Microelectromechanical Systems and Devices

00 preface_ Microelectromechanical Systems and Devices......Page 1
Part 1_ BioMEMS Devices......Page 13
01_ Implantable Parylene MEMS RF\rCoil for Epiretinal Prostheses......Page 15
02_ MEMS-Based Microdevice for\rCell Lysis and DNA Extraction......Page 35
03_ MEMS Microfluidics for\rLab-on-a-Chip Applications......Page 51
04_ Acoustic Wave Based MEMS Devices,\rDevelopment and Applications......Page 77
Part 2_ MEMS Characterization and Micromachining......Page 99
05_ MEMS Characterization Based on\rOptical Measuring Methods......Page 101
06_ Surface Characterization and Interfacial\rAdhesion in MEMS Devices......Page 121
07_ Advanced Surfactant-Modified\rWet Anisotropic Etching......Page 143
08_ Macromodels of Micro-Electro-\rMechanical Systems (МEMS)......Page 167
Part 3_ RF and Optical MEMS......Page 203
09_ Dynamics of RF Micro-Mechanical\rCapacitive Shunt Switches\rin Coplanar Waveguide Configuration......Page 205
10_ Characterization and Modeling\rof Charging Effects in Dielectrics\rfor the Actuation of RF MEMS Ohmic\rSeries and Capacitive Shunt Switches......Page 245
11_ Plasma Based Dry Release of MEMS Devices......Page 281
12_ Optical MEMS......Page 303
13_ Optical-Thermal Phenomena in Polycrystalline\rSilicon MEMS During Laser Irradiation......Page 343
Part 4_ MEMS based Actuators......Page 361
14_ Piezoelectric Thick Films:\rPreparation and Characterization......Page 363
15_ Possibilities for Flexible MEMS:\rTake Display Systems as Examples......Page 381
16_ Thermal Microactuators......Page 427
17_ Standalone Tensile Testing of Thin Film\rMaterials for MEMS/NEMS Applications......Page 447
18_ Diamond, Diamond-Like Carbon (DLC) and\rDiamond-Like Nanocomposite (DLN)\rThin Films for MEMS Applications......Page 471