Optical Inspection of Microsystems, Second Edition

1. Image Processing and Computer Vision for MEMS Testing
[Markus Hüttel]
2. Surface Features
[Xiangqian Jiang]
3. A Metrological Characteristics Approach to Uncertainty in Surface Metrology
[Richard Leach, Han Haitjema, and Claudiu Giusca]
4. Image Correlation Techniques for Microsystems Inspection
[Dietmar Vogel and Bernd Michel]
5. Light Scattering Techniques for the Inspection of Microcomponents and Structures
[Angela Duparré and Sven Schröder]
6. Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM)
[F. Michael Serry and Joanna Schmit]
7. Optical Profiling Techniques for MEMS Measurement
[Klaus Körner, Johann Krauter, Aiko Ruprecht, and Tobias Wiesendanger]
8. Grid and Moiré Methods for Micromeasurements
[Anand Asundi, Bing Zhao, and Huimin Xie]
9. Grating (Moiré) Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents
[Leszek Salbut and Malgorzata Kujawinska]
10. Interference Microscopy Techniques for Microsystem Characterization
[Alain Bosseboeuf, Philippe Coste, and Sylvain Petitgrand]
11. Measuring MEMS in Motion by Laser Doppler Vibrometry
[Christian Rembe, Georg Siegmund, Heinrich Steger, and Michael Wörtge]
12. An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS
[Christophe Gorecki, Michał Józwik, and Patrick Delobelle]
13. Optoelectronic Holography for Testing Electronic Packaging and MEMS
[Cosme Furlong]
14. Digital Holography and Its Application in MEMS/MOEMS Inspection
[Wolfgang Osten and Pietro Ferraro]
15. Speckle Metrology for Microsystem Inspection
[Roland Höfling and Petra Aswendt]
16. Spectroscopic Techniques for MEMS Inspection
[Ingrid De Wolf]
17. Sensor Fusion in Multiscale Inspection Systems
[Marc Gronle]