the Diode Properties of Schottky Diodes based on SiC in O2 or CO Ambient....Pages 1726-1729
Hydrocarbon Detection using MOS Capacitors in a Temperature-Pulsed Mode....Pages 1730-1733
Highly sensitive vapor sensor using an inductively coupled surface acoustic wave sensor....Pages 1734-1737
Chemical Sensor Using Polarity Controlled Fractal Surface....Pages 1738-1741
Detection of Volatile Compounds Correlated to Human Diseases Through Breath Analysis With Chemical Sensors....Pages 1742-1745
Micro Membrane Reactor: A flow-through Membrane for Gas Pre-Combustion....Pages 1746-1749
Back Matter....Pages 1750-1753
....Pages 1755-1781