Micromachined Circuits and Devices: Microwave to Sub-millimeter Applications (Lecture Notes in Electrical Engineering, 859)

Preface
Contents
Abbreviations
1 Introduction to Radio Frequency Micro Electromechanical Systems
	1.1 Overview of Micromachined Radio Frequency Components
	1.2 Micromachined Passive Circuits
		1.2.1 Transmission Line
		1.2.2 Varactor and Inductors
		1.2.3 Switches and Other Passive Circuits
		1.2.4 Resonators
	1.3 Fabrication of RF Micromachined Devices on Different Technology Platforms
	1.4 Applications of RF Micromachined Devices and Components
	1.5 Book Organisation
	References
2 Micromachined Microwave Passive Circuits
	2.1 Introduction
	2.2 Micromachined Conductor Backed Coplanar Waveguide (CBCPW) Lines
		2.2.1 Studies on Basic Micromachined Transmission Structures
		2.2.2 Design Data on Discontinuities in Membrane Microstrip
		2.2.3 Design Data on Discontinuities in Membrane Coplanar Lines
		2.2.4 Tee-Junction Discontinuity
	2.3 Micromachined Varactors
		2.3.1 Modelling and Design Optimization
		2.3.2 Quality Factor Analysis
		2.3.3 Electro-Mechanical Modelling of the Varactor with Parametric Optimization
		2.3.4 Testing and Characterization of the Micromachined Varactor
	2.4 Micromachined Inductors
	2.5 Micromachined RF Power Divider and Coupler
	2.6 Conclusions
	References
3 Micromachined Single-Pole-Single Throw Switches
	3.1 Introduction
	3.2 Ohmic Contact Micromachined Switch
		3.2.1 Switch Profile Analysis
		3.2.2 Mechanical Resonance Frequency
		3.2.3 Electrical Responses
		3.2.4 Switching and Release Time Responses
		3.2.5 Radio Frequency Performance
		3.2.6 Temperature Sensitivity
		3.2.7 Radio Frequency Power Handling Performance
		3.2.8 Intermodulation Distortion
	3.3 Conclusions
	References
4 Micromachined Single-Pole-Multi-throw Switching Networks
	4.1 Introduction
	4.2 Vertical Actuation of Micromachined Switching Networks
		4.2.1 Single-Pole-Three-Throw (SP3T) Switch Design and Measurement
		4.2.2 Single-Pole-Six-Throw (SP6T) Switch Design and Measurements
		4.2.3 Single-Pole-Seven-Throw (SP7T) Switch Design and Measurements
		4.2.4 Single-Pole-Eight-Throw (SP8T) Switch Design and Measurements
		4.2.5 Single-Pole-Ten-Throw (SP10T) Switch Design and Measurements
		4.2.6 Single-Pole-Eleven-Throw (SP11T) Switch Design and Measurements
		4.2.7 Single-Pole-Twelve-Throw (SP12T) Switch Design and Measurements
		4.2.8 Single-Pole-Fourteen-Throw (SP14T) Switch Design and Measurements
		4.2.9 Design Guidelines of the MEMS SPMT Switches
		4.2.10 IIP3 Measurements of the Micromachined SPMT Switches
	4.3 Design, Analysis and Measurements of Single-Pole-Sixteen-Throw Switch
		4.3.1 SP16T Switch Design and Analysis
		4.3.2 Measurements of the SP16T Switches
	4.4 Lateral Actuation of Switching Networks
		4.4.1 Design and Measurements of Single Lateral MEMS Switch
		4.4.2 Design and Measurements of Different SPMT Lateral MEMS Switches
	4.5 Phase-Change Materials (PCMs) Based Micromachined RF Switches
	4.6 Conclusions
	References
5 Micromachined Resonators and Circuits
	5.1 Introduction
	5.2 Basic Resonator Model and Properties
	5.3 Electromechanical Properties of MEMS Resonators
	5.4 Circuit Model Representation of MEMS Resonators
		5.4.1 Flexural Modes
		5.4.2 Bulk Modes
		5.4.3 Shear Modes
		5.4.4 Torsional Modes
		5.4.5 Coupled Resonators
	5.5 Transduction Mechanism of Resonators
		5.5.1 Capacitive Transduction Mechanism
		5.5.2 Piezoelectric Transduction Mechanism
		5.5.3 Piezoresistive Transduction Mechanism
	5.6 Applications
		5.6.1 Applications in Timing
		5.6.2 MEMS Resonator-Based Oscillators
	5.7 Conclusions
	References
6 Micromachined Phase Shifters
	6.1 Introduction
	6.2 Classification of Phase Shifters
		6.2.1 Reflection Type Phase Shifter
		6.2.2 Switched-Line Phase Shifter
		6.2.3 Loaded-Line Phase Shifters
		6.2.4 Low-Pass/High-Pass Network Phase Shifter
		6.2.5 Distributed MEMS Transmission Line (DMTL) Phase Shifter
	6.3 Conventional Micromachined Switched Line Phase Shifters
		6.3.1 Digital MEMS 5-Bit Switched Line Phase Shifter Using Two Back-To-Back SPDT Switches
		6.3.2 4-Bit Switched Line Phase Shifters Using Two Back-To-Back SP16T Switches
	6.4 Different Types of DMTL Phase Shifters
		6.4.1 Phase Shifters Using MAM Capacitors and MEMS Bridges
		6.4.2 Push–Pull Type MEMS Digital DMTL Phase Shifters
	6.5 Narrowband and Compact MEMS Phase Shifters
	6.6 Reconfigurable MEMS Digital Phase Shifters
	6.7 Wide-Band MEMS Digital Phase Shifters
	6.8 Other State-of-The-Art Micromachined Phase Shifters
	6.9 Conclusions
	References
7 Micromachined Tunable Filters Using MEMS Switches
	7.1 Introduction
	7.2 Design Topology of the Tunable Bandpass Filter and Its Working Principle
	7.3 Design and Testing of Individual Functional Blocks of the Filter
		7.3.1 MEMS Switch Design and Measurements
		7.3.2 MEMS Shunt Switch Array Design and Measurements: Block 2
		7.3.3 Design of Block 3
	7.4 Testing of Tunable Bandpass Filter
	7.5 Design Guidelines of the Proposed Filter and Future Scope for Improvements
	7.6 Frequency and Bandwidth Tunable Micromachined Bandpass Filter at 24 GHz
	7.7 Conclusions
	References
8 Reliability Analysis of RF MEMS Devices
	8.1 Introduction
	8.2 Testing the Reliability of RF MEMS Devices
	8.3 Reliability Analysis on MEMS Switching Networks
	8.4 Reliability Analysis on MEMS Digital Phase Shifter
	8.5 Reliability Analysis on Tunable MEMS Filter
	8.6 Conclusions
	References
9 Micromachined Antennas
	9.1 Introduction
	9.2 Micromachined Microstrip Patch Antennas
	9.3 Micromachined Antennas for 60 GHz ISM Band
		9.3.1 Micromachined Antennas for 60 GHz ISM Band Using High Isolation SPDT Switch
		9.3.2 Micromachined Antennas for ISM Band Sectoring Applications Using a SP9T Switch
	9.4 Polarization Agile MEMS Antenna at 77 GHz
	9.5 Millimeter Wave Micromachined Active Antenna
		9.5.1 Scaled Model (At K-band and on RT-duroid 10 Million Substrate)
		9.5.2 Scaled Model at Ka-band and on RT-duroid 5 Million Substrate
	9.6 Micromachined Two-Port Patch Antenna
	9.7 Micromachined Active Antenna Element at Ka-band and on Silicon Substrate
	9.8 Design Guidelines for Micromachined Patch Antenna with Air Cavity at 35 GHz
	9.9 Conclusions
	References
10 Micromachined Metamaterial Inspired Switches
	10.1 Introduction
	10.2 Micromachined Switch Using Capacitive Contacts
		10.2.1 Basic Layout of Capacitive Shunt Switch
		10.2.2 Simulation Results
	10.3 DGS Inspired Micromachined Switch
		10.3.1 DGS Capacitive RF MEMS Switch
	10.4 Metamaterial Inspired Micromachined Switch
		10.4.1 Basic Switch Layout and Analysis
		10.4.2 Shunt Switch with DGS Structures and Overlaid Secondary Switches
	10.5 Casimir Repulsive Force Inspired Micromachined Switch
		10.5.1 Concept of Casimir Effect
		10.5.2 Application of Casimir Effect in RF MEMS Switches
	10.6 Repulsive Casimir Force Inspired Resistive (Metal-to-Metal) Contact Micromachined Switch
	10.7 Casimir Repulsive Force Inspired Capacitive Contact Micromachined Switch
	10.8 Casimir Force Study
	10.9 Conclusions
	References
11 Future Scope of RF MEMS in THz Regime
	11.1 Introduction
	11.2 Micromachined Metamaterial Based Devices in THz Regime
		11.2.1 Micromachined Metamaterial Based Frequency Selective Surface at THz
		11.2.2 Micromachined Metamaterial Based Absorbers at THz
	11.3 2.5D-3D Micromachined Devices at Sub-Millimetre Wave
	11.4 Conclusions
	References
Appendix A Design Data on Micromachined Transmission Lines and Discontinuities
Appendix B Details of Fabrication Process
Index