Recent Advs. in Nanofab. Techniques and Applns.

00_preface_Recent Advances in Nanofabrication Techniques and Applications......Page 1
00x_part1......Page 13
01_Electron Beam Lithography for Fine Dot Arrays
with Nanometer-Sized Dot and Pitch......Page 15
02_Focused Ion Beam Lithography......Page 39
03_Atom Lithography: Fabricating Arrays of
Silicon Microstructures Using Self-Assembled
Monolayer Resist and Metastable Helium Beam......Page 63
04_Character Projection Lithography for
Application-Specific Integrated Circuits......Page 81
05_Transform-Based Lossless Image Compression
Algorithm for Electron Beam Direct Write
Lithography Systems......Page 107
05x_part2......Page 123
06_Ultrafast Fabrication of Metal Nanostructures
Using Pulsed Laser Melting......Page 125
07_Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale......Page 151
08_Repairing Nanoimprint Mold Defects by
Focused-Ion-Beam Etching and Deposition......Page 169
09_Improving the Light-Emitting Efficiency of GaN
LEDs Using Nanoimprint Lithography......Page 185
10_Fabrication of Circular Grating Distributed
Feedback Dye Laser by Nanoimprint
Lithography......Page 209
11_Application of Nanoimprint Lithography to
Distributed Feedback Laser Diodes......Page 223
12_Guided-Mode Resonance Filters
Fabricated with Soft Lithography......Page 237
12x_part3......Page 253
13_DUV Interferometry for Micro and
Nanopatterned Surfaces......Page 255
14_Ultrashort Pulsed Lasers – Efficient Tools for
Materials Micro-Processing......Page 273
15_Laser-Based Lithography for Polymeric
Nanocomposite Structures......Page 301
16_Fabrication of 3-D Structures Utilizing
Synchrotron Radiation Lithography......Page 327
17_Emerging Maskless Nanolithography Based
on Novel Diffraction Gratings......Page 347
17x_part4......Page 363
18_Laser-Plasma Extreme Ultraviolet Source
Incorporating a Cryogenic Xe Target......Page 365
19_Irradiation Effects on EUV Nanolithography
Collector Mirrors......Page 381
20_High-Index Immersion Lithography......Page 409
21_Double Patterning for Memory ICs......Page 429
22_Diffraction Based Overlay Metrology
for Double Patterning Technologies......Page 445
22x_part5......Page 467
23_Nanolithography Study Using Scanning
Probe Microscope......Page 469
24_Scanning Probe Lithography
on Organic Monolayers......Page 487
25_Controlled Fabrication of Noble Metal
Nanomaterials via Nanosphere
Lithography and Their Optical Properties......Page 517
26_A Feasible Routine for Large-Scale
Nanopatterning via Nanosphere Lithography......Page 545
27_Electrohydrodynamic Inkjet – Micro Pattern
Fabrication for Printed Electronics Applications......Page 559
28_Lithography-Free Nanostructure Fabrication
Techniques Utilizing Thin-Film Edges......Page 581
29_Extremely Wetting Pattern by Photocatalytic
Lithography and Its Application......Page 603