Microactuators, Microsensors and Micromechanisms: MAMM 2020

Preface
Contents
A Novel Planar Two-Axis Leaf-Type Notch Flexure Hinge with Coincident Rotation Axes and Its Application to Micropositioning Stages
	1 Introduction
	2 Design of the Two-Axis Leaf-Type Notch Flexure Hinge
	3 FEM-Based Investigation of the TLNFH
		3.1 FEM Model
		3.2 Parametric Study
		3.3 Discussion of Results
	4 Application to Compliant Micropositioning Stages
		4.1 10-Hinge Rectilinear Stage
		4.2 12-Hinge XY Stage
	5 Conclusions
	References
Characterization of Thin Flexure Hinges for Precision Applications Based on First Eigenfrequency
	1 Introduction
	2 Materials and Methods
		2.1 Experiment
		2.2 Theoretical Approaches
	3 Results and Discussion
	4 Conclusions and Outlook
	References
Optimization of Compliant Path-Generating Mechanisms Based on Non-linear Analytical Modeling
	1 Introduction
	2 Analytical Model
		2.1 Large Deflections of Rod-Like Structures
		2.2 Modeling of Compliant Mechanisms as Continua
	3 Verification of the Analytical Model by FEM Simulation
		3.1 Analytical Solution
		3.2 FEM Simulation
		3.3 Results and Discussion
	4 Analytical Optimization of Example Compliant Path-Generating Mechanisms
	5 Conclusions
	References
Modelling and Investigation of a Compliant Cable-Driven Finger-Like Mechanism
	1 Introduction
	2 Basic Concept of Compliant Cable-Driven Mechanism
	3 Model and Simulation
		3.1 Mechanical Model
		3.2 Mathematical Model
	4 Calculation Results
		4.1 Bending Shapes Without Consideration of Gravity
		4.2 Bending Shapes Under Consideration of Gravity
		4.3 Bending Moment
	5 Experimental Validation of the Model
		5.1 Experimental Setup and Test Procedure
		5.2 Test Results
	6 Conclusions
	References
Reconfigurable Planar Quadrilateral Linkages Based on the Tensegrity Principle
	1 Introduction
	2 Planar Four-Bar Linkages
		2.1 Structural Assembly and Dynamic Modeling
		2.2 Working Space
		2.3 Reconfiguration of Quadrilateral Linkages
	3 Tensegrity-Based Mechanism
		3.1 Structural Topology
		3.2 Mechanical Behavior
		3.3 Reconfiguration of the Mechanism
	4 Conclusion
	References
Parameter Study of Compliant Elements for a Bipedal Robot to Increase Its Walking Efficiency
	1 Introduction
	2 A Model of a Compliant Element
		2.1 Base Model
		2.2 Semicircle
	3 Evaluation and Fitting
		3.1 Fitting
		3.2 Application of CEs in the Robot Model
		3.3 Workflow
		3.4 Results
	4 Conclusion and Outlook
	References
Modeling, Design and Prototyping of a Pantograph-Based Compliant Mechanism
	1 Introduction
	2 Modeling of the Rigid-Body Mechanism
	3 Design of the Compliant Mechanism
		3.1 The 1st Iteration Model
		3.2 The 2nd Iteration Model
		3.3 The 3rd Iteration Model
		3.4 The 4th Iteration Model
	4 Prototyping of the Compliant Mechanism
	5 Conclusion
	References
Wafer Bonding in MEMS Technologies
	1 Introduction
	2 Engineered Substrates
		2.1 High Temperature Semiconductor Wafer Bonding
	3 Wafer Level Capping and Packaging
		3.1 Anodic Wafer Bonding
		3.2 Glass Frit Bonding
		3.3 Low Temperature Direct Bonding
		3.4 Other Wafer Bonding Technologies for MEMS Wafer Level Packaging
	4 Summary
	References
Conceptual Design of a Microscale Balance Based on Force Compensation
	1 Introduction
	2 System Design
	3 Fabrication
	4 A First Approach to Design a PID Controller
		4.1 Continuous Control
		4.2 Time-Discrete Control
		4.3 Comparison of Continuous and Time Discrete PID Controller
	5 Conclusion
	References
Topology Optimization of Magnetoelectric Sensors Using Euler-Bernoulli Beam Theory
	1 Introduction
		1.1 Euler-Bernoulli Theory for Magnetoelectric Sensors
	2 Modified Magnetoelectric Sensor Model
	3 Comparison of Euler Model Against FEM Simulation
	4 Sensor Topology Optimization
	5 Conclusion
	References
MEMS Acoustical Actuators: Principles, Challenges and Perspectives
	1 Introduction
		1.1 Micro-Electro-Mechanical Systems
		1.2 MEMS in Mobile Devices – A Motivation for MEMS Loudspeakers
	2 MEMS Loudspeaker – Actuators for Human Hearing
		2.1 Loudspeaker Requirements for Earphones and Hearing Aids
		2.2 Characterizing MEMS Loudspeakers
		2.3 Controlling MEMS with DSP
	3 Approaches to MEMS Loudspeakers
		3.1 Initial MEMS Loudspeaker Designs
		3.2 Latest MEMS Loudspeaker Designs
	4 New Design Challenges
		4.1 Thermoviscous Acoustics
		4.2 Damping Due to Thermoviscous Losses
		4.3 Thermoviscous Losses in Practice
		4.4 Utilization of Thermoviscous Losses
	5 Conclusion
	References
Synthesis of Micro-robotic Appendages Considering Different Performance Properties
	1 Introduction
	2 Synthesis of MEMS Terrestrial Micro-robotic Appendages
		2.1 Problem Definition
		2.2 Parameterization
		2.3 Optimization and Objective Function
		2.4 Solutions of Micro-robotic Appendages
	3 FEM Based Analysis of Micro-robotic Appendages
	4 Conclusions
	References
Author Index