Electron energy loss spectroscopy

Cover......Page 1
Half Title......Page 2
Title Page......Page 4
Copyright Page......Page 5
Table of Contents......Page 6
Abbreviations......Page 10
Preface......Page 12
Acknowledgements......Page 13
 What is EELS?......Page 14
 Interaction of electrons with matter......Page 15
 Basics of the TEM......Page 30
 Comparison of EELS in TEM with other spectroscopies......Page 33
 References......Page 38
 Historical development......Page 40
 Basic components of an EEL spectrum......Page 42
 Basic physics......Page 45
 Summary of analytical uses......Page 49
 References......Page 50
 The electron spectrometer......Page 52
 Coupling a magnetic spectrometer to the microscope......Page 55
 Spectral recording......Page 57
 Energy-filtered imaging......Page 62
 Choice of experimental conditions for EELS......Page 64
 Specimen parameters......Page 69
 Summary of experimental set-up and data acquisition procedures for EELS......Page 70
 References and further reading......Page 71
 Quantification of sample thickness......Page 72
 Quantitative aspects of low loss data......Page 74
 Experimental aspects of EELS low loss measurements......Page 79
 References and further reading......Page 80
 Quantification of EEL spectra......Page 82
 Background removal......Page 83
 Determination of the ionization cross-section......Page 85
 Final quantification step......Page 88
 Summary of experimental quantification parameters......Page 89
 Accuracy and detection sensitivity of EELS quantification and comparison with EDX in the TEM......Page 90
 References and further reading......Page 91
 Origin of edge fine structure......Page 92
 Determination of coordinations......Page 97
 Determination of valencies......Page 101
 Determination of bond lengths......Page 104
 Experimental aspects of ELNES/EXELFS measurements......Page 106
 References and further reading......Page 108
 Introduction to EELS imaging and energy filtering......Page 110
 Summary of energy-filtering techniques......Page 112
 Procedure for EFTEM elemental mapping......Page 114
 Experimental parameters in EFTEM......Page 117
 General strategy for EFTEM elemental analysis......Page 122
 Experimental procedure for EFTEM image acquisition and processing......Page 123
 Comparison of EFTEM and spectrum imaging methods......Page 124
 Energy-filtered tomography......Page 125
 References and further reading......Page 126
 Orientation dependency in EELS......Page 128
 Spatially resolved measurements......Page 131
 Electron Compton scattering......Page 138
 Reflection mode and surface measurements......Page 139
 References and further reading......Page 140
 Further reading......Page 142
 Further resources......Page 143
Index......Page 146