MEMS Applications in Electronics and Engineering

Cover
Half Title
Title Page
Copyright Page
Contributors
Table of Contents
Chapter 1: Introduction to MEMS Applications in Electronics and Engineering
	REFERENCES
Chapter 2: Scaling Law
	2.1 INTRODUCTION
	2.2 FUNDAMENTALS OF SCALING LAW
	2.3 APPLICATIONS ACROSS DIFFERENT BRANCHES OF SCIENCE
	2.4 CONCLUSION
	REFERENCES
Chapter 3: Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques
	3.1 INTRODUCTION
	3.2 METHODS OF DETECTION
	3.3 APPLICATION OF CANTILEVER-BASED SENSORS
	3.4 RECENT PROGRESS IN FABRICATION IN MEMS DEVICES
	3.5 3D PRINTING IN MEMS
	3.6 CONCLUSION
	REFERENCES
Chapter 4: Recent Trends in CMOS-MEMS Sensors
	4.1 INTRODUCTION
	4.2 CMOS-MEMS DEVICES
	4.3 APPLICATIONS OF CMOS-MEMS DEVICES
	4.4 SHORTCOMINGS OF INTEGRATED CMOS-MEMS DEVICES
	4.5 CONCLUSIONS
	REFERENCES
Chapter 5: Mechanics of Materials Considerations in MEMS-Based Medical Devices
	5.1 INTRODUCTION
	5.2 MEMS PRESSURE TRANSDUCERS
	5.3 MEMS ACCELEROMETERS
	5.4 COMMON MECHANICAL FAILURES ASSOCIATED WITH MEMS DEVICES
	5.5 CONCLUSIONS
	REFERENCES
Chapter 6: Progress in RF MEMS/NEMS Switches
	6.1 INTRODUCTION
	6.2 RF MEMS DEVICE CONFIGURATIONS
	6.3 MULTIPORT SWITCH
	ACKNOWLEDGMENTS
	REFERENCES
Chapter 7: Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress
	7.1 INTRODUCTION
	7.2 OPTICAL COMPONENTS SUITABLE FOR MOEMS/NOEMS
	7.3 BASIC BUILDING BLOCKS OF MOEMS
	7.4 APPLICATIONS USING MOEMS/NOEMS
	7.5 FUTURE DIRECTION FOR MOEMS/NOEMS
	REFERENCES
Chapter 8: Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications
	8.1 INTRODUCTION
	8.2 MICROCANTILEVER (MC) BASED GAS SENSORS
	8.3 MEMS-BASED MICRO-HOT PLATE INTEGRATED METAL OXIDE GAS SENSORS
	8.4 CONCLUSION
	REFERENCES
Chapter 9: MEMS-Based Energy Harvesting Devices: Overview of Recent Progress
	9.1 INTRODUCTION
	9.2 THEORETICAL BACKGROUND
	9.3 BASIC TRANSDUCTION MECHANISMS
	9.4 TRIBOELECTRIC NANOGENERATORS
	9.5 CONCLUSIONS
	REFERENCES
Index