A User's Guide to Ellipsometry

Content: 
Front Matter, Page iii
Copyright, Page iv
Preface, Pages xiii-xv
Chapter 1 - Theoretical Aspects, Pages 1-18
Chapter 2 - Instrumentation, Pages 19-34
Chapter 3 - Using Optical Parameters to Determine Material Properties, Pages 35-50
Chapter 4 - Determining Optical Parameters for Inaccessible Substrates and Unknown Films, Pages 51-64
Chapter 5 - Extremely Thin Films, Pages 65-81
Chapter 6 - The Special Case of Polysilicon, Pages 82-94
Chapter 7 - The Effect of Roughness, Pages 95-106
INTRODUCTION TO CASE STUDIES, Page 107
Case 1 - Dissolution and Swelling of Thin Polymer Films, Pages 109-118
Case 2 - Ion Beam Interaction with Silicon, Pages 119-126
Case 3 - Dry Oxidation of Metals, Pages 127-134
Case 4 - Optical Properties of Sputtered Chromium Suboxide Thin Films, Pages 135-138
Case 5 - Ion-Assisted Film Growth of Zirconium Dioxide, Pages 139-141
Case 6 - Electrochemical / Ellipsometric Studies of Oxides on Metals, Pages 142-159
Case 7 - Amorphous Hydrogenated Carbon Films, Pages 160-167
Case 8 - Fluoropolymer Films on Silicon from Reactive Ion Etching, Pages 168-179
Case 9 - Various Films on InP, Pages 180-185
Case 10 - Benzotriazole and Benzimidazole on Copper, Pages 186-195
Case 11 - Adsorption on Metal Surfaces, Pages 196-212
Case 12 - Silicon-Germanium Thin Films, Pages 213-216
Case 13 - Profiling of HgCdTe, Pages 217-220
Case 14 - Oxides and Nitrides of Silicon, Pages 221-229
APPENDIX A - Del/Psi Trajectory Calculations, Pages 233-245
APPENDIX B - Effective Medium Considerations, Pages 246-252
APPENDIX C - Literature Values of Optical Constants of Various Materials, Pages 253-256
INDEX, Pages 257-260