Particle adhesion and removal

Content: Preface xv    Part 1: Particle Adhesion: Fundamentals 1    1 Fundamental Forces in Particle Adhesion 3  Stephen Beaudoin, Priyanka Jaiswal, Aaron Harrison, Jennifer Laster, Kathryn Smith, Melissa Sweat, and Myles Thomas    1.1 Introduction 3    1.2 Various Forces in Particle Adhesion 4    1.3 Summary 69    References 70    2 Mechanics of Particle Adhesion and Removal 81  Goodarz Ahmadi    2.1 Introduction 81    2.2 Models 83    2.3 Simulations Results 96    2.4 Summary and Conclusions 99    Acknowledgements 100    References 100    3 Microscopic Particle Contact Adhesion Models and Macroscopic Behavior of Surface Modified Particles 105  Katja Mader-Arndt, Zinaida Kutelova, and Jurgen Tomas    3.1 Introduction 105    3.2 Constitutive Contact Models 107    3.3 Macroscopic Powder Behavior - Continuum Mechanics Approach 121    3.4 Surface Modification to Alter the Adhesion Properties 124    3.5 Experimental Measurements of the Adhesion Forces 130    3.6 Summary and Conclusions 146    Acknowledgements 147    List of Symbols 147    References 148    4 Characterization of Single Particle Adhesion: A Review of Recent Progress 157  Armin Saeedi Vahdat and Cetin Cetinkaya    4.1 Introduction 157    4.2 Background 159    4.3 Recent Developments 167    4.4 Conclusions and Remarks 193    Acknowledgments 194    List of Symbols 194    References 196    Part 2: Particle Removal Techniques 201    5 High Intensity Ultrasonic Cleaning for Particle Removal 203  Sami B. Awad and Nadia F. Awad    5.1 Introduction 204    5.2 Ultrasound and Ultrasonics 204    5.3 Cavitation Phenomenon 207    5.4 Generation of Ultrasound - Transducers 211    5.5 Ultrasonic Generators 217    5.6 Principles of Ultrasonic Cleaning for Particle Removal 219    5.7 Determination of Residual Particles on Surfaces 223    5.8 Ultrasonic Aqueous Cleaning Equipment and Process 225    5.9 Precision Cleaning 228    5.10 Contaminants 228    5.11 Ultrasonic Cavitation Forces and Surface Cleaning 230    5.12 Cleaning Chemistry 232    5.13 Mechanism of Cleaning 236    5.14 Cavitation Erosion 238    5.15 Summary 239    References 239    6 Megasonic Cleaning for Particle Removal 243  Manish Keswani, Rajesh Balachandran, and Pierre Deymier    6.1 Introduction 243    6.2 Principles of Megasonic Cleaning 247    6.3 Particle Removal Mechanisms During Megasonic Cleaning 259    6.4 Types of Megasonic Systems 262    6.5 Particle Removal and Feature Damage in Megasonic Cleaning 264    6.6 Summary 274    References 274    7 High Speed Air Jet Removal of Particles from Solid Surfaces 281  Kuniaki Gotoh    7.1 Introduction 281    7.2 Fundamental Characteristics of the Air Jet 282    7.3 Fundamentals of Air Jet Particle Removal 286    7.4 New Methods Using Air Jet 300    7.5 Summary and Prospect 307    List of Symbols 308    References 309    8 Droplet Spray Technique for Particle Removal 313  James T. Snow, Masanobu Sato, and Takayoshi Tanaka    8.1 Introduction 313    8.2 Droplet Impact Phenomena 314    8.3 Cleaning Process Window 318    8.4 Droplet Spray Technique for Semiconductor Wafer Cleaning 324    8.5 Summary 331    References 331    9. Laser-Induced High-Pressure Micro-Spray Process for Nanoscale Particle Removal 337  Daehwan Ahn, Changho Seo, and Dongsik Kim    9.1 Introduction 337    9.2 Concept of Droplet Opto-Hydrodynamic Cleaning (DOC) 340    9.3 Micro-Spray Generation by LIB 343    9.4 Mechanisms of Particle Removal by Laser-Induced Spray Jet 344    9.5 Generation of Micro-Spray Jet 345    9.6 Nanoscale Particle Removal 352    9.7 Summary 360    References 360    10 Wiper-Based Cleaning of Particles from Surfaces 365  Brad Lyon and Jay Postlewaite    10.1 Introduction 366    10.2 Basic Mechanism of Wiping for Cleaning of Particles and Other Contaminants 371    10.3 Various Types of Wipers 379    10.4 Proper Ways to Carry Out Wiping or How to Use Wipers Properly 390    10.5 Characterization of Wipers 396    10.6 Results Obtained Using Wiping 398    10.7 Future Directions 405    10.8 Summary 406    References 408    11 Application of Strippable Coatings for Removal of Particulate Contaminants 411  Rajiv Kohli    11.1 Introduction 411    11.2 Coating Description 412    11.3 Types of Strippable Coatings 413    11.4 Issues with Strippable Coatings 426    11.5 Precision Cleaning Applications 427    11.6 Summary 443    Disclaimer 443    References 443    12 Cryoaerosol Cleaning of Particles from Surfaces 453  Souvik Banerjee    12.1 Introduction 453    12.2 History of Cryoaerosol Cleaning 455    12.3 Thermodynamics of Cryoaerosol Processes 456    12.4 Cleaning Mechanism 461    12.5 Factors Affecting Cleaning Performance 462    12.6 Results Obtained by Cryoaerosol Cleaning  469    12.7 Summary and Prospects 473    References 474    13 Supercritical Carbon Dioxide Cleaning: Relevance to Particle Removal 477  Rajiv Kohli    13.1 Introduction 477    13.2 Surface Cleanliness Levels 478    13.3 Dense Phase Fluids 479    13.4 Principles of Supercritical CO2 Cleaning 489    13.5 Advantages and Disadvantages of Supercritical CO2 Cleaning 493    13.6 Applications 496    13.7 Summary and Conclusions  502    Acknowledgement 503    Disclaimer 503    References 503    14 The Use of Surfactants to Enhance Particle Removal from Surfaces 519  Brian Grady    14.1 Introduction 519    14.2 Solid-Solid Interactions 520    14.3 Introduction to Surfactants 524    14.4 Surfactant Adsorption at Solid Surfaces 529    14.5 Surfactants and Particulate Removal 535    14.6 Prospects 539    14.7 Summary 540    Acknowledgements 540    References 540    Index 543