Servo Scanning 3D Micro Electro Discharge Machining: Principles and Methods for Machining 3D Microstructures

Preface\nAcknowledgements\nContents\nAbout the Authors\nAbbreviations\n1 Basic Principle\n	1.1 Introduction\n	1.2 Basic Principles of Servo Scanning 3D Micro EDM Process\n	1.3 Feasibility Verification of Process Principle\n	1.4 Summary\n	References\n2 3D CAD/CAM System\n	2.1 Introduction\n	2.2 System Design\n		2.2.1 Planning of Path Type and Path Span\n		2.2.2 Post Processing of NC Codes\n		2.2.3 Implementation Example of CAD/CAM System\n	2.3 Control Strategy of CAM Process\n	2.4 Summary\n	References\n3 Design and Test of Pulsed Power Supply\n	3.1 Introduction\n	3.2 Design and Test of Pulsed Power Supply with Multi-Functions\n		3.2.1 Logic Circuit Design for Generating High Frequency Pulses\n		3.2.2 High-Speed Isolated Driving Circuit of MOSFET Switch\n		3.2.3 Performance Test of Pulsed Power Supply\n		3.2.4 Detection Circuit of Discharge Gap State\n	3.3 Pulsed Power Supply with Ns-Pulsewidth Based on Triode Avalanche Principle\n		3.3.1 Basic Principle of Ns-Pulsewidth Pulsed Power Supply\n		3.3.2 Design and Performance Tests of Basic Circuit of Ns-Pulsewidth Pulsed Power Supply\n		3.3.3 Design and Performance Tests of Cascaded Circuit with Two Triodes for Improving Ns-Pulsewidth Pulsed Power Supply\n		3.3.4 Experimental Verification of Ns-Pulsewidth Pulsed Power Supply with Cascaded Circuit\n	3.4 Summary\n	References\n4 Servo Control of Micro Discharge Gap\n	4.1 Introduction\n	4.2 Servo Control Characteristics of Micro Discharge Gap\n		4.2.1 Experimental System and Method\n		4.2.2 Experimental Results and Analysis\n		4.2.3 Experimental Verification with High Response Frequency Spindle\n	4.3 Threshold Control and Optimization Method\n		4.3.1 Optimization Constraint of Servo Control Parameters\n		4.3.2 Matching Scanning Speed with Servo Speed of Tool Electrode\n		4.3.3 Experiments of Optimization Verification in SS-3D Micro EDM\n	4.4 Self-Adaptive Fuzzy Control Method with Formulary Rule\n		4.4.1 Control Strategy and Design of Self-Adaptive Fuzzy Controller with a Formulary Rule\n		4.4.2 Self-Adaptive Fast Convergence Algorithms\n		4.4.3 Experimental Verification of Self-Adaptive Fuzzy Control Method in SS-3D Micro EDM\n	4.5 Summary\n	References\n5 Precision Fabrication and Measurement of Micro Tool Electrode\n	5.1 Introduction\n	5.2 Mechanism of Wire Electro Discharge Grinding (WEDG)\n	5.3 Tangential-Feed WEDG Method and Hybrid Process\n		5.3.1 Principle and Analysis of TF-WEDG\n		5.3.2 Hybrid Machining Process of Micro Electrode\n		5.3.3 Experimental Results and Discussion\n	5.4 On-Machine Fabrication Process of Flat Micro Tool Electrode\n		5.4.1 Principle of On-Machine Fabrication for Flat Micro Tool Electrodes\n		5.4.2 Machining Experiments of Flat Electrodes and Array Micro Grooves\n	5.5 On-Machine Measurement Method of Intersecting Point Electric Contact\n	5.6 Summary\n	References\n6 Effect of Process Parameters\n	6.1 Introduction\n	6.2 Effect of Electric Parameters on Machining Performance\n		6.2.1 Effect of Peak Current and Pulse Duration\n		6.2.2 Effect of Machining Polarity\n	6.3 Effect of Scanning Paths on Machining Performance\n		6.3.1 Effect of Path Type\n		6.3.2 Effect of Path Span\n	6.4 Effect of Scanning Speed on Machining Performance\n	6.5 Machining a Typical 3D Micro Structure\n	6.6 Summary\n	References\n7 Vibration-Assisted SS-3D Micro EDM\n	7.1 Introduction\n	7.2 Method and Experimental System\n	7.3 Fundamental Machining Experiments\n	7.4 Establishment and Analysis of Machining Process Model\n	7.5 Machining Experiments for 3D Micro Cavities\n	7.6 Summary\n	References\n8 SS-3D Micro EDM Based on Macro/Micro-Dual-Feed Spindle\n	8.1 Introduction\n	8.2 Method and Experimental System\n	8.3 Control and Performance Test\n		8.3.1 Control of Macro/Micro Dual-Feed Spindle\n		8.3.2 Performance Test of Macro/Micro Dual-Feed Spindle\n	8.4 Application Experiments\n		8.4.1 Fundamental Machining Experiments\n		8.4.2 Machining Experiments of 3D Micro Microstructures\n	8.5 Summary\n	References\n9 Algorithms to Reduce Depth Errors\n	9.1 Introduction\n	9.2 Analysis of Machined-Depth Error and Surface Unevenness\n	9.3 Illumination of Proposed Algorithms\n		9.3.1 S-Curve Accelerating Algorithm (SCAA)\n		9.3.2 Layer Depth Constrained Algorithm (LDCA)\n	9.4 Implementation Process and Control Strategy of Algorithms\n	9.5 Experimental Verification of Algorithms\n		9.5.1 Basic Machining Experiments\n		9.5.2 Machining Experiments for Typical 3D Micro Cavities\n	9.6 Summary\n	References\n10 On-Machine Process of Rough-And-Finishing SS-3D Micro EDM\n	10.1 Introduction\n	10.2 Rough and Finishing Process of SS-3D Micro EDM\n	10.3 Strategy of 3D-Model Boundaries\n	10.4 Machining Experiments of 3D Micro Cavities\n		10.4.1 Experimental Method and System\n		10.4.2 Experimental Results\n	10.5 Summary\n	References\n11 Array SS-3D Micro EDM by Using Array Tool Electrodes\n	11.1 Introduction\n	11.2 Processing Method of Array SS-3D Micro EDM\n	11.3 Array SS-3D Micro EDM by Using Off-Line Fabricated Array Micro Tool Electrodes\n		11.3.1 Off-Line Preparation of Array Micro Tool Electrodes\n		11.3.2 Machining Experiments of Array Micro Cavities\n		11.3.3 Processing Analysis with Off-Line Fabricated Array Micro Electrodes\n	11.4 Array SS-3D Micro EDM by Using On-Machine Fabricated Array Micro Electrodes\n		11.4.1 Processing Method with On-Machine Fabrication of Array Tool Electrodes\n		11.4.2 On-Machine Fabrication of Array Tool Electrodes\n		11.4.3 Machining Experiments of Array Micro Cavities\n	11.5 Summary\n	References\n12 Hybrid Process of SS-3D Micro EDM and Scanning 3D Micro ECM\n	12.1 Introduction\n	12.2 Hybrid Process of SS-3D Micro EDM and Scanning 3D Micro ECM\n	12.3 Experimental System and Processing Strategy\n	12.4 Processing Experiments and Results Analysis\n		12.4.1 Hybrid Process Experiment for Square Cavity\n		12.4.2 Hybrid Process Experiment for Micro Spherical Crown Cavity\n		12.4.3 Analysis of Experimental Results for Hybrid Process\n	12.5 Summary\n	References\n13 SS-3D Micro EDM Applied in Machining Pierced Micro Structures of TiNi Alloy Tube\n	13.1 Introduction\n	13.2 Processing Methods and Experimental System of Four-Axis SS-3D Micro EDM\n		13.2.1 Processing Methods\n		13.2.2 Experimental System and Workpiece Clamping Adjustment\n	13.3 NC Codes Generation and Optimization of Servo Scanning Paths for Complex Pierced Micro Driving Structures\n		13.3.1 Machining Experiments of Typical Driving Structures\n	13.4 Summary\n	References\n14 Discussion and Prospect