Recent Advs. in Nanofab. Techniques and Applns.

00_preface_Recent Advances in Nanofabrication Techniques and Applications......Page 1
00x_part1......Page 13
01_Electron Beam Lithography for Fine Dot Arrays\rwith Nanometer-Sized Dot and Pitch......Page 15
02_Focused Ion Beam Lithography......Page 39
03_Atom Lithography: Fabricating Arrays of\rSilicon Microstructures Using Self-Assembled\rMonolayer Resist and Metastable Helium Beam......Page 63
04_Character Projection Lithography for\rApplication-Specific Integrated Circuits......Page 81
05_Transform-Based Lossless Image Compression\rAlgorithm for Electron Beam Direct Write\rLithography Systems......Page 107
05x_part2......Page 123
06_Ultrafast Fabrication of Metal Nanostructures\rUsing Pulsed Laser Melting......Page 125
07_Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale......Page 151
08_Repairing Nanoimprint Mold Defects by\rFocused-Ion-Beam Etching and Deposition......Page 169
09_Improving the Light-Emitting Efficiency of GaN\rLEDs Using Nanoimprint Lithography......Page 185
10_Fabrication of Circular Grating Distributed\rFeedback Dye Laser by Nanoimprint\rLithography......Page 209
11_Application of Nanoimprint Lithography to\rDistributed Feedback Laser Diodes......Page 223
12_Guided-Mode Resonance Filters\rFabricated with Soft Lithography......Page 237
12x_part3......Page 253
13_DUV Interferometry for Micro and\rNanopatterned Surfaces......Page 255
14_Ultrashort Pulsed Lasers – Efficient Tools for\rMaterials Micro-Processing......Page 273
15_Laser-Based Lithography for Polymeric\rNanocomposite Structures......Page 301
16_Fabrication of 3-D Structures Utilizing\rSynchrotron Radiation Lithography......Page 327
17_Emerging Maskless Nanolithography Based\ron Novel Diffraction Gratings......Page 347
17x_part4......Page 363
18_Laser-Plasma Extreme Ultraviolet Source\rIncorporating a Cryogenic Xe Target......Page 365
19_Irradiation Effects on EUV Nanolithography\rCollector Mirrors......Page 381
20_High-Index Immersion Lithography......Page 409
21_Double Patterning for Memory ICs......Page 429
22_Diffraction Based Overlay Metrology\rfor Double Patterning Technologies......Page 445
22x_part5......Page 467
23_Nanolithography Study Using Scanning\rProbe Microscope......Page 469
24_Scanning Probe Lithography\ron Organic Monolayers......Page 487
25_Controlled Fabrication of Noble Metal\rNanomaterials via Nanosphere\rLithography and Their Optical Properties......Page 517
26_A Feasible Routine for Large-Scale\rNanopatterning via Nanosphere Lithography......Page 545
27_Electrohydrodynamic Inkjet – Micro Pattern\rFabrication for Printed Electronics Applications......Page 559
28_Lithography-Free Nanostructure Fabrication\rTechniques Utilizing Thin-Film Edges......Page 581
29_Extremely Wetting Pattern by Photocatalytic\rLithography and Its Application......Page 603