Scanning Nonlinear Dielectric Microscopy: Investigation of Ferroelectric, Dielectric, and Semiconductor Materials and Devices

Cover
Scanning Nonlinear Dielectric Microscopy: Investigation of Ferroelectric,
Dielectric, and Semiconductor
Materials and Devices
Copyright
Contents
Preface
1 Principles of scanning nonlinear dielectric microscopy for measuring ferroelectric and dielectric materials
	1.1 Basic theory
		1.1.1 Macroscopic phenomenological definition of linear and nonlinear dielectric constants
		1.1.2 Capacitance variation with alternating electric field
	1.2 System setup of scanning nonlinear dielectric microscopy
	1.3 Theory for nonlinear dielectric imaging
		1.3.1 General theorem for capacitance variation under applied electric field
		1.3.2 Theoretical calculation for scanning nonlinear dielectric microscopy image
	1.4 Higher-order scanning nonlinear dielectric microscopy
		1.4.1 Theory
		1.4.2 Theoretical one-dimensional image and depth sensitivity of higher-order scanning nonlinear dielectric microscopy
	References
2 Ferroelectric polarization measurement
	2.1 Analysis of distributions of ferroelectric domains on a microscopic scale using scanning nonlinear dielectric microscopy
	2.2 Higher-order nonlinear dielectric analyses
	References
3 Three-dimensional polarization measurement
	3.1 Basics of three-dimensional polarization distribution assessment
	3.2 Principles of three-dimensional polarization assessment using scanning nonlinear dielectric microscopy
	3.3 Lateral assessment by Kelvin force microscopy with electric field correction
	3.4 Lateral nanoscale assessment with electric field correction
	References
4 Ultrahigh-density ferroelectric data storage using scanning nonlinear dielectric microscopy
	4.1 Ferroelectric probe memory based on scanning nonlinear dielectric microscopy with a linear scanning stage
		4.1.1 Scanning nonlinear dielectric microscopy with a linear scanning stage for ultrahigh-density ferroelectric data storage
		4.1.2 Analysis of nanodomain dots in congruent single-crystal LiTaO3
		4.1.3 Manipulating nanodomains using scanning nonlinear dielectric microscopy with a linear scanning stage
	4.2 Hard-disk-drive-type scanning nonlinear dielectric microscopy ferroelectric probe memory
		4.2.1 Background on development of ultrahigh-density hard-disk-drive-type scanning nonlinear dielectric microscopy ferroele...
		4.2.2 An scanning nonlinear dielectric microscopy ferroelectric data storage system having an hard disk drive format
		4.2.3 Ferroelectric recording media for scanning nonlinear dielectric microscopy probe memory having an hard disk drive format
		4.2.4 Rapid R/W characteristics of an scanning nonlinear dielectric microscopy data storage system
		4.2.5 An hard disk drive scanning nonlinear dielectric microscopy data storage unit for high-density ferroelectric recording
		4.2.6 Assessment of nonlinear dielectric constants of Pb(Zr,Ti)O3 thin films with applications to high-speed ferroelectric ...
	References
5 Linear permittivity measurement by scanning nonlinear dielectric microscopy
	5.1 Basics of linear permittivity imaging using cantilever- and needle-type scanning nonlinear dielectric microscopy
	5.2 Quantitative linear permittivity imaging with needle-type scanning nonlinear dielectric microscopy
	5.3 Quantitative linear permittivity determination using cantilever-type scanning nonlinear dielectric microscopy
		5.3.1 ∂C/∂z-scanning nonlinear dielectric microscopy principles
		5.3.2 Nanoscale linear permittivity measurements using ∂C/∂z-scanning nonlinear dielectric microscopy
	References
6 Noncontact scanning nonlinear dielectric microscopy
	6.1 Basics of noncontact scanning nonlinear dielectric microscopy
	6.2 Assessments of atomic dipole moments using noncontact scanning nonlinear dielectric microscopy
		6.2.1 Noncontact scanning nonlinear dielectric microscopy analysis of Si(111)-(7×7) surface structure
		6.2.2 The analysis of electric dipoles on a Si(100)-(2×1) surface using noncontact scanning nonlinear dielectric microscopy
		6.2.3 Using noncontact scanning nonlinear dielectric microscopy to assess fullerene molecules on a reconstructed Si(111)-(7...
	References
7 Scanning nonlinear dielectric potentiometry for measurement of the potential induced by atomic dipole moments
	7.1 Principles of scanning nonlinear dielectric potentiometry
		7.1.1 The development of scanning nonlinear dielectric potentiometry
		7.1.2 Scanning nonlinear dielectric potentiometry principles, theory, and experimental setup
		7.1.3 Experimental demonstration of scanning nonlinear dielectric potentiometry
	7.2 Determining atomic dipole moments at interfaces between graphene and SiC substrates by scanning nonlinear dielectric po...
		7.2.1 Characterization of interfacial charge states of graphene on the Si-terminated face of a 4H-SiC substrate
		7.2.2 Analysis of graphene on the C-terminated face of 4H-SiC via noncontact-scanning nonlinear dielectric potentiometry
	References
8 Principles of scanning nonlinear dielectric microscopy for semiconductor measurement
	8.1 The basis for semiconductor analysis by scanning nonlinear dielectric microscopy
	8.2 Basic aspects of semiconductor analysis by scanning nonlinear dielectric microscopy
	8.3 High-sensitivity scanning nonlinear dielectric microscopy for dopant profiling
	8.4 Avoiding the contrast reversal issue
	References
9 Carrier distribution measurement in semiconductor materials and devices
	9.1 Assessments of the distributions of carriers in monocrystalline and amorphous silicon solar cells
	9.2 Assessments of polarization and carriers in GaN HEMTs
	9.3 Contrast generation during scanning nonlinear dielectric microscopy imaging of fixed charges at a metal oxide–nitride o...
	References
10 Super-higher-order scanning nonlinear dielectric microscopy
	10.1 Basics of super-higher-order scanning nonlinear dielectric microscopy
	10.2 Examining the depletion layer in a MOSFET
	10.3 Analysis of carrier types and the depletion layer in amorphous and monocrystalline Si solar cells by super-higher-orde...
	10.4 Using super-higher-order scanning nonlinear dielectric microscopy to assess carrier redistribution in operational SiC ...
	References
11 Local deep-level transient spectroscopy
	11.1 Local deep-level transient spectroscopy
		11.1.1 The development of deep-level transient spectroscopy and assessments of inhomogeneity at metal oxide–semiconductor i...
		11.1.2 Basic principles of local deep-level transient spectroscopy
	11.2 Applying local deep-level transient spectroscopy to trap assessment
		11.2.1 Sample preparation
		11.2.2 Acquiring capacitance–time curves
		11.2.3 Verification of interface trap analysis by local deep-level transient spectroscopy
		11.2.4 Quantitative Estimation of Dit from Local-DLTS Results
		11.2.5 Quantitative two-dimensional local deep-level transient spectroscopy images
	References
12 Time-resolved scanning nonlinear dielectric microscopy
	12.1 The basics of time-resolved scanning nonlinear dielectric microscopy
	12.2 High-resolution analysis of SiO2/4H-SiC interface subsurface defects using local deep-level transient spectroscopy bas...
	References
Index
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