Amorphous and Crystalline Silicon Carbide II: Recent Developments Proceedings of the 2nd International Conference, Santa Clara, CA, December 15—16, 1988

Front Matter....Pages I-X
Front Matter....Pages 1-1
Crystalline SiC on Si and High Temperature Operational Devices....Pages 2-7
Heteroepitaxial Growth of Cubic SiC on a Si Substrate Using the Si 2 H 6 -C 2 H 2 -H 2 System....Pages 8-13
Chemical Vapor Deposition of Single Crystal β-SiC....Pages 14-19
β-Silicon Carbide Prepared by Rapid Thermal Chemical Vapor Deposition....Pages 20-25
Single Crystal Growth of 6H-SiC by a Vacuum Sublimation Method, and Blue LEDs....Pages 26-34
Polytype Change of Silicon Carbide at High Temperatures....Pages 35-39
Epitaxial Growth of (SiC) X Ge 1-x on Silicon Substrates....Pages 40-41
One-Dimensional Fluid Mechanics/Kinetics Modeling of the CVD of SiC in a Vertical Reactor....Pages 42-42
Front Matter....Pages 43-43
Properties of a-SiC:H Films Prepared with a Field-Enhanced RF Glow-Discharge System Field-Enhanced RF Glow-Discharge System....Pages 44-48
Preparation of Microcrystalline Silicon Carbide Thin Films for the Emitter of Si HBTs....Pages 49-53
High-Quality Microcrystalline SiC Films Fabricated by the Controlled Plasma Magnetron Method....Pages 54-59
Electron-Cyclotron-Resonance Plasma Deposition of Carbon onto Silicon....Pages 60-65
Preparation and Characterization of Amorphous SiC Film by a Liquid Route....Pages 66-71
Front Matter....Pages 73-73
Gap States of Highly Photosensitive a-SiC:H....Pages 74-79
X-Ray Photoelectron Spectroscopy Study of Hydrogenated Amorphous Silicon Carbide Films....Pages 80-84
Doping-Induced Structural Change in Amorphous Silicon (Carbon) Hydrogen Alloy....Pages 85-88
Small Angle X-Ray Scattering from Microvoids in the a-SiC:H Alloy....Pages 89-93
Studies on Carrier Lifetime and Deep Levels in CVD-Grown 3C-SiC by Photoconductivity and Microwave Absorption....Pages 94-99
ESR Study of Defects in Epitaxially Grown 3C-SiC....Pages 100-105
Time-Resolved Photoluminescence Studies of Undoped and Al-Doped Cubic SiC....Pages 106-111
Front Matter....Pages 73-73
Photoluminescence Imaging of Spatial Distribution of Recombination Centers in Cubic SiC....Pages 112-117
Stress-Induced Defects vs Growth Faults in CVD-Grown SiC....Pages 118-118
Crystalline Defects in β-SiC as Revealed by a NaOH-KOH Eutectic Etch....Pages 119-124
Ellipsometric Study of Cubic SiC....Pages 125-125
Photoluminescence and Transmission Electron Microscopy of Defects in SiC Grown on Si....Pages 126-126
Vibrational and Electrical Properties of n and p Doped a-SiC:H Films....Pages 127-127
Front Matter....Pages 129-129
Current Status of Diamond Thin Films....Pages 130-134
New Material and Device Design Considerations for High-Power Electronics....Pages 135-142
Active and Passive Electronic Applications of CVD Diamond Films....Pages 143-143
Front Matter....Pages 145-145
Surface and Interface Studies of SiC(Buffer-Layer)/Si(100)....Pages 146-151
The Influence of Hydrogen on the Transition from Amorphous to Crystalline Structure in Plasma Deposition of Silicon and Alloys....Pages 152-152
Microstructure of the a-Si 1-x C x :H/c-Si Interface....Pages 153-156
Atomic Layer Control in Cubic SiC Growth Utilizing Surface Superstructure in Gas Source MBE....Pages 157-161
On the Stability of a Cr + C Phase on (100) 3C SiC at Elevated Temperatures....Pages 162-162
Front Matter....Pages 163-163
Physics and Applications of Amorphous Silicon Carbide....Pages 164-170
β-SiC on Titanium Carbide for Solid State Devices....Pages 171-177
Fabrication of MOSFETs on β-SiC Single Crystalline Layers Grown on Si(100) Substrates....Pages 178-183
A High Transconductance β-SiC Buried-Gate Junction Field Effect Transistor....Pages 184-190
SiC as a Potential FET Gate Insulator....Pages 191-197
Applications of High Purity SiC Prepared by Chemical Vapor Deposition....Pages 198-206
Front Matter....Pages 163-163
SiC/Si HBT Using Polycrystalline SiC Layers Prepared by Electron Beam Evaporation....Pages 207-211
Thin Film Transistors Using Polycrystalline SiC....Pages 212-216
Mechanisms in Reactive Ion Etching of Silicon Carbide Thin Films....Pages 217-223
W/SiC Contact Resistance at Elevated Temperatures....Pages 224-228
Application of Excimer Laser Processing in SiC Device Fabrication....Pages 229-229
Back Matter....Pages 231-232