Accuracy Enhancement Technologies for Micromachining Processes (Lecture Notes in Mechanical Engineering)

Preface
Acknowledgements
Contents
Editors and Contributors
Accuracy Improvement in Tool-Based Micromachining
	1 Introduction
		1.1 Accuracy Improvement
	2 Tool-Based Micromachining
		2.1 Micro Turning
		2.2 Micro Drilling
		2.3 Micro Milling
	3 Process Criteria
	4 Cutting Tool
		4.1 Tool Fabrication
		4.2 Tool Geometry
		4.3 Tool Wear
		4.4 Coating of Tool
		4.5 Tool Deflection and Failure
	5 Machining Parameters
		5.1 Built-Up Edge Effects
		5.2 Cutting Temperature
		5.3 Cutting Fluids
	6 Workpiece Characteristics
		6.1 Material Structure
	7 Cutting Phenomenon
		7.1 Size Effect
		7.2 Cutting Force
		7.3 Heat Generation
		7.4 Burr Formation
	8 Plant Factors
	9 Machine Tool Characteristics
		9.1 Position Measurement and Process Monitoring
		9.2 Vibration
	10 Current and Future Challenges
		10.1 Future Challenge
	References
Strategies for Improving Performance of Ultrasonic Micromachining Process
	1 Introduction
	2 Basic Principle of Ultrasonic Micromachining (USMM) Process
	3 Types of Ultrasonic Micromachining (USMM) Process
		3.1 Stationary Ultrasonic Micromachining (USMM)
		3.2 Rotary Ultrasonic Micromachining (RUSMM)
	4 Strategies for Development of Ultrasonic Micromachining (USMM) System for Performance Improvement
		4.1 Strategies for Stationary Ultrasonic Micromachining (USMM)
		4.2 Strategies for Rotary Ultrasonic Micromachining (RUSMM)
	5 Mode of Operation of Ultrasonic Micromachining (USMM)
		5.1 USMM with Tool Vibration
		5.2 USMM with Workpiece Vibration
	6 Elements of USMM System
		6.1 Power Supply
		6.2 Transducer
		6.3 Horn
		6.4 Abrasive Slurry
		6.5 Micro-Tool
		6.6 Workpiece
	7 Improvement in Machining Rate of Ultrasonic Micromachining (USMM)
		7.1 Stationary Ultrasonic Micromachining (USMM)
		7.2 Rotary Ultrasonic Micromachining (RUSMM)
	8 Improvement in Geometrical Features of Ultrasonic Micromachining (USMM)
		8.1 Stationary Ultrasonic Micromachining (USMM)
		8.2 Rotary Ultrasonic Micromachining (RUSMM)
	9 Future Scope of Research
	10 Summary
	References
Accuracy Improvement and Precision Measurement on Micro-EDM
	1 Introduction
	2 Process Mechanism of Micro Electrical Discharge Machining (µEDM)
		2.1 Machining Parameters
		2.2 Machine Setup Parameters
	3 Different Variants of Micro Electrical Discharge Machining
		3.1 Micro Wire Electrical Discharge Grinding (µWEDG)
		3.2 Block Micro Electrical Discharge Grinding (B-µEDG)
		3.3 Micro Electrical Discharge Drilling (µED-Drilling)
		3.4 Reverse Micro Electrical Discharge Machining (R-µEDM)
		3.5 Drilling with in Situ Fabricated Tool
		3.6 Micro Electrical Discharge Milling (µED-Milling)
	4 Dimensional Accuracy and Precision Measurement
		4.1 Micro-rods
		4.2 Micro Holes
		4.3 Micro Slots
	5 State of the Art of µEDM
		5.1 Micro Wire Electrical Discharge Grinding (µWEDG)
		5.2 Block Micro Electrical Discharge Machining (B-µEDG)
		5.3 Micro Electrical Discharge Drilling (µED-Drilling)
		5.4 Reverse Micro Electrical Discharging Machining (R-µEDM)
		5.5 Drilling with In Situ Fabricated Tool
		5.6 Micro Electrical Discharge Milling (µED-Milling)
	6 Summary
	References
Improvement of Profile Accuracy in WEDM—A Novel Technique
	1 Introduction
	2 Wire Deflection and Its Impact on Workpiece Accuracy
	3 Development of a New Method for Determination of WireLag and Gap Force
	4 Summary
	References
Laser-based Fabrication of Micro-channels
	1 Introduction
	2 Fabrication of Micro-channels
	3 Laser-based Fabrication of Micro-channels
		3.1 Overview and Process Fundamentals
		3.2 Improvement of Quality and Accuracy
	4 Underwater Laser Micro-channeling
		4.1 Overview and Process Fundamentals
		4.2 Improvement of Quality and Accuracy
		4.3 An Experimental Case Study
	5 Summary
	References
Pulsed Nd:YAG Laser Cutting: Accuracy Improvement and Parametric Influences
	1 Introduction
	2 Pulsed Nd:YAG Laser
		2.1 Process and Performance Parameters
	3 Pulsed Nd:YAG Laser Cutting of Metals
	4 Pulsed Nd:YAG Laser Cutting of Non-metals
	5 Pulsed Nd:YAG Laser Cutting of Composites
	6 Applications of Artificial Intelligence in Pulsed Nd:YAG Laser Cutting
	7 Summary
	References
Improvement in Surface Finish and Geometrical Accuracy by Laser Micro-turning
	1 Introduction
	2 Problems of Micro-turning of Ceramics
	3 Laser Micro-turning Process
	4 Materials, Machine, Method and Measurement Schemes
	5 Results and Discussion
		5.1 Investigation of Overlap Factors on Performance Criteria
		5.2 Investigation of Laser Defocusing on Machining Performance
	6 Assessments of Machined Images Taken in Precision Microscope
	7 Summary
	References
Accuracy Improvement Techniques in Electrochemical Micromachining (EMM)
	1 Introduction
	2 Design of Microtools
	3 Electrolyte Circulation
	4 Microtool Insulation
	5 Microsparks Phenomena in EMM
	6 IEG Control Strategy
	7 Machining Strategy
	8 Selection of Combined Process Parameters
	9 Hybrid EMM Processes
	10 Summary
	References
Surface Micromachining—Advances and Advanced Characterization Techniques
	1 Introduction
	2 Photolithography
		2.1 Accuracy Enhancement in Photolithography
		2.2 Applications of Photolithography
	3 Reactive Ion Etching
		3.1 Accuracy Enhancement in Reactive Ion Etching
		3.2 Applications of Reactive Ion Etching
	4 Deep Reactive Ion Etching Process
		4.1 Accuracy Enhancement of DRIE
		4.2 Applications of Deep Reactive Ion Etching
	5 Focused Ion Beam Fabrication
		5.1 Accuracy Enhancement in FIB
		5.2 Applications of FIB
	6 Electron Beam Lithography
		6.1 Accuracy Enhancement in EBL
		6.2 Applications of EBL
	7 Advanced Characterization Methods
		7.1 Stereo Zoom Microscope
		7.2 Scanning Electron Microscopy
		7.3 Scanning Tunneling Microscopy
	8 Summary
	References
Generation of Nano-Level Surface Finish by Advanced Nano-Finishing Processes
	1 Introduction
	2 Abrasive Flow Finishing (AFF)
	3 Elastic Emission Finishing (EEF)
	4 Magnetic Abrasive Finishing (MAF)
	5 Magnetorheological Finishing (MRF)
		5.1 Magnetorheological Abrasive Flow Finishing (MRAFF)
		5.2 Ball End MR Finishing (MRF) Process
		5.3 Magnetic Field-Assisted Finishing (MFAF) Process
	6 Chemical Mechanical Polishing (CMP) Process
	7 Summary
	References