International Progress in Precision Engineering. Proceedings of the 7th International Precision Engineering Seminar, Kobe, Japan, May 1993

Content: 
Front Matter, Page i
Copyright, Page ii
Foreword, Pages xvii-xviii
WELCOME TO KOBE, KANSAI AND JAPAN!, Pages xix-xx
Precision Engineering and its Impact on the Electronics Industry: Past, Present, and Future, Pages 1-10
Limitations of interpolation accuracy in heterodyne interferometry, Pages 11-23
R. Ziegenbein, F. Lüdicke and G. Goch: A New Ultra Precision Instrument for Calibration of Gauges and Measurements of High-Quality Products, Pages 24-27
Correctness of assessment software in coordinate metrology, Pages 28-39
Concept for the Traceability of Measurements with Coordinate Measuring Machines, Pages 40-52
A Six-Degrees of Freedom Fine Motion Mechanism, Pages 53-61
Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution, Pages 62-65
Laser Photo-etching Method for Maskless Fabrication of a Through-Hole Contact (THC) Amorphous Silicon (a-Si) Solar Cell Submodule, Pages 66-77
Plasma CVM (Chemical Vaporization Machining): – A Chemical Machining Method With Equal Performances to Conventional Mechanical Methods from the Sense of Removal Rates and Spatial Resolutions –, Pages 78-87
BROAD ION BEAM PROCESSING OF LARGE SURFACE AREAS WITH NANOMETER PRECISION, Pages 88-99
Principle of Ion Beam Processing and its Application to Fine and Precision Fabrication, Pages 100-112
3-Dimensional Rigid-Plastic FEM Simulation of Chip Formation Process, Pages 113-124
Tools and Tool Setting for Improved Surface Finish in Diamond Turning, Pages 125-133
Electrolytic In-process Dressing (ELID) Grinding for Optical Parts Manufacturing, Pages 134-148
Development of the Ingersoll Octahedral-Hexapod Machine Tool for Five-Axis Metal Cutting, Pages 149-152
Development of an Ultraprecision Grinding Equipment for Ductile Node Surface Finishing of Brittle Materials, Pages 153-164
EXAMINATION AND OPTIMIZATION OF DISPERSION AND HYSTERESIS OF LINEAR AXIS BY MACHINE TOOLS, Pages 165-176
Precision Grinding and Slicing of Si-Wafers, Pages 177-190
Magnetic Linear Bearing: Theory and Experiment, Pages 191-201
State Space Trajectory Tracking Control for Fast Nanometer Positioning, Pages 202-211
Development of Methods for Numerical Error Correction of Machine Tools*, Pages 212-223
The real-time reduction of electronic interpolation errors in precision machine servos., Pages 224-228
Development of an X-ray Telescope in Japan, Pages 229-232
Active Mirror Support System for SUBARU Telescope, Pages 233-244
TOMOHAWK - Recent Advances in Computerised X-ray Tomography using Real-time Radiography Equipment, Pages 245-247
COXI - A Combined Optical and X-ray Interferometer for high precision dimensional metrology, Pages 248-259
The constant force profiler: A hybrid instrument for nanometric surface metrology., Pages 260-264
Development of a Scanning Force Microscope using a Piezoelectric Cantilever, Pages 265-274
Miniature Robots for Ultra Precision Measurement and Machining, Pages 275-289
Bio-Machining of Metals by Bacteria Thiobacillus Ferrooxidans, Pages 290-301
A Precision Bilaminar Resonating Transducer Assembly Tool, Pages 302-313
Application of a Nanometric Resolution Optical Tool Setting System to Aspheric Generation, Pages 314-317
KINEMATIC AND MATHEMATICAL RESEASCH ON THREEPOINT-METHOD FOR IN-PROCESS MEASUREMENT AND ITS APPLICATIONS IN ENGINEERING, Pages 318-328
ORDINAL SPACE AND EVALUATION OF GEOMETRIC FORM FOR PRECISION WORKPIECES, Page 329
RESEARCH ON THE THEORY AND TECHNIQUE OF OMNI—DIRECTIONAL STRAIGHTNESS EVALUATION, Pages 330-340
NEW METHOD OF GEOMETRIC-ERROR EVALUATION(GE), Pages 341-352
The Development of High Accuracy Turning Multiple Measurement and Control System, Pages 353-358
Automatic Linear Measuring System for Line Standard and Step Gage, Pages 359-360
On–Machine Measurement of Form Accuracies Using Two Quadrant Photocells, Pages 361-372
Self-Calibration of Precision Angle Sensors, Pages 373-376
Tilt Effects on Optical Angle Measurements, Pages 377-388
3-DIMENSIONAL COORDINATE MEASUREMENTS BY IMAGE DIGITIZING, Pages 389-397
Development of efficient error calibration system for CMMs using calibrated ring gauges and touch probe, Pages 398-401
Self-Calibration Method for Three Dimensional Coordinate Measuring Machines Using a Ball Plate, Pages 402-413
An Exact and Function Independent Bestfit Algorithm, Applicable to Sculptured Surfaces or to Any Non Regular Surface in Parametric Form, Pages 414-416
AN INSPECTION SYSTEM FOR WIRE BOND BALL DIMENSIONS, Pages 417-428
On Line Simultaneous Measurement of Real Contact Area and Approach of Two Nominally Flat Surfaces Under Load, Pages 429-440
Direct Measurement of Spindle Radial Accuracy by Moiré Topography, Pages 441-450
The Optimum EST-A New Method for On-line Measurement of the Straightness of Precision Machine Tools and Machined Workpiece, Pages 451-459
Study on A Laser Fiber Alignment System and Its Applications, Pages 460-466
Measurement and Control of Straight Motion Accuracy Using Liquid Surface for Absolute Reference, Pages 467-478
Direction Stabilized Laser Beam for Straight Datum, Pages 479-482
3D Topography Representation of Machined Surfaces: A Study on the Integration of Some Characterisation Techniques, Pages 483-486
SPHERICITY NONCONTACT TESTING USING PHASE-SHIFTING INTERFEROMETRY, Pages 487-498
Measurement of the Absolute Refractive Index of Air by Laser Interferometry, Pages 499-502
A Micro Bending Device for Tool Materials, Pages 503-517
A Novel Surface Topography Sensor in the nm Range Based on a Non-Counting Diode Laser Interferometer, Pages 518-529
An Active Parallel Leaf Spring Mechanism with a Long working Range and a High Positioning Resolution, Pages 530-541
An Etched Glass Master and a Photomask for an Optical Disk Substrate, Pages 542-553
Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure, Pages 554-565
A NEW LOW TEMPERATURE FABRICATION TECHNOLOGY OF CERAMIC THIN FILM USING ION BEAM AND ITS APPLICATION, Pages 566-577
ENLARGEMENT OF POLY-SI FILM GRAIN SIZE BY A NEW EXCIMER LASER ANNEALING AND ITS APPLICATION TO HIGH-PERFORMANCE POLY-SI TFT, Pages 578-589
ON THE ORIGIN OF MATERIAL INDUCED VIBRATION IN ULTRAPRECISION MACHINING OF CRYSTALLINE MATERIALS, Pages 590-601
Fundamental Study on Energy Dissipation and Tool Shape in Nanoscale Cutting, Pages 602-610
Study on The Extremely High Compressive Residual Stresses in Machined Layers by Using X-Ray, Pages 611-622
Computer Simulation on Affected-Layer Generation in Grinding, Pages 623-634
Observation of Micro-deformation Behavior of Brittle Materials in Indentation Testings at Sub- μ m Depth: – A Basic Study for Ductile Mode Chip Formation of Brittle Materials –, Pages 635-645
ANALYSIS OF CONTACT LENS MIRROR FINISHING BY DIAMOND TURNING, Pages 646-656
Crystallographic Orientation Analysis on Wear Shape of Single Crystal Diamond Cutting Tool, Pages 657-668
The Influence of Cutting Edge Quality on Workpiece Roughness in Diamond Turning Process, Pages 669-675
EVALUATION OF POLISHED SILICON WAFERS' MICRO-ROUGHNESS BY ATOMIC FORCE MICROSCOPE, Pages 676-683
Formation of Surface Micro-form using Magnetic Super-fine Particles, Pages 684-687
A study on Nano-surface Polishing of Magnetic Disk Substrate, Pages 688-699
Characterization of Process Damaged Layers for Optical Fiber Ends, Pages 700-703
Ductile-Regime Machining of Glassy Carbon, Pages 704-707
ULTRAPRECISION DUCTILE CUTTING OF BRITTLE MATERIALS BY APPLYING ULTRASONIC VIBRATION, Pages 708-718
IMPROVEMENT OF ROTARY ULTRASONIC DEEP HOLE DRILLING OF GLASS CERAMICS - ZERODUR, Pages 719-730
Mechanical Displacement and Removal Mechanisms in Forming and Finishing of Classically Brittle Materials, Pages 731-737
Truing of Super-abrasive Wheels for Form-grinding, Pages 738-747
Ultra High Speed Grinding of the Glass with a Single Point Diamond, Pages 748-751
Study on the Optimum Crowning Both for Tooth Profile and Tooth Trace of Spiral Bevel Gear, Pages 752-760
CHARACTERIZATION OF HIGH PRECISION PARALLEL SPRING TRANSLATORS, Pages 761-772
IMPROVEMENT OF NANO-POSITIONING TOOLHOLDER: — Compensation of Form Error of the Faceplate—, Pages 773-776
Improvement of Thermal Properties of a Hydrostatic Spindle, Pages 777-780
An Active Control of an Externally Pressurized Air Thrust Bearing, Pages 781-792
The Trial Manufacture of high precision rotating Spindle, Pages 793-800
Development of Off-Axis Ellipsoidal Mirrors, Pages 801-812
Ultra-Precision Machining of Oxygen-Free Copper and Aluminium, Pages 813-824
Development of Amendable Machining System and Evaluation of its Performance, Pages 825-836
Perpendicular Guideway Mechanism of Machine Tool: – Improvement of Motion Accuracy by Composite Bearing Guideway–, Pages 837-848
HYSTERESIS EXCLUDE SYSTEM OF LINEAR AXES OF MACHINE TOOLS, Page 849
A Twist-Roller Friction Drive System for Nanometer Positioning, Pages 850-853
Control of a Traction Drive System, Pages 854-857
Control of permanent magnets brushless electrical motors. Performances of an Internal Model Control algorithm, Pages 858-865
A Micro Grooving System for Ultra. Precision Parts, Pages 866-869
Optimal Controller for the Axis Drift in a Precision Boring Bar with Double–Guide Hydraustatic Bearings, Pages 870-879
Accuracy Improvement of Machine Tool by New Function of WORFAC, Pages 880-883
CONTROL OF THE DYNAMICAL BEHAVIOUR OF A MACHINE TOOL WITH NEURAL NETWORKS FOR PRECISION CUTTING, Pages 884-893
DEVELOPMENT OF 3-AXES HANDLING ROBOT SUSPENDED BY ACTIVE MAGNETIC BEARINGS (AMB), Pages 894-897
A DISCUSSION ON THE DYNAMICS OF GEAR NOISE AND THE THEORY OF VIBRATION, Pages 898-908
MEASUREMENT AND TESTING IN MANUFACTURING TECHNOLOGIES BY MEANS OF INDUSTRIAL ROBOTS, Pages 909-921
Para-flex Stage for Wide-range Scanning Tunneling Microscope, Pages 922-925
Precise imaging technique for AFM with ZnO whisker tip, Pages 926-936
High precision three dimensional tip position measurement in Scanning Tunnelling Microscopes, Pages 937-940
Correction of Distorted STM Image by In-Situ Referring Regular Crystalline Lattice, Pages 941-952
Nanometer Straightness Testing Instrument, Pages 953-963
Surface Texture Assessment of Magnetic Rigid Disk and Head Slider for Analyzing Their Contact Mechanics in Nanometer Scale, Pages 964-967
JOINT POSITION ENCODING FOR MICRO ROBOTIC MANIPULATORS, Pages 968-979
Computer Controlled Mask Aligner Using Modified Moire Technique, Pages 980-991
AN ABSOLUTE CAPACITIVE POSITION TRANSDUCER FOR LITHOGRAPHY., Pages 992-1002
Multi-Probe Force Microscope for a Precise Linear Encoder, Pages 1003-1006
Evaluation of the Tracking Pre-Groove of the Optical Memory Disk Stamper by Using Fraunhofer Diffraction Method, Pages 1007-1018
A Tribo-Memory as an Application of Phase-Transformation of Stainless Steel, Pages 1019-1030
DEVELOPMENT OF ULTRAPRECISION POSITIONER BY MEANS OF WALKING DRIVE, Pages 1031-1042
Achievements in manufacturing ultra-precise, complex components using nano - “ductile regime” grinding., Pages 1043-1045
Technical Advances in Process Science Research at the Center for Optics Manufacturing, Pages 1046-1050
A Manufacturing Ribosome Model for Biological-Oriented Manufacturing Systems, Pages 1051-1062
AUTHOR INDEX, Pages 1063-1070