Plasma Science and Technology: Lectures in Physics, Chemistry, Biology, and Engineering

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Plasma Science and Technology: Lectures in Physics, Chemistry, Biology, and Engineering
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Dedication
Contents
Preface
Part I. Plasma Fundamentals: Kinetics, Thermodynamics, Fluid Mechanics, and Electrodynamics
	1. The Major Component of the Universe, the Cornerstone of Microelectronics, The High‐Tech Magic Wand of Technology
		1.1 The Forth State of Matter: Plasma in Nature, in Lab, in Technology
		1.2 Multiple Plasma Temperatures, Plasma Nonequilibrium, Thermal and Nonthermal Plasmas
		1.3 Plasma Sources: Nonthermal, Thermal, and Transitional “Warm” Discharges, Discharges in Gases and Liquids
		1.4 Plasma Processes: Major Plasma Components, High Selectivity and Controllability of Nonequilibrium Reactions, “Multidisciplinarity Without Borders”
		1.5 Plasma Technologies: The Cornerstone of Microelectronics, the Major Successes Stories
		1.6 Electric Energy Consumption as a Challenge of Plasma Technologies, Plasma is the Future Because the Future is Electric
		1.7 Plasma Today is a High‐Tech Magic Wand of Modern Technology
	2. Elementary Processes of Charged Particles in Plasma
		2.1 Elementary Charged Plasma Species and Their Transformation Pathways
		2.2 Fundamental Characteristics and Parameters of Elementary Processes
		2.3 Classification of Ionization Processes, Elastic Scattering and Energy Transfer in Coulomb Collisions
		2.4 Direct Ionization of Atoms and Molecules by Electron Impact: Thomson Formula, Franck–Condon Principle
		2.5 Stepwise Ionization by Electron Impact
		2.6 Ionization by High‐energy Electron Beams; Photoionization
		2.7 Ionization in Collisions of Heavy Particles: Adiabatic Principle, Massey Parameter, Penning Ionization
		2.8 Losses of Charged Particles: Mechanisms of Electron–Ion Recombination
		2.9 Electron Losses in Electronegative Gases, Electron Attachment Processes
		2.10 Electron Detachment from Negative Ions
		2.11 Losses of Charged Particles: Mechanisms of Ion–Ion Recombination
		2.12 Ion‐molecular Processes: Polarization Collisions, Langevin Capture
		2.13 Resonant and Nonresonant Ion‐atomic Charge Transfer Processes
		2.14 Ion‐molecular Reactions with Rearrangement of Chemical Bonds, Plasma Catalysis
		2.15 Problems and Concept Questions
			2.15.1 Maxwell–Boltzmann Distribution Function
			2.15.2 Positive and Negative Ions
			2.15.3 Direct Ionization by Electron Impact
			2.15.4 Stepwise Ionization
			2.15.5 Electron Beam Propagation in Gases
			2.15.6 Ionization in Ion‐Neutral Collisions, Massey Parameter
			2.15.7 Dissociative Electron–Ion Recombination
			2.15.8 Dissociative Attachment
			2.15.9 Detachment by Electron Impact
			2.15.10 Langevin Capture Cross Section
			2.15.11 Nonresonant Charge Exchange
	3. Elementary Processes of Excited Atoms and Molecules in Plasma
		3.1 Vibrational Excitation of Molecules by Electron Impact
		3.2 Rate Coefficients of Vibrational Excitation in Plasma, Fridman Approximation
		3.3 Rotational Excitation of Molecules by Electron Impact
		3.4 Electronic Excitation by Electron Impact: Metastable States, Dissociation of Molecules
		3.5 Distribution of Electrons Energy in Nonthermal Discharges Between Different Channels of Excitation and Ionization
			3.5.1 Elastic vs Inelastic Collisions
			3.5.2 Exclusive Contribution of Discharge Energy to Vibrational Excitation
			3.5.3 Effect of Superelastic Collisions on Contribution of Discharge Energy to Vibrational Excitation
			3.5.4 Contribution of Electron Attachment, Electronic Excitation, and Ionization Processes
		3.6 Vibrational‐to‐translational Energy Transfer Processes, VT‐relaxation
			3.6.1 Slow Adiabatic VT‐relaxation of Harmonic Oscillators
			3.6.2 VT‐relaxation Rate Coefficients for Harmonic Oscillators, Landau–Teller Formula
			3.6.3 VT‐relaxation of Anharmonic Oscillators
			3.6.4 Fast Nonadiabatic Mechanisms of VT‐relaxation
		3.7 Vibrational Energy Exchange Between Molecules, VV‐relaxation
			3.7.1 VV‐relaxation Close to Resonant
			3.7.2 VV‐relaxation of Anharmonic Oscillators
			3.7.3 Intermolecular VV′‐relaxation
		3.8 VT‐ and VV‐relaxation of Highly Vibrationally Excited Polyatomic Molecules
			3.8.1 Shchuryak Model of Transition to the Vibrational Quasi‐continuum
			3.8.2 VT‐relaxation of Polyatomic Molecules in Vibrational Quasi‐continuum
			3.8.3 VV‐exchange of Polyatomic Molecules in Vibrational Quasi‐continuum
		3.9 Rotational Relaxation Processes, Parker Formula
		3.10 Relaxation of Electronically Excited Atoms and Molecules
			3.10.1 Relaxation of Electronic Excitation (ET Process)
			3.10.2 The Electronic Excitation Energy Transfer Processes
		3.11 Elementary Chemical Reactions of Excited Molecules
			3.11.1 Arrhenius Formula for Excited Molecules
			3.11.2 Activation Energy
		3.12 Efficiency of Vibrational Energy in Overcoming Activation Energy of Chemical Reactions, Fridman–Macheret α‐formula
			3.12.1 Efficiency α of Molecular Excitation Energy
			3.12.2 Fridman–Macheret α‐formula
			3.12.3 Reactions Proceeding Through Intermediate Complexes
			3.12.4 Chemical Reactions of Two Vibrationally Excited Molecules
		3.13 Nonequilibrium Dissociation of Molecules with Essential Contribution of Vibrational and Translational Energy
		3.14 Problems and Concept Questions
			3.14.1 Multi‐quantum Vibrational Excitation by Electron Impact
			3.14.2 Influence of Vibrational Temperature on Electronic Excitation Rate Coefficients
			3.14.3 Dissociation of Molecules Through Electronic Excitation by Direct Electron Impact
			3.14.4 Distribution of Electron Energy Between Different Channels of Excitation and Ionization
			3.14.5 VT‐relaxation Rate Coefficient as a Function of Vibrational Quantum Number
			3.14.6 The Resonant Multi‐quantum VV‐exchange
			3.14.7 VV‐relaxation of Polyatomic Molecules
			3.14.8 Transition to the Vibrational Quasi‐continuum
			3.14.9 Rotational RT‐relaxation
			3.14.10 LeRoy Formula and α‐model
			3.14.11 Contribution of Translational Energy in Dissociation of Molecules Under Nonequilibrium Conditions
	4. Physical Kinetics and Transfer Processes of Charged Particles in Plasma
		4.1 Boltzmann Kinetic Equation for Distribution Functions of Charged Particles: Vlasov Equation, Collisional Integral, Quasi‐equilibrium Maxwellian EEDF
		4.2 Microscopic Consequences of the Boltzmann Kinetic Equation: Continuity, Momentum, and Energy Conservation Equations
			4.2.1 The Continuity Equation
			4.2.2 The Momentum Conservation Equation
			4.2.3 The Energy Conservation Equation
		4.3 The Fokker–Planck Kinetic Equation for the Electron Energy Distribution Functions (EEDF)
		4.4 Maxwellian, Druyvesteyn, and Margenau Electron Energy Distribution Functions
			4.4.1 Maxwellian Distribution
			4.4.2 Druyvesteyn Distribution
			4.4.3 Margenau Distribution
		4.5 Effect of Electron–molecular and Electron–electron Collisions on EEDF
		4.6 Relations Between Electron Temperature Te and the Reduced Electric Field E/n0
		4.7 Plasma Electron Conductivity: Isotropic and Anisotropic Parts of EEDF
		4.8 Joule Heating and Electron Mobility, Similarity Parameters in Nonthermal Discharges
		4.9 Plasma Conductivity in Crossed Electric and Magnetic Fields
		4.10 Electric Conductivity of the Strongly Ionized Plasma
		4.11 Ion Energy and Ion Drift in Electric Field
		4.12 Free Diffusion of Electrons and Ions and Continuity Equation for Charged Particles; Fick's Law and Einstein Relation Between Diffusion, Mobility, and Mean Energy
		4.13 Ambipolar Diffusion, Debye Radius, and Definition of Plasma
		4.14 Problems and Concept Questions
			4.14.1 The Fokker–Planck Kinetic Equation
			4.14.2 The Druyvesteyn Electron Energy Distribution Function
			4.14.3 The Margenau EEDF
			4.14.4 Effect of Vibrational Temperature on EEDF
			4.14.5 Electron–Electron Collisions and EEDF Maxwellization
			4.14.6 Similarity Parameters
			4.14.7 Electron Drift in the Crossed Electric and Magnetic Fields
			4.14.8 Plasma Rotation in the Crossed Electric and Magnetic Fields, Plasma Centrifuge
			4.14.9 Ambipolar Diffusion
			4.14.10 Debye Radius and Ambipolar Diffusion
	5. Physical and Chemical Kinetics of Excited Atoms and Molecules in Plasma
		5.1 Excitation Energy Distribution in Nonequilibrium Plasma: Vibrational Kinetics, Fokker–Planck Kinetic Equation for Vibrational Distribution Functions
		5.2 VT‐ and VV‐fluxes of Excited Molecules in Energy Space
			5.2.1 Energy‐space‐diffusion Related to VT‐relaxation
			5.2.2 Energy‐space‐diffusion Related to VV‐exchange
			5.2.3 The Linear VV‐flux Component
			5.2.4 The Nonlinear Flux Component
		5.3 Nonequilibrium Vibrational Distribution Functions Dominated by VV‐exchange, the Treanor Distribution
		5.4 Vibrational Distributions at the Strong Excitation Regime Dominated by Nonlinear Resonant VV‐exchange, the Hyperbolic Plateau Distribution
		5.5 Steady‐state Vibrational Distributions Controlled by Linear VV‐ and VT‐relaxation Processes in Weak Excitation Regime, the Gordiets Distribution
		5.6 Direct Effect of Vibrational Excitation by Electron Impact on the Nonequilibrium Vibrational Distribution Functions
		5.7 Nonequilibrium Vibrational Distributions of Polyatomic Molecules
		5.8 Macro‐kinetics of Chemical Reactions of Vibrationally Excited Molecules
		5.9 Macro‐kinetics of Vibrational Energy Losses Due to VT‐ and VV‐relaxation
		5.10 Vibrational Kinetics in Gas Mixtures, Treanor Isotopic Effect
		5.11 Physical Kinetics of Population of Electronically Excited States in Plasma
		5.12 Physical Kinetics of the Rotationally Excited Molecules, Canonical Invariance
		5.13 Nonequilibrium Translational Energy Distribution Functions, Effect of “Hot Atoms”
			5.13.1 Effect of “Hot Atoms” in Fast VT‐relaxation Processes
			5.13.2 Diagnostics of Nonequilibrium Molecular Gases Based on the Effect of “Hot Atoms” in Fast VT‐relaxation
			5.13.3 Generation of “Hot Atoms” in Fast Chemical Reactions
		5.14 Problems and Concept Questions
			5.14.1 Diffusion of Molecules Along the Vibrational Energy Spectrum
			5.14.2 Flux of Molecules and Flux of Quanta Along the Vibrational Energy Spectrum
			5.14.3 Hyperbolic Plateau Distribution Function
			5.14.4 eV‐flux Along the Vibrational Energy Spectrum
			5.14.5 Treanor Effect for Polyatomic Molecules
			5.14.6 Treanor to Boltzmann Transition in Vibrational Distributions of Polyatomic Molecules
			5.14.7 VV‐ and VT‐losses of Vibrational Energy of Highly Excited Molecules
			5.14.8 Treanor Formula for Isotopic Mixtures
			5.14.9 Coefficient of Selectivity for Separation of Heavy Isotopes
			5.14.10 “Hot Atoms” Generated in Fast VT‐relaxation
	6. Plasma Statistics and Thermodynamics, Heat and Radiation Transfer Processes
		6.1 Complete (CTE) and Local (LTE) Thermodynamic Equilibrium in Plasma, Boltzmann Quasi‐equilibrium Statistical Distribution
		6.2 Saha Ionization Equilibrium, Planck Formula, Stefan–Boltzmann Law, and Other Thermal‐plasma‐related Statistical Distributions
			6.2.1 Saha Equation for Ionization Equilibrium in Thermal Plasma
			6.2.2 Statistical Relations for Radiation: Planck Formula, Stefan–Boltzmann Law
			6.2.3 Statistical Distribution of Diatomic Molecules Over Vibrational–Rotational States
			6.2.4 Dissociation Equilibrium in Molecular Gases
		6.3 Thermodynamic Functions in Quasi‐equilibrium Thermal Plasma: Partition Functions, Internal Energy, Helmholtz Free Energy, Gibbs Energy, Debye Corrections
		6.4 Nonequilibrium Statistics and Thermodynamics of Thermal and Nonthermal Plasma Systems
			6.4.1 Two‐Temperature Statistics and Thermodynamics
			6.4.2 Strongly Nonequilibrium Thermodynamics of Plasma Gasification; Single Excited State Approach
			6.4.3 Nonequilibrium Two‐Temperature Statistics of Vibrationally Excited Molecules, the Treanor Distribution
		6.5 Thermal Conductivity in Quasi‐equilibrium Plasma, Effect of Dissociation and Ionization on Plasma Heat Transfer
		6.6 Nonequilibrium Effects in Thermal Conductivity
			6.6.1 Fast Transfer of Vibrational Energy in Nonequilibrium Plasma (Tv ≫ T0): The Treanor Effect in Transfer Processes
			6.6.2 Effect of Nonresonant VV‐Exchange Close to the Vibrational‐Translational (VT) Equilibrium
			6.6.3 Nonequilibrium Effects Related to Recombination and Specific Heat
		6.7 Emission and Absorption of Continuous Spectrum Radiation in Plasma, Bremsstrahlung, and Radiative Electron–Ion Recombination Processes
		6.8 Absorption of Continuous Spectrum Radiation in Plasma: the Kramers and Unsold‐Kramers Formulas
		6.9 Radiation Transfer in Plasma: Optically Thin and Optically Thick Systems, Plasma as a Gray Body
		6.10 Spectral Line Radiation in Plasma: Intensity, Natural Width, and Profile of Spectral Lines
		6.11 The Doppler, Pressure, and Stark Broadening of Spectral Lines
			6.11.1 Doppler Broadening
			6.11.2 Pressure Broadening
			6.11.3 Stark Broadening
			6.11.4 Convolution of Lorentzian and Gaussian Profiles, the Voigt Profile of Spectral Lines
		6.12 Emission and Absorption of Radiation in Spectral Lines
			6.12.1 Spectral Emissivity of a Line
			6.12.2 Selective Absorption of Radiation in Spectral Lines
			6.12.3 The Oscillator Power
		6.13 Radiation Transfer in Spectral Lines
		6.14 Inverse Population of Excited States in Nonequilibrium Plasmas and Principle of Laser Generation
		6.15 Problems and Concept Questions
			6.15.1 Average Vibrational Energy
			6.15.2 Ionization Equilibrium, the Saha Equation
			6.15.3 The Treanor Effect in Vibrational Energy Transfer
			6.15.4 Vibrational‐translational VT Nonequilibrium Caused by the Specific Heat Effect
			6.15.5 Total Plasma Emission in Continuous Spectrum
			6.15.6 Natural Profile of Spectral Lines
			6.15.7 Doppler Broadening of Spectral Lines
			6.15.8 Pressure Broadening of Spectral Lines
			6.15.9 Absorption of Radiation in a Spectral Line by One Classical Oscillator
			6.15.10 Inverse Population of Excited States and the Laser Amplification Coefficient
	7. Plasma Electrostatics and Electrodynamics, Waves in Plasma
		7.1 Ideal and Nonideal Plasmas, Plasma Polarization and Debye Shielding of Electric Field
		7.2 Quasi‐neutral Plasma vs Sheath, Physics of DC Sheaths
		7.3 Plasma Sheath Models: High Voltage Sheaths, Matrix, and Child Law Sheaths
		7.4 Electrostatic Plasma Oscillations, Langmuir Frequency
		7.5 Plasma Skin Effect, Penetration of Slow‐changing Fields into Plasma
		7.6 Electrostatic Plasma Waves and Their Collisional Damping
		7.7 Ionic Sound in Plasma
		7.8 Magnetohydrodynamic Waves: Alfven Velocity, Alfven Wave, Magnetic Sound
		7.9 Collisionless Interaction of Electrostatic Plasma Waves with Electrons, the Landau Damping, the Beam, and Buneman Kinetic Instabilities
		7.10 Dielectric Permittivity and Conductivity of Plasma in High‐frequency Electric Fields
		7.11 Propagation, Absorption, and Total Reflection of Electromagnetic Waves in Plasma: Bouguer Law and Critical Electron Density
		7.12 Nonlinear Waves in Plasma: Modulation Instability, Lighthill Criterion, and Korteweg–de Vries Equation
		7.13 Langmuir Solitons in Plasma
		7.14 Nonlinear Ionic Sound, Evolution of Strongly Nonlinear Oscillations
		7.15 Problems and Concept Questions
			7.15.1 Ideal and Nonideal Plasmas
			7.15.2 Charged Particles Inside Debye Sphere
			7.15.3 Floating Potential
			7.15.4 Matrix and Child Law Sheaths
			7.15.5 Electrostatic Plasma Waves
			7.15.6 Ionic Sound
			7.15.7 Landau Damping
			7.15.8 High‐frequency Dielectric Permittivity of Plasma
			7.15.9 Solitons as Solutions of the Korteweg–de Vries Equation
			7.15.10 Nonlinear Ionic Sound
			7.15.11 Velocity of the Nonlinear Ionic‐sound Waves
			7.15.12 The Ionic Sound Solitons
	8. Plasma Magneto‐hydrodynamics, Fluid Mechanics and Acoustics
		8.1 Plasma Magneto‐hydrodynamics (MHD): Magnetic Field “Diffusion” in Plasma, Frozenness of Magnetic Field in Plasma
		8.2 Plasma Equilibrium in Magnetic Field: Magnetic Pressure and Pinch Effect
		8.3 Two‐fluid Plasma MHD and the Generalized Ohm's Law
		8.4 The Generalized Ohm's Law and Plasma Diffusion Across Magnetic Field
		8.5 Magnetic Reynolds Number and Alfven Velocity: Conditions for Magneto‐hydrodynamic (MHD) Behavior of Plasma
		8.6 Electromagnetic Wave Propagation in Magnetized Plasma
		8.7 Ordinary and Extra‐ordinary Polarized Electromagnetic Waves in Magnetized Plasma, Effect of Ionic Motion
		8.8 Dispersion and Amplification of Acoustic Waves in Nonequilibrium Plasma
			8.8.1 Acoustic Waves in Molecular Gas at Equilibrium (Tv = T0)
			8.8.2 Acoustic Waves in Nonequilibrium (Tv > T0) Plasma, High‐frequency Limit
			8.8.3 Acoustic Wave Dispersion in the Presence of Intensive Plasma‐chemical Reaction
		8.9 Evolution of Shock Waves in Plasma
		8.10 Nonthermal Plasma Fluid Mechanics in Fast Subsonic and Supersonic Flows
		8.11 Vibrational Relaxation in Fast Subsonic and Supersonic Flows of Nonthermal Reactive Plasmas
		8.12 Spatial Nonuniformity and Space Structure of Unstable Vibrational Relaxation in Chemically Active Plasma
		8.13 Elements of Plasma Aerodynamics: Plasma Interaction with Fast Flows and Shocks, Ionic Wind
		8.14 Problems and Concept Questions
			8.14.1 Magnetic Field Frozen in Plasma
			8.14.2 Magnetic Pressure and Plasma Equilibrium in Magnetic Field
			8.14.3 The Magnetic Reynolds Number
			8.14.4 Critical Heat Release in Supersonic Flows
			8.14.5 Electromagnetic Waves in Magnetized Plasma
			8.14.6 Profiling of Nonthermal Discharges in Supersonic Flow
			8.14.7 Dynamics of Vibrational Relaxation in Transonic Flows
			8.14.8 Space‐nonuniform Vibrational Relaxation
			8.14.9 Comparison of Linear and Nonlinear Approaches to Evolution of Perturbations
			8.14.10 Generation of Strong Shock Waves and Detonation Waves in Plasma
Part II. Plasma Physics and Engineering of Electric Discharges
	9. Electric Breakdown, Steady‐state Discharge Regimes, and Instabilities
		9.1 Electric Breakdown of Gases, the Townsend Mechanism
		9.2 The Paschen Curves: Critical Breakdown Conditions, Breakdown of Larger Gaps and Effect of Electronegative Gases
		9.3 Spark Breakdown Mechanism, Physics of Avalanches and Streamers
		9.4 Meek Criterion of the Avalanche‐to‐streamer Transition and Spark Breakdown, Streamer Propagation Models, Concept of Leaders in Very Long Gaps
		9.5 Steady‐state Regimes of Nonequilibrium Discharges Controlled by Volume Reactions of Charged Particles and Surface Recombination Processes
		9.6 Steady‐state Discharges Controlled by Volume Reactions of Charged Particles: Regimes Controlled by Electron–Ion Recombination, and by Electron Attachment
			9.6.1 Regime Controlled by Electron–Ion Recombination
			9.6.2 Discharge Regime Controlled by Electron Attachment
		9.7 Steady‐state Discharges Controlled by Diffusion of Charged Particles to the Walls with Following Surface Recombination: the Engel–Steenbeck Relation
		9.8 Propagation of Nonthermal Discharges, Ionization Waves
		9.9 Nonequilibrium Behavior of Electron Gas: Electron‐neutrals Temperature Difference, Deviations from the Saha Ionization Degree
		9.10 Instabilities of Nonthermal Plasmas: Striations and Contractions, Ionization‐overheating Thermal Instability in Monatomic Gases
		9.11 Ionization‐overheating Thermal Instability in Molecular Gases with Significant Vibrational Excitation, Effect of Plasma‐chemical Reactions
		9.12 Electron Attachment Instability and Other Ionization Instabilities of Nonthermal Plasma
			9.12.1 Attachment Instability
			9.12.2 Ionization Instability Controlled by Dissociation of Molecules
			9.12.3 The Stepwise Ionization Instability
			9.12.4 Electron Maxwellization Instability
			9.12.5 Instability in Fast Oscillating Fields
		9.13 Problems and Concept Questions
			9.13.1 Effect of Electron Attachment on Breakdown Conditions
			9.13.2 Energy Input and Temperature in Streamers
			9.13.3 Streamer Propagation Velocity
			9.13.4 Attachment‐controlled Discharge Regime
			9.13.5 The Engel–Steenbeck Model
			9.13.6 Ionization Wave Propagation
			9.13.7 Thermal Instability in Monatomic Gases
			9.13.8 Electron Attachment Instability
	10. Nonthermal Plasma Sources: Glow Discharges
		10.1 Major Types of Electric Discharges, Glow Discharge as a Conventional Nonthermal Plasma Source
		10.2 Plasma Parameters and Glow Pattern along the Glow Discharge
		10.3 Current–Voltage Characteristics of DC‐discharges: Transition from Townsend Dark Discharge to Glow Discharge
		10.4 Cathode Layer of Glow Discharge, Engel–Steenbeck Model and Current–Voltage Characteristics
		10.5 The Normal Regime of Glow Discharges, Steenbeck Minimum Power Principle for Normal Cathode Current Density
		10.6 Abnormal, Subnormal, and Obstructed Glow Discharge Regimes; the Hollow Cathode Discharge
		10.7 About Anode Layer of Glow Discharges
		10.8 Positive Column of Glow Discharges: Current–Voltage Characteristics and Heat Balance
		10.9 Glow Discharge Instabilities: Contraction of the Positive Column
		10.10 Glow Discharge Instabilities: The Striations
		10.11 About Energy Efficiency of Plasma‐chemical Processes in Glow Discharges, Approaches to Glow Discharge Stabilization, Atmospheric Pressure Glow Discharges
		10.12 Glow Discharges in Strong Magnetic Field: Penning Discharge, Plasma Centrifuge
		10.13 Magnetron Glow Discharges, Magnetic Mirror Effect
		10.14 Problems and Concept Questions
			10.14.1 Space Charges in Cathode and Anode Layers
			10.14.2 The Seeliger's Rule for Spectral Line Emission Sequence in Negative and Cathode Glows
			10.14.3 Glow Discharge in Tubes of Complicated Shapes
			10.14.4 Normal Cathode Potential Drop, Normal Current Density, and Normal Thickness of Cathode Layer
			10.14.5 Glow Discharge with Hollow Cathode
			10.14.6 Contraction of Glow Discharge in Fast Gas Flow
			10.14.7 The Penning Discharge
			10.14.8 The Alfven Velocity in Plasma Centrifuge
			10.14.9 The Escape Cone Angle in Magnetic Mirror
			10.14.10 Atmospheric Pressure Glow Discharges
	11. Thermal Plasma Sources: Arc Discharges
		11.1 Arc Discharge as a Conventional Thermal Plasma Source: Types of Arcs, Plasma Parameters
			11.1.1 Hot Thermionic Cathode Arcs
			11.1.2 Arcs with Hot Cathode Spots
			11.1.3 Vacuum Arcs
			11.1.4 High Pressure Arc Discharges
			11.1.5 Low Pressure Arc Discharges
		11.2 Electron Emission from Hot Cathode: Thermionic Emission, Sommerfeld formula, Schottky effect
		11.3 Electron Emission from Cathode: Field, Thermionic Field, and Secondary Electron Emission Processes
		11.4 Cathode Layer of Arc Discharges: Physics and General Features
		11.5 Energy Balance of Cathode and Anode Layers: Electrode Erosion, Cathode Spots
		11.6 Positive Column of Arc Discharges: Elenbaas–Heller Equation, Steenbeck and Raizer “Channel” Models
		11.7 Plasma Temperature, Specific Power, Electric Field, and Radius of the Arc Positive Column
		11.8 Arc Dynamics: Bennet Pinch, Electrode Jets
		11.9 Engineering Configurations of Arc Discharges
		11.10 Gliding Arcs: Physics of the Flat Discharge Configuration
		11.11 Nonequilibrium Gliding Arcs, Fast Equilibrium‐to‐Nonequilibrium Transition
		11.12 Gliding Arc Stabilized in Reverse Vortex (Tornado) Flow, and Other Special Gliding Arc Configurations
		11.13 Problems and Concept Questions
			11.13.1 The Sommerfeld Formula for Thermionic Emission
			11.13.2 Secondary Electron Emission
			11.13.3 Erosion of Hot Cathodes
			11.13.4 Radiation of the Arc Positive Column
			11.13.5 Arc Temperature in the Frameworks of the Channel Model
			11.13.6 Difference between Electron and Gas Temperatures in Arc Discharges
			11.13.7 Electrode Jet Velocity
			11.13.8 Stabilization of Linear Arcs Near Axis of the Discharge Tube
			11.13.9 Critical Length of Gliding Arc Discharge
			11.13.10 Quasi‐Unstable Phase of Gliding Arc Discharge
	12. Radio‐frequency, Microwave, and Optical Discharges
		12.1 Thermal Plasma Generation in High‐frequency Electromagnetic Fields
		12.2 Thermal Plasma of Inductively Coupled RF Discharges, Metallic Cylinder Model
		12.3 Plasma Temperature and Power of the Thermal ICP Discharges
		12.4 Specific Configurations of Atmospheric Pressure RF ICP and RF CCP Discharges
		12.5 Microwave Sources of Thermal Plasma
		12.6 Thermal Plasma Generation in Continuous Optical Discharges
		12.7 Radio‐frequency (RF) Sources of Nonequilibrium Plasma, Capacitively Coupled Plasma (CCP), and Inductively Coupled Plasma (ICP) Discharges
		12.8 Fundamentals of Nonthermal Capacitively Coupled Plasma (CCP) Discharges
		12.9 Nonthermal RF Capacitively Coupled Plasma (CCP) Discharges of Moderate Pressure, α‐ and γ discharge Regimes
		12.10 Low‐pressure Capacitively Coupled Plasma (CCP) RF discharges
		12.11 Asymmetric and Magnetron RF CCP Discharges at Low Pressures
		12.12 Nonthermal Radio‐frequency (RF) Inductively Coupled Plasma (ICP) Discharges
		12.13 Planar Coil and Helical Resonator Configurations of the Low‐pressure RF ICP discharges
		12.14 Nonthermal Wave‐heated Plasma Sources: Electron–cyclotron Resonance (ECR) Microwave Discharges
		12.15 Helicon and Surface‐wave High‐density Plasma (HDP) Discharges
		12.16 Problems and Concept Questions
			12.16.1 Microwave Discharge in H01‐mode of Rectangular Waveguide
			12.16.2 Equivalent Circuit of RF CCP Discharge
			12.16.3 Critical Current of the α − γ Transition in moderate pressure CCP
			12.16.4 Stochastic Heating Effect
			12.16.5 Current Density Distribution in ICP Discharges
			12.16.6 Equivalent Circuit of ICP Discharges
			12.16.7 Plasma Density in ICP Discharges
			12.16.8 ECR‐microwave Absorption Zone
	13. Atmospheric Pressure Cold Plasma Discharges: Corona, Dielectric Barrier Discharge (DBD), Atmospheric Pressure Glow (APG), Plasma Jet
		13.1 Physics of Continuous Corona Discharges
		13.2 Continuous Corona: Current–Voltage Characteristics and Discharge Power
		13.3 Pulsed Corona Discharges
		13.4 Dielectric‐barrier Discharges (DBD): General Features and Configurations, Filamentary DBD Mode
		13.5 Nanosecond‐pulsed Dielectric‐barrier Discharges (DBD), Uniform DBD Mode
		13.6 Time‐evolution of the Short‐pulsed DBD: Pulse Energy and Average Discharge Power, the “Maximum Power Principle”
		13.7 Asymmetric, Packed‐bed, Ferroelectric, and Other Dielectric‐surface Discharges
		13.8 Atmospheric Pressure Glow Discharges (APG)
		13.9 Noble‐gas‐based RF Atmospheric Pressure Plasma Jets (APPJ)
		13.10 Atmospheric Pressure DBD‐based Helium Plasma Jets, Plasma Bullets
		13.11 Problems and Concept Questions
			13.11.1 Active Corona Volume
			13.11.2 Power of Continuous Corona Discharges
			13.11.3 Voltage Rise Rate in Pulse Corona Discharges
			13.11.4 Maximum vs Minimum Power Principles in Theory of Plasma Discharges
			13.11.5 Power Control of Nanosecond‐pulsed Dielectric Barrier Discharges
			13.11.6 Evolution of the DBD Surface “Pancakes” vs DBD Streamers
			13.11.7 Atmospheric Pressure RF vs DBD Plasma Jets
			13.11.8 Helium Plasma Jets
			13.11.9 Power of the DBD Plasma Jets
	14. Nonequilibrium Transitional “Warm” Discharges: Nonthermal Gliding Arc, Moderate‐pressure Microwave Discharge, Different Types of Sparks and Microdischarges
		14.1 Nonthermal Gliding Arc as an Example of the Nonequilibrium Atmospheric Pressure Transitional “Warm” Plasma Sources
		14.2 Nonequilibrium Transitional “Warm” Microwave Discharges of Moderate Pressures
		14.3 Vibrational–Translation Nonequilibrium ( Tv > T0 ) in Transitional “Warm” Microwave Discharges of Moderate Pressures
		14.4 Spark Discharges
		14.5 Spark Discharge in Nature: Lightning
		14.6 Pin‐to‐hole Discharge (PHD)
		14.7 Microdischarges: Atmospheric‐pressure Micro‐glow Discharge, Micro‐hollow‐cathode Discharge
		14.8 Other DC, kHz‐frequency, RF, Microwave Microdischarges, and Their Arrays
		14.9 Problems and Concept Questions
			14.9.1 Transitional “Warm” Discharges
			14.9.2 Combined Regime of Moderate Pressure Microwave Discharges
			14.9.3 Pressure Dependence of Energy Efficiency of Microwave Discharges
			14.9.4 Power and Flow Rate Scaling of Moderate Pressure Microwave Discharges
			14.9.5 Velocity of the Back Ionization Wave
			14.9.6 Negative Ions Attachment to Water Droplets, Charge Separation in Thundercloud
			14.9.7 Propagation of Ball Lightning
			14.9.8 Pin‐to‐hole (PHD) Plasma Source
			14.9.9 Atmospheric‐pressure Micro‐glow Discharge
	15. Ionization and Discharges in Aerosols; Dusty Plasma Physics; Electron Beams and Plasma Radiolysis
		15.1 Photoionization of Aerosols in Monochromatic and Continuous Spectrum Radiation
		15.2 Thermal Ionization of Aerosols: Einbinder Formula, Langmuir Relation
		15.3 Electric Breakdown of Aerosols
			15.3.1 Pulse Breakdown of Aerosols
			15.3.2 Breakdown of Aerosols in High‐frequency Electromagnetic Fields
			15.3.3 Townsend Breakdown of Aerosols
			15.3.4 Effect of Macro‐particles on Vacuum Breakdown
		15.4 Steady‐state DC Discharges in Heterogeneous Medium
		15.5 Dusty Plasma Structures: Coulomb Crystals and Phase Transitions
		15.6 Oscillations and Waves in Dusty Plasmas, Ionic Sound, and Dust Sound
		15.7 Electron Beam Plasmas: Generation, Propagation, Properties
			15.7.1 Powerful Electron Beam in Low‐pressure Gas
			15.7.2 Low‐current Electron Beam in Rarefied Gas
			15.7.3 Moderate‐current Electron Beam in a Moderate Pressure Gas
			15.7.4 High Power Electron Beam in a High‐pressure Gas
		15.8 Kinetics of Electron Beam Degradation Processes, Degradation Spectrum
		15.9 Plasma‐beam Discharge, Plasma‐beam Centrifuge
		15.10 Non‐self‐sustained High‐pressure Cold Discharges Supported by High‐energy Electron Beams
		15.11 Plasma in Tracks of Nuclear Fission Fragments, Plasma Radiolysis
		15.12 G‐Factors, Plasma‐radiolytic Effects in Water Vapor and Carbon Dioxide
		15.13 Dusty Plasma Generation by Relativistic Electrons, Radioactive Dusty Plasma
		15.14 Problems and Concept Questions
			15.14.1 Electron Density Due to Monochromatic Photoionization of Aerosols
			15.14.2 Thermal Ionization of Aerosols
			15.14.3 “Melting” of Coulomb Crystals
			15.14.4 Ionization Energy Cost Due to Irradiation by High‐energy Electrons
			15.14.5 Degradation Spectrum vs EEDF
			15.14.6 Energy Cost of Ionization and Excitation by Electron Beams
			15.14.7 Initial Tracks of Nuclear Fission Fragments
			15.14.8 Plasma Radiolysis of Carbon Dioxide
	16. Electric Discharges in Water and Other Liquids
		16.1 Plasma Generation in Liquid Phase
		16.2 Major Conventional Breakdown Mechanisms and Discharge Characteristics in Water
		16.3 Nonequilibrium Nanosecond‐pulsed Plasma in Water Without Bubbles
		16.4 Nonequilibrium Nanosecond‐pulsed Plasma Without Bubbles in Different Liquids: Comparison of Discharges in Water and PDMS
		16.5 Characterization of the Nano‐second Pulsed Discharges in Liquid: Shadow Imaging, Optical Emission Spectroscopy
		16.6 Streamer Formation in Liquids and Nonequilibrium Nanosecond‐pulsed Liquid Plasma Without Bubbles
		16.7 Cryogenic Liquid Plasma, Nanosecond‐pulsed Discharge in Liquid Nitrogen
		16.8 Plasmas in Supercritical Fluids, Electric Breakdown of Supercritical CO2
		16.9 Problems and Concept Questions
			16.9.1 Effect of Electric Conductivity on Breakdown of Water
			16.9.2 Increment of the Thermal Breakdown Instability for Electric Breakdown of Water
			16.9.3 Breakdown Voltage of Water
			16.9.4 Generation of Nano‐plasma by Nano‐corona
			16.9.5 Comparison of Negative and Positive Pulsed Corona Discharges in Liquids Without Bubbles
			16.9.6 The Dark Phase Effect During Evolution of the Nano‐second Pulsed Discharge in Liquids
			16.9.7 Modified Meek's Criterion for Breakdown of Liquids
			16.9.8 Nanosecond‐pulsed Discharge in Liquid N2, Synthesis of Polymeric Nitrogen
			16.9.9 Breakdown of Supercritical Fluids
Part III. Plasma in Inorganic Material Treatment, Energy Systems, and Environmental Control
	17. Energy Balance and Energy Efficiency of Plasma‐chemical Processes, Plasma Dissociation of CO2
		17.1 Energy Efficiency as a Key Requirement of Large‐scale Plasma Processes: Comparison of Quasi‐equilibrium and Nonequilibrium Plasmas
		17.2 Energy Efficiency of Chemical Processes Stimulated in Plasma by Vibrational Excitation of Molecules, Electronic Excitation, and Dissociative Attachment
		17.3 Energy Balance and Energy Efficiency of Plasma Processes Stimulated by Vibrational Excitation; Excitation, Relaxation, and Chemical Components of Total Energy Efficiency
		17.4 Energy Efficiency of Quasi‐equilibrium Chemical Processes in Thermal Plasmas: Absolute, Ideal, and Surer‐ideal Quenching of Products
		17.5 Mass and Energy Transfer in Multi‐component Thermal Plasmas, and its Effect on Energy Efficiency of Quasi‐equilibrium Plasma‐chemical Processes
		17.6 CO2 Dissociation in Plasma: Crucial Fundamental and Applied Aspects of the Process in Thermal, Nonthermal, and Transitional Discharges
		17.7 About Mechanisms of CO2 Dissociation in Plasma
		17.8 Physical Kinetics of CO2 Dissociation in Nonthermal Plasma Stimulated by Vibrational Excitation of the Molecules
		17.9 Vibrational Kinetics and Energy Balance in Nonequilibrium CO2 Plasma
		17.10 CO2 Dissociation in Supersonic Cold Plasma Flows
		17.11 Gas‐dynamic Stimulation of CO2 Dissociation in Supersonic Flow Without Plasma, “Plasma Chemistry Without Electricity”
		17.12 Complete Plasma Dissociation of CO2 to Carbon and Oxygen
		17.13 Problems and Concept Questions
			17.13.1 Energy Efficiency of Quasi‐equilibrium and Nonequilibrium Plasma Processes
			17.13.2 Plasma‐chemical Processes Stimulated by Vibrational Excitation
			17.13.3 Absolute and Ideal Quenching of Products in Thermal Plasma
			17.13.4 Super‐ideal Quenching due to Vibrational–Translational Nonequilibrium
			17.13.5 Super‐ideal Quenching Effects Related to Selectivity of Transfer Processes
			17.13.6 CO2 Dissociation Through Electronic Excitation of Molecules in Cold Plasma
			17.13.7 Transition of Highly Vibrationally Excited CO2 Molecules into Vibrational Quasi‐continuum
			17.13.8 One‐vibrational‐temperature Approximation of CO2 Dissociation Kinetics
			17.13.9 Plasma‐stimulated Disproportioning of CO, and Complete Dissociation of CO2 with Production of Elementary Carbon
	18. Synthesis of Nitrogen Oxides, Ozone, and Other Gas‐phase Plasma Synthetic and Decomposition Processes
		18.1 Plasma‐chemical Synthesis of Nitrogen Oxides from Air: Fundamental and Applied Aspects of the Process in Thermal and Nonthermal Discharges
		18.2 Mechanisms and Energy Efficiencies of NO Synthesis from Air in Nonthermal and Thermal Plasmas, the Zeldovich Mechanism
		18.3 Elementary Zeldovich Reaction of NO Synthesis Stimulated by Vibrational Excitation of Nitrogen Molecules
		18.4 Kinetics and Energy Balance of Plasma‐chemical NO Synthesis in O2–N2 Mixtures Stimulated by Vibrational Excitation
		18.5 Stability of Products of Plasma‐chemical NO Synthesis to Reverse Reactions, Effect of “Hot” Nitrogen Atoms and Surface Stabilization
		18.6 Plasma‐chemical Synthesis of Ozone: Fundamental and Applied Aspects of the Process
		18.7 Plasma‐chemical Ozone Generation in Oxygen
		18.8 Plasma‐chemical Ozone Generation in Air
		18.9 Stability of Plasma‐generated Ozone: Negative Effects of Temperature, Water Vapor, Hydrogen, Hydrocarbons, and Other Admixtures
		18.10 Major Specific Configurations of Plasma Ozone Generators
		18.11 Ozone Generation in Pulsed Corona Discharges, Energy Efficiency of the Process
		18.12 Plasma Synthesis of KrF2 and Other Fluorine‐based Compounds of Noble Gases
		18.13 Plasma F2 Dissociation and Synthesis of Aggressive Fluorine‐based Oxidizers
		18.14 Plasma‐chemical Synthesis of Hydrazine (N2H4) and Ammonia (NH3)
		18.15 Plasma‐chemical Synthesis of Polyphosphoric Nitrides (P6N6), Polymeric Nitrogen, Cyanides, and Some Other Inorganic Compounds
		18.16 Gas‐phase Plasma Decomposition of Inorganic Triatomic Molecules NH3, SO2, N2O
		18.17 Dissociation of Hydrogen Halides, Hydrogen, Nitrogen, and Other Diatomic Molecules in Thermal and Nonthermal Plasmas
		18.18 Problems and Concept Questions
			18.18.1 Rate Coefficient of Reaction O + N2 → NO + N Stimulated by Vibrational Excitation
			18.18.2 Energy Efficiency of NO Synthesis in Plasma
			18.18.3 Conversion Degree Limitations of NO Synthesis in Plasma
			18.18.4 Discharge Poisoning Effect During Ozone Synthesis
			18.18.5 Temperature Effect on Ozone Stability
			18.18.6 Negative Effect of Humidity on Ozone Generation in DBD
			18.18.7 Positive Effect of N2 and CO Admixtures to Oxygen on Plasma‐chemical Ozone Synthesis
			18.18.8 Plasma‐chemical KrF2 Synthesis with Product Stabilization in a Krypton Matrix
			18.18.9 Plasma Synthesis of NH3 and N2H4
	19. Plasma Metallurgy: Production and Processing of Metals and their Compounds
		19.1 Hydrogen‐based Reduction of Iron Ore in Thermal Plasma: Using Hydrogen and Hydrocarbons, Plasma‐chemical Steel Manufacturing
		19.2 Hydrogen‐based Reduction of Refractory Metal Oxides in Thermal Plasma, Plasma Metallurgy of Tungsten and Molybdenum
		19.3 Thermal Plasma Reduction of Oxides of Aluminum and Other Inorganic Elements
		19.4 Reduction of Metal Oxides Using Nonthermal Hydrogen Plasma, Nonequilibrium Plasma Effect of Surface Heating and Evaporation
		19.5 Thermal Plasma Production of Metals by Carbothermic Reduction of Their Oxides: Pure Metallic Uranium, Niobium, Iron, Refractory, and Rare Metals
		19.6 Direct Decomposition of Oxides to High‐purity Elements in Thermal Plasma: Production of Aluminum, Vanadium, Indium, Germanium, and Silicon
		19.7 Hydrogen‐plasma Reduction of Metals, Metalloids, and Other Elements from Their Halides: Production of Boron, Niobium, Uranium, etc.
		19.8 Direct Thermal Plasma Decomposition of Uranium Hexafluoride and Other Halides
		19.9 Direct Decomposition of Halides and Reduction of Metals in Nonthermal Plasma
		19.10 Synthesis of Nitrides and Carbides of Inorganic Materials in Thermal Plasmas
		19.11 Plasma‐chemical Production of Inorganic Oxides by Thermal Decomposition of Minerals, Aqueous Solutions, and Conversion Processes
		19.12 Production of Inorganic Oxides by Conversion of Relevant Halides with Water or Oxygen in Thermal Plasma
		19.13 Plasma‐chemical Synthesis of Hydrides, Borides, and Carbonyls of Inorganic Materials
		19.14 Plasma‐metallurgical High‐temperature Material Processing Technologies: Plasma Cutting, Plasma Welding, and Plasma Melting
		19.15 Plasma Powder Metallurgy: Plasma Spheroidization and Densification of Powders
		19.16 Problems and Concept Questions
			19.16.1 Plasma Reduction of Metal Oxides with Hydrogen
			19.16.2 Depth of Metal Oxide Reduction Layer in Nonthermal Hydrogen Plasma
			19.16.3 Nonequilibrium Surface Heating in Plasma Treatment of Thin Layers
			19.16.4 Application of Arcs vs. RF‐ICP Discharges in Plasma Metallurgy
			19.16.5 Halides in Plasma Metallurgy
			19.16.6 Quenching Rate for Direct Plasma Reduction of Metallic Uranium from UF6
			19.16.7 Decomposition of Titanium Tetrachloride TiCl4 to Metallic Titanium in Nonthermal Plasmas
			19.16.8 Production of Uranium Oxides by Decomposition of the Uranyl Nitrate [UO2(NO3)2] Aqueous Solutions
	20. Plasma Powders, Micro‐ and Nano‐technologies: Plasma Spraying, Deposition, Coating, Dusty Plasma‐chemistry
		20.1 Plasma Spraying of Powders as One of the Key Thermal Spray Technologies
		20.2 DC‐Arc Plasma Spray: Air Plasma Spray, VPS, LPPS, CAPS, SPS, UPS, and Other Specific Plasma Spray Approaches
		20.3 Radio Frequency (RF) Thermal Plasma Sprays
		20.4 Thermal Plasma Spraying of Monolithic Materials
		20.5 Thermal Plasma Spraying of Composite Materials
		20.6 Thermal Plasma Spraying of Functionally Gradient Materials (FGMs), Reactive Plasma Spray Forming
		20.7 Microarc (Electrolytic Spark) Oxidation Coating: Aluminum Coating in Sulfuric Acid
		20.8 Plasma Chemistry of the Microarc Oxidative Coating of Aluminum in Concentrated Sulfuric Acid Electrolyte
		20.9 Direct Micro‐patterning, Micro‐fabrication, Micro‐deposition, Micro‐etching, and Surface Modification in Atmospheric Pressure Nonequilibrium Plasma Microdischarges
		20.10 Nanoparticles in Cold Plasma, Physics and Kinetics of Dusty Plasma in Low‐pressure RF Silane Discharges
		20.11 Physical and Chemical Kinetics of Dust Nanoparticles Formation in Plasma: A Story of “Birth and Catastrophic Life”
		20.12 Plasma Synthesis of Aluminum Nano‐powders, Luminescent Silicon Quantum Dots, and Nano‐composite Particles
		20.13 Plasma Synthesis of Highly Organized Carbon Nanostructures: Plasma Synthesis of Fullerenes
		20.14 Plasma Nanotechnology: Synthesis of Nanotubes, and Nanotube Surface Modification
		20.15 Problems and Concept Questions
			20.15.1 Thermal Plasma Spraying of Powders
			20.15.2 Underwater Thermal Plasma Spraying (UPS)
			20.15.3 Radio Frequency (RF) Thermal Plasma Sprays
			20.15.4 Microarc (Electrolytic Spark) Oxidation Coating
			20.15.5 Trapping of Neutral Nanoparticles in Low‐pressure Silane Plasma
			20.15.6 The α–γ Transition During Coagulation of Nanoparticles in Silane Plasma
			20.15.7 Plasma Synthesis of Nano‐powders
	21. Plasma Processing in Microelectronics and Other Micro‐technologies: Etching, Deposition, and Ion Implantation Processes
		21.1 Plasma Etching as a Part of Integrated Circuit Fabrication: Etch Rate, Anisotropy, and Selectivity Requirements
		21.2 Basic Plasma Etch Processes: Sputtering, Pure Chemical Etching, Ion‐energy Driven Etching, Ion‐enhanced Inhibitor Etching
		21.3 Plasma Sources Applied for Etching and Other Material Processing: RF‐CCP Discharges, RF‐Diodes and Triodes, MERIE, Reactive Ion Etchers (RIE), High‐density Plasma (HDP) Sources
		21.4 Kinetics of Etch Processes and Discharges: Surface Kinetics of Etching, Densities, and Fluxes of Ions and Neutral Etchants
		21.5 Gas‐phase Composition in Plasma Etching, Etchants‐to‐unsaturates Flux Ratio
		21.6 Atomic Fluorine and Chlorine‐based Plasma Etching of Silicon, Flamm Formulas, and Doping Effect
		21.7 Plasma Etching of Silicon in CF4 Discharges: Competition Between Etching and Carbon Deposition
		21.8 Plasma Etching of Silicon Oxide (SiO2) and Nitride (Si3N4), Aluminum, Photoresists, and Other Materials
		21.9 Plasma Cleaning of Chemical Vapor Deposition (CVD) and Etching Reactors, In‐situ Cleaning in Micro‐electronics, and Other Active and Passive Cleaning Processes
		21.10 Remote Plasma Cleaning in Microelectronics, Choice of Cleaning Feedstock Gases
		21.11 Plasma‐enhanced Chemical Vapor Deposition (PECVD), Amorphous Si‐film Deposition
		21.12 PECVD of Silicon Oxide (SiO2) and Silicon Nitride (Si3N4) Films, Conformal and Non‐conformal Deposition in Trenches, Atomic Layer Deposition (ALD)
		21.13 Sputter Deposition Processes: Physical and Reactive Sputtering
		21.14 Ion Implantation Processes, Ion‐beam Implantation
		21.15 Plasma‐immersion Ion Implantation (PIII)
		21.16 Problems and Concept Questions
			21.16.1 Anisotropy Requirements for Plasma Etching
			21.16.2 Sputtering
			21.16.3 Etching Anisotropy Analysis in the Framework of Surface Kinetics of Plasma Etching
			21.16.4 Etching Anisotropy as a Function of Discharge Power
			21.16.5 Flamm Formulas for F‐atom Silicon Etching
			21.16.6 Competition Between Silicon Etching and Carbon Film Deposition in CF4 Discharges
			21.16.7 Rate of Amorphous Silicon Film Deposition in Silane (SiH4) Discharges
			21.16.8 Non‐conformal Deposition of SiO2 Within Trenches During PECVD Process in SiH4–O2 Mixture
			21.16.9 Conformal and Non‐conformal Deposition in Trenches
			21.16.10 Plasma‐assisted Atomic Layer Deposition (PA‐ALD)
	22. Plasma Fuel Conversion and Hydrogen Production, Plasma Catalysis
		22.1 Plasma‐assisted Production of Hydrogen from Gaseous Hydrocarbons: Partial Oxidation, Water‐vapor Conversion, Dry (CO2) Reforming, Direct Pyrolysis, Two Concepts of Plasma Catalysis
		22.2 Plasma‐catalytic Syngas Production from Methane and Other Gaseous Hydrocarbons by Partial Oxidation in Nonthermal “Tornado” Gliding Arcs and Other Discharges
		22.3 Plasma‐catalytic Syngas Production in Mixtures of CH4/H2O (Steam Reforming) and CH4/H2O (Dry Reforming)
		22.4 Direct Decomposition (Pyrolysis) of Methane and Other Gaseous Hydrocarbons, Plasma‐catalytic Effects in the Pyrolysis, the Winchester Mechanism
		22.5 Plasma Partial Oxidation and Steam‐reforming of Liquid Fuels: On‐board Generation of Hydrogen‐rich Gases, Reforming of Kerosene, Ethanol, Aviation and Diesel Fuels, Gasoline, Renewable Biomass, Waste‐to‐energy Processes
		22.6 Combination of Plasma and Catalysis in Hydrogen Production from Hydrocarbons: Plasma Pre‐processing and Post‐processing, Plasma Treatment of Catalysts
		22.7 Plasma‐chemical Conversion of Coal, Plasma Coal Pyrolysis, Coal Conversion in Thermal Plasma Jets
		22.8 Thermal Plasma Jet Pyrolysis of Coal in Relatively Inert Gases (Ar, N2, H2): Production of Acetylene (C2H2), Hydrogen Cyanide (HCN), Transformation of Sulfur‐ and Nitrogen‐compounds of Coal
		22.9 Coal Gasification Using Thermal Plasma Discharges: Partial Oxidation, Steam, and Dry Reforming Processes
		22.10 Energy and Hydrogen Production from Hydrocarbons with Carbon Bonding in Solid Suboxides without CO2 Emission
		22.11 Plasma‐chemical Conversion of Coal and Methane into Suboxides for Production of Hydrogen and Energy without CO2 Emission
		22.12 Plasma‐assisted Liquefaction of Natural Gas, Direct CH4 Incorporation into Nonsaturated Liquid Hydrocarbon Fuels
		22.13 H2S Decomposition in Plasma with Production of Hydrogen and Elemental Sulfur: Fundamental and Technological Aspects, Energy Efficiency in Different Plasma Systems
		22.14 Nonequilibrium Kinetics of H2S Decomposition in Plasma: Nonequilibrium Clusterization in Centrifugal Field, Effect of Additives
		22.15 Dissociation of Water Vapor and Direct H2 Production in Plasma: Fundamental and Applied Aspects, Mechanisms and Energy Efficiency of the Process
		22.16 Hydrogen Production from Water in Double‐step Plasma‐chemical Cycles, Plasma Chemistry of CO2–H2O Mixture
		22.17 Problems and Concept Questions
			22.17.1 Plasma Catalysis of Hydrogen Production by Direct Decomposition (Pyrolysis) of Ethane
			22.17.2 Plasma‐stimulated Partial Oxidation of Liquid Fuel into Syngas (CO–H2)
			22.17.3 Gasification of Coal by Water Vapor in Thermal Plasma Jet
			22.17.4 Plasma Conversion of Coal into Carbon Suboxides without CO2 Emission
			22.17.5 Plasma Dissociation of H2S with production of Hydrogen and Elemental Sulfur
			22.17.6 Reverse Reactions and Explosion of Products of Plasma Dissociation of Water Vapor
			22.17.7 Contribution of Dissociative Attachment to H2O Dissociation in Nonthermal Plasma
			22.17.8 H2O Dissociation in Nonequilibrium Supersonic Plasma with Formation of H2 and Stabilization of Peroxide in Products
	23. Plasma Energy Systems: Ignition and Combustion, Thrusters, High‐speed Aerodynamics, Power Electronics, Lasers, and Light Sources
		23.1 Plasma‐assisted Ignition and Stabilization of Flames: Ignition of Fast Transonic and Supersonic Flows, Sustaining Stable Combustion in Low‐speed Flows
		23.2 Mechanisms and Kinetics of Nonequilibrium Plasma‐stimulated Combustion, Ignition Below the Auto‐ignition Limit
		23.3 Subthreshold Plasma Ignition, Kinetics of Plasma “Ignition Below the Auto‐ignition Limit”
			23.3.1 Subthreshold Plasma Ignition Initiated Thermally: the “Bootstrap” Effect
			23.3.2 Subthreshold Ignition Initiated by Plasma‐generated Excited Species
			23.3.3 Subthreshold Ignition Initiated by Plasma‐generated Neutrals like NO and CH2O
			23.3.4 Contribution of Ions to the Subthreshold Ignition
		23.4 Plasma‐assisted Ignition and Combustion in Ram/Scram Jet Engines, Energy Efficiency of Transonic and Supersonic Ignition
		23.5 Plasma Ignition and Stabilization of Combustion of Pulverized Coal: Application for Boiler Furnaces
		23.6 Ion and Plasma Thrusters: Electric Propulsion, Specific Impulse of Electric Rocket Engines
		23.7 Electric Rocket Engines Based on Ion and Plasma Thrusters: Operation of Ion Thrusters, Ion Acceleration Mechanisms, Classification of Major Plasma Thrusters
		23.8 Electrothermal, Electrostatic, Magneto‐plasma‐dynamic, and Pulsed Plasma Thrusters
		23.9 Plasma Aerodynamics, Plasma Interaction with High‐Speed Flows and Shocks
		23.10 Plasma Effects on Boundary Layers, Aerodynamic Plasma Actuators, Plasma Flow Control
		23.11 Plasma Power Electronics: Magneto‐hydrodynamic (MHD) Generators, Plasma Thermionic Converters
		23.12 Gas‐discharge Communication and Special Devices, Plasma Metamaterials
		23.13 Plasma in Lasers: Classification of Lasers, Inversion Mechanisms, Lasers on Self‐limited Transitions, Ionic Gas‐discharge Ar and He–Ne Lasers
		23.14 Plasma Lasers: Inversion in Plasma Recombination, He–Cd, Penning, and Other Lasers
		23.15 Molecular Lasers on Vibrational‐rotational Transitions, CO2, and CO Lasers, Excimer Lasers, Chemical Lasers
		23.16 Plasma Sources of Radiation with High Spectral Brightness, Plasma Lighting: Mercury‐containing and Mercury‐free Lamps
		23.17 Plasma Display Panels and Plasma TV
		23.18 Problems and Concept Questions
			23.18.1 Radical‐thermal “Bootstrap” Effect in the Subthreshold Plasma‐ignition of Hydrogen
			23.18.2 Contribution of Vibrationally and Electronically Excited Molecules into Plasma Stimulated Ignition of H2–Air Mixtures
			23.18.3 Energy Requirements for Plasma Ignition in Ram/Scramjet Engines
			23.18.4 The Electric Propulsion Systems Decrease the Required Mass of the Spacecraft
			23.18.5 Optimal Specific Impulse of Electric Propulsion Systems (Ion and Plasma Thrusters)
			23.18.6 Optimal Specific Impulse Dependence on the Trust
			23.18.7 Plasma Aerodynamics
			23.18.8 Plasma as a Metamaterial
	24. Plasma in Environmental Control: Cleaning of Air, Exhaust Gases, Water, and Soil
		24.1 Exhaust Gas Cleaning from SO2: Fundamental and Applied Aspects, Application of Relativistic Electron Beams and Coronas
		24.2 Kinetics and Energy Balance of Plasma‐catalytic Ion‐molecular Chain Oxidation of SO2 to SO3 in Airflow
		24.3 Plasma‐stimulated Combined Oxidation of NOx and SO2 in Air: Simultaneous Industrial Exhaust Gas Cleaning from Nitrogen and Sulfur Oxides
		24.4 Plasma‐assisted After‐treatment of Automotive Exhaust, Double‐stage Plasma‐catalytic NOx, and Hydrocarbon Remediation
		24.5 Nonthermal Plasma Abatement of Volatile Organic Compounds (VOC) in Air, Plasma Cleaning of Emission from Paper Mills and Wood Processing Plants
		24.6 Nonthermal Plasma Air Cleaning from Acetone, Methanol, Dimethyl Sulfide (DMS), α‐Pinene, and Chlorine‐containing VOC
		24.7 Treatment of Large‐scale Exhaust Gases from Paper Mill and Wood Processing Plants by Wet Pulsed Corona: Combination of Plasma VOC Cleaning with Wet Scrubbing
		24.8 Nonthermal Plasma Removal of Elemental Mercury from Coal‐fired Power Plant Emissions, and Other Industrial Off‐gases
		24.9 Plasma Decomposition of Freons (Chlorofluorocarbons) and Other Gaseous Waste Treatment Processes in Thermal and Transitional “Warm” Discharges
		24.10 Plasma Decontamination of Water: Fundamental and Applied Aspects, Suppression of Hazardous Organic Compounds, Challenges of Energy Cost
		24.11 Plasma‐induced Water Softening, Mechanisms of Removal of Hydrocarbonates from Water
		24.12 Plasma‐induced Cleaning of Produced and Flowback Fracking Water
		24.13 Plasma Water Cleaning from PFOS/PFOA and Other Perfluoro‐alkyl‐substances (PFAS, the “Forever Chemicals”)
		24.14 Plasma Chemistry of PFAS Mineralization in Water: Mechanisms and Energy Balance
		24.15 Plasma Environmental Cleaning of Soil: Destruction of PFAS Compounds, Vitrification of Contaminated Radioactive Soil, and Other Related Solid Waste Treatment Technologies
		24.16 Problems and Concept Questions
			24.16.1 Application of Relativistic Electron Beams in Exhaust Gas Cleaning
			24.16.2 Plasma‐catalytic Ion‐molecular Chain Oxidation of SO2 to SO3 in Airflow
			24.16.3 Plasma‐stimulated Combined Oxidation of NOx and SO2 in Air
			24.16.4 VOC Removal from Exhaust Gases Using Wet Pulsed Corona Discharge
			24.16.5 Plasma‐induced Mechanisms of Destruction of the Organic Compounds in Water
			24.16.6 Plasma‐induced Water Softening, Removal of Hydrocarbonates from Water
			24.16.7 Plasma Chemistry of PFAS Mineralization in Water
			24.16.8 Plasma Environmental Cleaning of PFAS Contaminated Soil
Part IV. Organic and Polymer Plasma Chemistry, Plasma Medicine, and Agriculture
	25. Organic Plasma Chemistry: Synthesis and Conversion of Organic Materials and Their Compounds, Synthesis of Diamonds and Diamond Films
		25.1 Thermal Plasma Pyrolysis of Methane: The Kassel Mechanism, the Westinghouse Process, Co‐production of Acetylene and Ethylene
		25.2 Thermal Plasma Pyrolysis of Higher Hydrocarbons
		25.3 Technologies Based on Thermal Plasma Pyrolysis of Hydrocarbons: Production of Vinyl Chloride and Production of Acetylene by Carbon Reactions with Hydrogen and Natural Gas
		25.4 Thermal Plasma Technology of Pyrolysis of Hydrocarbons with Production of Soot and Hydrogen
		25.5 Nonthermal Plasma Conversion of Methane into Acetylene: Contribution of Vibrational Excitation, Energy Efficiency of the Process
		25.6 Other Processes of Decomposition, Elimination, and Isomerization of Hydrocarbons in the Nonequilibrium Plasma Chemistry
		25.7 Thermal Plasma Synthesis and Conversion of Nitrogen‐organic Compounds: Production of C2N2 from Carbon and Nitrogen; Co‐production of HCN and C2H2 from Methane and Nitrogen
		25.8 Nonthermal Plasma Production of Hydrogen Cyanide (HCN) from Methane and Nitrogen
		25.9 Other Thermal and Nonthermal Plasma Processes of Synthesis and Conversion of the Organic Nitrogen Compounds
		25.10 Organic Plasma Chemistry of Chlorine Compounds
		25.11 Organic Plasma Chemistry of Fluorine Compounds
		25.12 Thermal and Nonthermal Plasma Processing of Chlorofluorocarbons (CFCs)
		25.13 Direct Plasma Synthesis of Methanol and Formaldehyde by Oxidation of Methane
		25.14 Nonthermal Plasma Synthesis of Aldehydes, Alcohols, Organic Acids, and Other Organic Compounds in Mixtures of Carbon Oxides with Hydrogen and Water
		25.15 Plasma‐chemical Synthesis of Diamonds and Diamond Films
		25.16 Mechanisms of Major Plasma‐volume and Surface Processes Leading to the Plasma‐chemical Diamond‐film Growth
		25.17 Problems and Concept Questions
			25.17.1 Plasma Synthesis of Organic Compounds from Methane
			25.17.2 The Kassel Mechanism of Methane Conversion in Thermal Plasma
			25.17.3 Westinghouse Thermal Plasma Process of Natural Gas Conversion
			25.17.4 Mechanism of the Thermal Plasma Production of Soot from Hydrocarbons
			25.17.5 Direct Plasma Synthesis of Methanol and Formaldehyde by Oxidation of Methane
			25.17.6 Nonthermal Plasma Synthesis of Formic Acid in CO2–H2O Mixture
			25.17.7 Plasma‐chemical Synthesis of Diamonds and Diamond Films
	26. Plasma Polymerization, Processing of Polymers, Treatment of Polymer Membranes
		26.1 Plasma‐chemical Polymerization of Hydrocarbons: Formation of Thin Polymer Films, Mechanisms of Plasma Polymerization
		26.2 Plasma Polymerization Kinetics: Initiation of Polymerization by Dissociation of Hydrocarbons in Plasma Volume, Heterogeneous Polymerization of C1/C2 Hydrocarbons
		26.3 Plasma Initiated Chain‐polymerization, Mechanism and Kinetics of Plasma Polymerization of Methyl Methacrylate
		26.4 Plasma‐initiated Graft Polymerization
		26.5 Formation of Polymer Macroparticles in Volume of Nonthermal Plasma of Hydrocarbons
		26.6 General Properties of Plasma‐polymerized Thin Films
		26.7 Plasma Treatment of Polymer Surfaces: Initial Surface Products, Treatment of Polyethylene
		26.8 Nonthermal Plasma Etch of Polymers, Contribution of Charged Species, Atoms, Radicals, and UV‐radiation in Polymer Treatment and Etching
		26.9 Plasma‐chemical Oxidation, Nitrogenation, and Fluorination of Polymer Surfaces
		26.10 Aging Effect in Plasma‐treatment of Polymers
		26.11 Plasma Modification of Wettability of Polymer Surfaces
		26.12 Plasma Enhancement of Polymer Surface Adhesion, Metallization of Polymer Surfaces
		26.13 Plasma Treatment of Textiles: Processing of Wool
		26.14 Plasma Treatment of Textiles: Processing of Cotton, and Synthetic Textiles, the Lotus Effect
		26.15 Plasma‐chemical Treatment of Plastics, Rubber Materials, and Special Polymer Films
		26.16 Plasma Modification of Gas‐separation Polymer Membranes: Enhancement and Control of Selectivity and Permeability
		26.17 Mechanisms of Plasma Modification of Gas‐separating Polymer Membranes, Lame Equation
		26.18 Modeling of Selectivity of the Plasma‐treated Gas‐separating Polymer Membranes
		26.19 Problems and Concept Questions
			26.19.1 Mechanisms and Kinetics of Plasma Polymerization
			26.19.2 Temperature Dependence of the Plasma Polymerization Rate
			26.19.3 Temperature Dependence of Electric Conductivity of Plasma‐polymerized Films
			26.19.4 Depth of Plasma Modification of Polymer Surfaces
			26.19.5 Primary Plasma Components Active in High‐depth Polymer Treatment
			26.19.6 Plasma‐chemical Nitrogenation and Fluorination of Polymer Surfaces
			26.19.7 The Lotus Effect
			26.19.8 Permeability of Plasma‐treated Gas‐separating Polymer Membranes
			26.19.9 Threshold Effect of Plasma Treatment on Selectivity of Gas‐separating Polymer Membranes
	27. Plasma Biology, Nonthermal Plasma Interaction with Cells
		27.1 Plasma Biology as a Fundamental Basis of Plasma Medicine, Plasma Agriculture, and Plasma Food Processing
		27.2 Types of Cells and Primary Cell Components Involved in Interaction with Plasma
			27.2.1 The Cell Envelope: Membranes and Walls
			27.2.2 The Nucleus, DNA, and Chromosomes
			27.2.3 Cytoplasm and Cytosol
			27.2.4 Vacuoles and Vesicles
			27.2.5 Endoplasmic Reticulum
			27.2.6 Ribosomes, Golgi Apparatus
			27.2.7 Lysosomes
			27.2.8 Mitochondria
			27.2.9 Plastids
		27.3 Transport Processes Across Cell Membranes and Their Relevance to Plasma Treatment of Cells and Its Selectivity
		27.4 Cell Cycle, Cell Division, Cellular Metabolism as a Possible Base of Treatment Selectivity in Plasma Biology
		27.5 Reactive Species in Cells and Their Similarity with Plasma‐generated Reactive Species, Reactive Oxygen Species (ROS)
		27.6 Cellular Sources of Reactive Nitrogen Species (RNS), Some NO‐based Plasma‐biological and Cell Processes
		27.7 Cell Signaling Functions and Their Role in Plasma Biology, Contribution of Reactive Species in Cell Signaling
		27.8 Mechanisms of Plasma Interaction with Cells: Direct vs Indirect Plasma Effects, Main Stages, and Key Players
		27.9 Contribution of Plasma‐generated Charged Species to Plasma Interaction with Cells
		27.10 Contribution of UV, Electric Field, Hydrogen Peroxide, Acidity, Ozone, NOx, Other ROS, and RNS to Direct Plasma Cell Treatment, Effect of Presence of Water and Media
		27.11 Biological Mechanisms of Direct DBD Plasma Interaction with Mammalian Cells: Key Role of Intracellular ROS, Plasma‐induced DNA Damage
		27.12 Effect of the Cell Medium on Plasma Interaction with Mammalian Cells, Plasma‐induced Factors Crossing the Cell Membrane
		27.13 Problems and Concept Questions
			27.13.1 Osmosis, Flow of Water Across the Cell Membrane
			27.13.2 Aquaporins (AQPs) and Selective Anticancer Behavior of Plasma
			27.13.3 Cellular Metabolism and Selective Anticancer Behavior of Plasma
			27.13.4 Intracellular ROS Transformations
			27.13.5 Intracellular RNS Transformations
			27.13.6 Liquid Medium Film Covering Cells
			27.13.7 Propagation of the Electric Charge Effect Across Liquid Medium Film Covering Cells, the Bjerrum Length
			27.13.8 Plasma‐induced Electroporation
	28. Plasma Disinfection and Sterilization of Different Surfaces, Air, and Water Streams
		28.1 Nonthermal Plasma Surface Sterilization, Microorganism Survival Curves, D‐value of the Microorganism Deactivation
		28.2 Cold Atmospheric Pressure Plasma Inactivation of Microorganisms on the Surfaces, Mechanisms and Kinetics of Plasma Sterilization
		28.3 Contribution of Different Plasma Species and Factors in Cold Atmospheric Pressure Plasma Sterilization of Surfaces
		28.4 Nonthermal Plasma Sterilization of Spores and Viruses: Inactivation of Bacillus cereus, Bacillus anthracis Spores, SARS‐CoV‐2 Coronavirus
		28.5 Decontamination of Surfaces from Extremophile Organisms and Prion Proteins Using Nonthermal Atmospheric‐Pressure Plasma
		28.6 Sub‐lethal Plasma Effect on Bacterial Cells, Apoptosis vs Necrosis in Plasma Treatment of Cells
		28.7 Different Levels of Deactivation/Destruction of Microorganisms Due to Plasma Sterilization: Are They Dead or Just Scared to Death? Concept of VBNC
		28.8 Nonthermal Plasma Sterilization of Air Streams, Direct Air Sterilization vs Application of Filters, Pathogen Detection and Remediation System (PDRF)
		28.9 Phenomenological Kinetics of Nonthermal Plasma Sterilization of Air Streams
		28.10 Plasma‐provided Water Disinfection and Sterilization Using Ozone, UV, and Pulsed Electric Fields
		28.11 Application of Different Types of Direct Pulsed‐plasmas for Water Disinfection and Sterilization
		28.12 Challenge of Electric Energy Cost of Plasma‐induced Water Disinfection and Sterilization, Most Energy‐effective Technologies Based on Application of Sparks and Other “Quasi‐thermal” Warm Discharges
		28.13 Dominating Role of UV‐radiation in the Highly Energy‐effective Inactivation of Microorganisms in Water Using the Pulsed Spark Discharge System
		28.14 Problems and Concept Questions
			28.14.1 Multi‐slope Survival Curves for Plasma‐induced Killing of Microorganisms
			28.14.2 Effect of Membrane Damages by Ion Bombardment During Plasma Sterilization of Surfaces
			28.14.3 Plasma‐Induced Sterilization of Anthrax Spores Inside a Closed Paper Envelope Using DBD Plasma
			28.14.4 Plasma‐Induced Killing of Microorganisms vs Transferring them to the VBNC (viable‐but‐not‐culturable) State
			28.14.5 Nonthermal Plasma Sterilization of Air Streams, Plasma Suppression of the Airborne Microorganisms
			28.14.6 Phenomenological Kinetics of Nonthermal Plasma Sterilization of Air Streams
			28.14.7 Application of Different Types of Direct Pulsed‐Plasmas for Water Disinfection and Sterilization
			28.14.8 Dominating Role of UV‐radiation in the Highly Energy‐Effective Inactivation of Microorganisms in Water Using the Spark Discharge System
	29. Plasma Agriculture and Food Processing, Chemical and Physical Properties of Plasma‐activated Water, Fundamentals and Applications to Wash and Disinfect Produce
		29.1 Plasma Agriculture and Food Processing: A Rapidly Emerging Field of Plasma Science and Technology, Direct Application of Plasma vs Use of Plasma‐activated Water and Solutions
		29.2 Where Plasma Technologies Can be Specifically Applied in the Life Cycle of Fresh Produce?
		29.3 Direct Plasma‐stimulated Seed Germination and Growth: Application of Low, Medium, and Atmospheric Pressure Discharges
		29.4 Some Biological Effects of Direct Plasma‐induced Enhancement of Seed Germination and Growth of Seedlings
		29.5 Indirect Plasma Effects on Seeds, Effect of Plasma‐treated Water on Seed Germination and Enhancement of Seedling Growth
		29.6 Plasma Stimulation of Plant Growth Using Plasma‐activated Water: Major Mechanisms, Comparison of Different Plasma Sources, Plasma Hydroponics
		29.7 Direct Application of Plasma for Disinfection of Agricultural Products
		29.8 Direct Plasma‐induced Disinfection of Crops and Seeds
		29.9 Plasma‐induced Disinfection of Meats, Cheeses, Other Foods, and Relevant Food Containers and Storage Areas
		29.10 Direct Plasma‐induced Disinfection of Foods Inside of Closed Packages
		29.11 Plasma‐water, and How Does It Work in Agriculture for Disinfection and Washing of Fresh Produce and Other Foods? Plasma Chemistry in Water, Plasma‐water Spraying and Misting
		29.12 Metastable Nature of Chemical and Biological Activity of Plasma‐activated Water, Metastable Plasma Acids
		29.13 Plasma Misting Fundamentals: Mist Droplet Size Distribution, Mist Particulates Explosion and Evaporation‐condensation Effects
		29.14 Application of Plasma Misting to Fresh Produce Disinfection and Other Sanitization Technologies
		29.15 Large‐volume Produce Washing with Plasma‐activated Water, Effect of Treatment Temperature
		29.16 Produce Washing with Plasma‐activated Water, Effect of Organic Load, Nonoxidative Disinfection Processes
		29.17 Plasma Treatment of Water Leads Not Only to Disinfection but additionally, to Enhancement of Washability of Fresh Produce
		29.18 Plasma Treatment Effect on Surface Tension, Viscosity, and Other Physical Properties of Water
		29.19 About Mechanisms of Plasma‐induced Changes of Physical Properties of Water
		29.20 Problems and Concept Questions
			29.20.1 Plasma Stimulation of Plant Growth Using Plasma‐activated Water
			29.20.2 Direct Plasma‐induced Disinfection of Foods Inside of Closed Packages
			29.20.3 Plasma Chemistry of Agricultural Water, Oxidative Disinfection
			29.20.4 Metastable Nature of Chemical and Biological Activity of Plasma‐Activated Water
			29.20.5 Plasma Misting for Fresh Produce Disinfection
			29.20.6 Mist Droplet Size Distribution, Mist Particulates Explosion and Evaporation‐condensation Effects
			29.20.7 Effect of Treatment Temperature on Produce Washing with Plasma‐activated Water
			29.20.8 Effect of Organic Load on Produce Washing, Plasma‐induced Nonoxidative Disinfection
			29.20.9 Plasma‐induced Enhancement of Washability of Fresh Produce vs Stimulation of Direct Disinfection with PAW
			29.20.10 Plasma Treatment Effect on Surface Tension of Water, It's Surfactancy, and Washability
	30. Plasma Medicine: Safety, Selectivity, and Efficacy; Penetration Depth of Plasma‐Medical Effects; Standardization and Dosimetry
		30.1 Safety, Selectivity, and Efficacy are Key Factors in Direct Plasma Treatment of Wounds and Diseases: Prehistory, History, and Nowadays of Plasma Medicine
		30.2 Major Discharges in Plasma Medicine: Floating‐electrode Dielectric Barrier Discharge (FE‐DBD), Plasma Jets, Pin‐to‐hole (PHD) Discharge, and Electrical Safety Issues
		30.3 FE‐DBD Plasma Uniformity and Plasma Controllability for Safe Treatment of Living Tissue
		30.4 Indirect Plasma Application for Medical Purposes: Plasma Pharmacology, Use of Plasma Activated Aqueous Media
		30.5 Plasma Pharmacology: Use of Plasma Activated Biological Media (PAM), Plasma Activated Lactate Solution (PAL), and Gels for Medical Purposes
		30.6 FE‐DBD Plasma in Direct Living Tissue Sterilization
		30.7 Analysis of Toxicity (Nondamaging) in Direct FE‐DBD Plasma Treatment of Living Tissues
		30.8 Direct Plasma Interaction with Living Tissue: Not only Plasma Affects Tissue, but Tissue Affects Plasma as Well; In‐vitro Model Mimicking the Living Tissue
		30.9 Depth of Penetration of Plasma‐generated Active Species into Living Tissue
		30.10 Plasma Effects Propagating into Living Tissue Deeper than Plasma Generated ROS/RNS, Effects of Radiation and Electric Field, Contribution of Cell‐to‐cell Signaling
		30.11 Transferring Nanosecond Pulsed DBD Plasma Effects Across Barrier of Cells
		30.12 Mechanisms of Plasma‐induced Cell‐to‐cell Communication Leading to Deep Propagation of Plasma‐medical Effects, Calcium Ion Wave Propagation
		30.13 Standardization of Plasma‐medical Devices and Approaches
		30.14 Dosimetry of Plasma Medical Treatments and Procedures, Absorbed Energy Related Physical Approach to Dosimetry
		30.15 Dosimetry of Plasma Medical Treatments and Procedures Based on Biological Responses of Tissues
		30.16 Problems and Concept Questions
			30.16.1 Electrical Safety of the FE‐DBD Plasma Source for Direct Medical Treatment of Humans and Animals
			30.16.2 Safety of the FE‐DBD Plasma in Treatment of Nonuniform Living Tissues
			30.16.3 Medical Applications of the Plasma‐Activated Ringer's Lactate Solution (PAL)
			30.16.4 Mechanisms of Plasma‐Induced Cell‐To‐Cell Communication Leading to Deep Propagation of Plasma‐Medical Effects
			30.16.5 Direct Relation Between the Medical Treatment Dose and the Treatment Energy in FE‐DBD Plasma
			30.16.6 Effective, and Safe Integrated Absorbed Energy Doses of the Plasma Medical DBD Treatment
			30.16.7 Relation Between Integrated Absorbed Energy Doses in DBD with Absorbed Radiation Doses
			30.16.8 Integrated Absorbed Energy Doses in DBD Leading to Necrosis of Treated Tissue
			30.16.9 Plasma Treatment Units (PTU), Dosimetry Approach Based on Biological Readout
	31. Plasma Medicine: Healing of Wounds and Ulcerations, Blood Coagulation
		31.1 Plasma Wound Healing, Types of Wounds, and Relevant Healing Processes
		31.2 Specifics of Acute and Chronic Wounds Important for Their Plasma Healing
		31.3 Effects of Plasma‐generated NO on Wound Healing and Other Medical Treatments
		31.4 Intensive‐NO‐generating Plasma Sources for Wound Treatment
		31.5 Nitric Oxide Effects in Plasma‐medical Plazon Treatment: Cell Cultures, Wound Tissues, Animal Models
		31.6 Clinical Tests of Plasma‐induced NO‐therapy of Wounds: Plasma‐medical Plazon Healing of Ulcers
		31.7 Other Plazon Clinical Tests of Plasma‐induced NO‐therapy of Wounds
		31.8 Wound Healing Using Pin‐to‐hole (PHD) and Microwave Transitional “Warm” Plasma Discharges
		31.9 Treatment of Skin and Infected Wounds Using FE‐DBD Plasma
		31.10 Plasma Wound Healing in Clinical Studies
		31.11 “Scientifically Based” Plasma‐medical Devices Healing Wounds and Ulcerations in Medical Market
		31.12 Preventing and Suppressing Bleeding Using Thermal Plasma Cauterization Devices, Argon Plasma Coagulators (APS)
		31.13 Nonthermal Atmospheric‐pressure Plasma‐assisted Blood Coagulation
		31.14 Biochemical Mechanisms of Nonthermal Plasma‐induced Blood Coagulation, Contribution of Ca2+ Ionic Factor to Blood Coagulation Cascade
		31.15 Plasma‐induced Blood Coagulation: Plasma Influence of Protein Activity, Natural‐soft, Intermediate, and Strong Regimes of Stopping Bleeding
		31.16 Problems and Concept Questions
			31.16.1 Intensive‐NO‐generating Plasma Sources for Wound Treatment
			31.16.2 Direct FE‐DBD Treatment of Heavy Bleeding and Infected Wounds
			31.16.3 Thermal Plasma Cauterization Devices, Argon Plasma Coagulators (APC)
			31.16.4 Biochemical Mechanisms of Nonthermal Plasma‐induced Blood Coagulation
			31.16.5 Natural‐soft, Intermediate, and Strong Regimes of Stopping Bleeding
	32. Plasma Medicine: Dermatology and Cosmetics, Dentistry, Inflammatory Dysfunctions, Gastroenterology, Cardiovascular, and Other Diseases, Bioengineering and Regenerative Medicine, Cancer Treatment and Immunotherapy
		32.1 Plasma Dermatology, Clinical Trials
		32.2 Plasma Cosmetics Closely Related to Dermatological Studies
		32.3 Plasma Dentistry: Structure of Teeth, Challenges for Plasma Application
		32.4 First Effective Plasma Applications to Dental Health
		32.5 Modification of Implant Surface, Enhancing Adhesive Qualities, Polymerization, Surface Coating, and Other Material‐related Plasma Applications in Dentistry
		32.6 Direct Application of Nonthermal Plasma in Dentistry
		32.7 Plasma Treatment of Inflammatory Dysfunctions and Infections
		32.8 Plasma Gastroenterology: Inflammatory Bowel Diseases (IBD)
			32.8.1 Pin‐to‐hole Microdischarge Plasma Treatment of Ulcerative Colitis
		32.9 Plasma in Cardiovascular Diseases: Plasma Effect on Whole Blood Viscosity (WBV)
		32.10 Plasma in Cardiovascular Diseases: Control of Blood Rheological Properties and Low‐density‐lipoprotein (LDL) Cholesterol, Stimulation of Angiogenesis
		32.11 Plasma‐assisted Tissue Engineering: Regulation of Bio‐properties of Polymers, Bioactive Micro‐xerography, Cell Attachment and Proliferation on Polymer Scaffolds
		32.12 Plasma Control of Stem Cells and Tissue Regeneration, Differentiation of Mesenchymal Stem Cells (MSC) into Bone and Cartilage Cells, Plasma Orthopedics
		32.13 Plasma Treatment of Cancer, Direct and Indirect (Plasma‐treated Solutions) Approaches
		32.14 Plasma Abatement of Malignant Cells, Apoptosis vs Necrosis of Cancer Cells
		32.15 Nonthermal Plasma Treatment of Explanted Tumors in Animal Models
		32.16 Plasma Control and Suppression of Precancerous Conditions in Dermatology, Clinical FE‐DBD Treatment of Actinic Keratosis
		32.17 On a Way to Larger Clinical Studies in Plasma Oncology, Combination Therapies, Clinical Plasma Treatment of Cancer
		32.18 Plasma in Onco‐immunotherapy, Plasma‐induced Systemic Tumor‐specific Immunity, Immunogenic Cell Death, and Overcoming Immune Suppression
		32.19 FE‐DBD Plasma Immunotherapeutic Treatment of Colorectal Tumors in Animal Model, Vaccination in Plasma Cancer Treatment
		32.20 Problems and Concept Questions
			32.20.1 Nonthermal Plasma Dermatology
			32.20.2 Direct Nonthermal Plasma Applications in Dentistry
			32.20.3 Pin‐to‐hole Microdischarge Plasma Treatment of Ulcerative Colitis
			32.20.4 Plasma Effect on Whole Blood Viscosity (WBV)
			32.20.5 Nonthermal Plasma Control of Low‐density‐lipoprotein (LDL) Cholesterol in Blood
			32.20.6 Plasma Control of Stem Cells and Tissue Regeneration, a Pathway from Plasma Orthopedics to Plasma Cosmetics
			32.20.7 Selectivity of Nonthermal Plasma Treatment of Cancers
			32.20.8 Plasma in Onco‐immunotherapy, Plasma‐induced Systemic Tumor‐specific Immunity
Afterword and Acknowledgements
References
Index