Foundations of Molecular-Flow Networks for Vacuum System Analysis

FOUNDATIONS OF MOLECULAR-FLOW NETWORKS FOR VACUUM SYSTEM ANALYSIS
Copyright
Biography
	Profile of author
	Books by Nagamitsu Yoshimura
Preface
	Introduction
Acknowledgments
1 . Physical basis of molecular-flow networks: adsorption, desorption, diffusion, and outgassing/pumping
	Key-point
	Keywords
		1. Introduction
		2. Modeling of outgassing
		3. Pressure analysis using equivalent vacuum circuit
		4. Conclusion
		References in the paper[1-1]
		Reviewed paper
		Reviewed paper
		1. Introduction
		2. Characteristic values of a solid material as a gas source
		3. Differential pressure-rise method
			A Principle
			B Measurement of net outgassing rates of solid materials
			C Estimation of the characteristic values PX and K0 of Viton O-rings
		4. Vacuum circuit composed of the characteristic values of constituent elements
		5. Conclusion
		References in the paper[1-3]
		Reviewed paper
		2. Degassing time at constant temperature
		3. Outgassing rate with variable temperature
		References in the paper[1-4]
		Reviewed paper
		2. Analysis
		4. First pump-down
		5. Second pump-down
		6. Summary
		References in the paper[1-5]
		Reviewed paper
2 . Applications of the resistor-network simulation method to complicated ultrahigh vacuum systems
	Key-point
	Keywords
		[1] Resistor network simulation method
		[2] Long history of works on molecular-flow networks
		1. Introduction
		2. Concept of a vacuum system
			A New concept of a vacuum system and its components
		3. Simulation of the high vacuum system of an electron microscope
			A Procedures to design a simulator circuit
			B The simulator circuit
			C Application results
		4. Discussion
		5. Summary
	Acknowledgments
		References in the paper [1-1]
		Reviewed paper
		1. Introduction
		2. Linear vacuum circuit
		5. Application to practical high vacuum systems
			A Pressure distribution along an outgassing pipe
			B Pressure distribution in an electron microscope high vacuum system
		6. Conclusion
		References in the paper[1-2]
		Reviewed paper
		4. Pressure distribution in a complex-chambers-system with homogeneous walls
		Reviewed paper
		References in the paper [2-1]
		Reviewed paper
		Introduction
		1. Equivalent Networks
		References in the paper[2-2]
		Reviewed paper
		Reviewed paper
		References in the paper[2-4]
		Reviewed paper
		Reviewed paper
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		2. Model
			A Transformation rules
		References in the paper [2-7]
		Reviewed paper
		2. Vacuum pump and conduit pipe as a network component
		3. Kirchhoff’s law in a network of vacuum components
		Reviewed papers
		5. Electrical analogues
		6. Discussion
		References in the paper[2-9]
		Reviewed paper
1 . Methods for measuring outgassing rates
	Key-point
	Keywords
		2. Principle of the differential pressure-rise method
			Method 1
			Method 2
			Measurement of pumping speed of a B-A gauge
		Reviewed paper
		1. Introduction
		2. Three-point-pressure method
			A Principle
			B Optimization of the measuring system
			C Measurement of gas flow rates
		3. Discussion
		4. Conclusion
		Appendix
		References in the paper[1-2]
		Reviewed paper
		1. Introduction
		2. Two-point pressure method
			A Principle
			B Measurement of the outgassing rate
			C Validity of the one-point pressure method
		3. Measurement by the orifice method
		4. Discussion and conclusions
			How to calibrate the relative sensitivities between the vacuum-gauges
		References in the paper[1-3]
		Reviewed paper
		Reviewed paper
2 . Molecular-flow conductance
	Key-point
	Keywords
		Quoted book
		Reviewed paper
		Reviewed paper
3 . Total and partial pressure gauges for ultrahigh-vacuum use
	Key-point
	Keywords
		[1] Bayard-Alpert gauge and extractor gauge
		[2] Partial pressure gauges
		4. Summary and conclusion
		References in the paper[1-1]
		Reviewed paper
		4. The extractor gauge
		5. Comparison of pressure indicators between Bayard-Alpert gauge and extractor gauge
		References in the paper[1-2]
		Reviewed paper
		2. Experiment
		References in the paper[1-3]
		Reviewed paper
		Reviewed paper
		3. Current PPAs (partial pressure analyzers)
			A Magnetic sector
			B Quadrupole (monopole)
		References in the paper[2-1]
		Reviewed paper
		11. Calibration
		12. Conclusions
		References in the paper[2-2]
		Reviewed paper
Index