Biosensing with Silicon: Fabrication and Miniaturization of Electrochemical and Cantilever Sensors (SpringerBriefs in Materials)

Preface
Acknowledgements
Contents
1 Introduction
	1.1 Biosensor
	1.2 Silicon Biosensors
	1.3 Electrochemical Biosensors
	1.4 Microcantilever Biosensors
	1.5 Triglyceride Sensors
	1.6 Urea Sensor
	References
2 Technology/Nuts and Bolts
	2.1 Unit Processes
		2.1.1 Oxidation
		2.1.2 Doping
		2.1.3 Lithography
		2.1.4 Chemical Vapour Deposition (CVD) Processes
		2.1.5 Etching Wet/Dry
		2.1.6 Silicon Wet Etching
	2.2 Micromachining
	2.3 Characterisation
	2.4 Surface Functionalization
	References
3 Electrolyte Insulator Semiconductor Capacitor (EISCAP) Biosensor
	3.1 Principle of Operation
	3.2 Fabrication of Sensors
	3.3 Calibration and Measurements
	3.4 Biosensor
		3.4.1 Triglyceride Sensor
		3.4.2 Triglyceride Estimation in Blood Serum
	3.5 Urea Sensor
		3.5.1 Measurement of Urea in Blood Serum
		3.5.2 Measurement of Urea in Milk
	3.6 Miniaturised EISCAP
		3.6.1 Optimisation of Mini-EISCAPs
	3.7 Mini-EISCAP Triglyceride (TG) Sensor
	3.8 Summary
	References
4 Readout Circuit and Measurement Protocol for Mini-EISCAPs
	4.1 Principle of Flat-Band Voltage Measurement
	4.2 Measurement of pH
	4.3 System-On-Chip Implementation
		4.3.1 Measurement of pH
	4.4 Readout Protocol for Estimating TG with EISCAP
	4.5 Measurement of TG with Mini-EISCAP
	References
5 Cantilever Sensors for Triglycerides and Urea
	5.1 Cantilevers as Sensors
	5.2 Sensing Methods
	5.3 Detection of Triglycerides (TG) Using Microcantilevers
	5.4 Sensitivity and Reliability for Measurements in Liquids
		5.4.1 Frequency Sweep and Spurious Modes
		5.4.2 PLL Tracking
	5.5 Improving the Sensitivity
		5.5.1 Fabrication of Thin Polysilicon Cantilevers
	5.6 Detection of Triglycerides Using LDV
	5.7 Urea Sensor
	5.8 Conclusion
	References
6 Conclusion
	References