Handbook of Humidity Measurement, Volume 3-Sensing Materials and Technologies

Section i Humidity-Sensitive Materials
Chapter 1 Polymers ……………………………………………………………………………………………………………………………………………… 3
Chapter 2 Metal Oxide in Humidity Sensors …………………………………………………………………………………………………………. 23
Chapter 3 Al2O3 as a Humidity-Sensitive Material ………………………………………………………………………………………………… 35
Chapter 4 Carbon-Based Materials ………………………………………………………………………………………………………………………. 51
Chapter 5 Semiconductor-Based Humidity Sensors ……………………………………………………………………………………………….. 91
Chapter 6 Porous Silicon …………………………………………………………………………………………………………………………………… 109
Chapter 7 Mesoporous Silica and Its Prospects for Humidity Sensor Application …………………………………………………… 139
Chapter 8 Aluminosilicate (Zeolites)-Based Humidity Sensors ……………………………………………………………………………. 151
Chapter 9 Metal Phosphate-Based Humidity Sensitive Materials ………………………………………………………………………….. 163
Chapter 10 Black Phosphorus and Phosphorene-Based Humidity Sensors ………………………………………………………………..171
Chapter 11 Metal-Organic Framework-Based Humidity Sensors ……………………………………………………………………………. 187
Chapter 12 Supramolecular Materials …………………………………………………………………………………………………………………. 209
Chapter 13 Biomaterials as Sensing Elements of Humidity Sensors ……………………………………………………………………….. 223
Section ii Sensor technologies and Related Materials
Chapter 14 Substrates and Electrodes in Humidity Sensors …………………………………………………………………………………… 229
Chapter 15 Fundamentals of Microfabrication Technologies………………………………………………………………………………….. 
Chapter 16 Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication ……………………………… 263
Chapter 17 Platforms and Materials for QCM and SAW-Based Humidity Sensors …………………………………………………… 271
Chapter 18 Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ………………………. 281
Chapter 19 Polymer Technologies ………………………………………………………………………………………………………………………. 305
Chapter 20 Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ……………………………………………………. 339
Chapter 27 Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings …………………………….. 445
Chapter 28 Market of Electronic Humidity Sensors ……………………………………………………………………………………………… 453