Vacuum Technology: Practice for Scientific Instruments

Contents......Page 7
1. Designing of Evacuation Systems......Page 11
Pumping-down Characteristics......Page 12
Roughing System......Page 13
Backstreaming of RP Oil Vapor......Page 14
Backstreaming of DP Oil Vapor......Page 16
Overload in High-Vacuum Evacuation Systems......Page 18
DP In-Series System......Page 24
UltrahighVacuum Electron Microscopes......Page 37
Know-how Technology in Designing UHV Evacuation Systems......Page 41
References......Page 42
Mechanical Pumps......Page 45
Diffusion Pumps......Page 48
Turbomolecular Pumps......Page 51
Dry Vacuum Pumps......Page 55
Cryopumps......Page 61
Vapor Pressures for Gases......Page 65
Sputter Ion Pumps......Page 66
Noble Pumps for Inert Gases......Page 70
Titanium-Sublimation Pumps......Page 78
Non-Evaporable Getter (NEG) Pumps......Page 79
Orifice Method......Page 80
Three-Gauge Method (Pipe Method)......Page 81
Three-Point Pressure Method (3PP Method)......Page 82
References......Page 86
Conventional Calculation of System Pressures......Page 95
Basic Concept of Vacuum Circuits......Page 97
Designing of Vacuum Circuits......Page 99
Resistor-Network Simulation Method......Page 101
Matrix Calculation of Pressures......Page 104
Conductance......Page 118
Transmission Probability......Page 119
3C Gas-Flow Patterns......Page 127
References......Page 129
Process of Outgassing......Page 132
Diffusion......Page 133
Recombination-limited Outgassing......Page 143
Stainless Steel......Page 145
Electro-polishing and Vacuum Firing......Page 146
Aluminum Alloy, Copper and Titanium......Page 156
Permeation Through Elastomer Seals......Page 157
Evaporation......Page 165
Methods for Measuring Outgassing Rates......Page 166
Differential Pressure-rise Method [4-41]......Page 168
Variable Conductance Method [4-43]......Page 170
Conductance Modulation Method [4-44]......Page 173
Two-Point Pressure Method and One-Point Pressure Method [4-45]......Page 176
References......Page 177
5. Phenomena Induced by Electron Irradiation......Page 184
5A Electron/Photon Stimulated Desorption (ESD/PSD)......Page 185
Transport of Hydrocarbon Molecules in High Vacuum......Page 191
Transport of Hydrocarbon Molecules in Ultrahigh Vacuum......Page 194
Materials to be Polymerized by Electron Beam Irradiation......Page 201
5C Darkening in Secondary Electron Images in SEM......Page 204
5D Etching of Carbonaceous Specimens......Page 207
References......Page 208
6. Vacuum Gauges......Page 213
Capacitance Manometer......Page 215
Pirani Gauge......Page 217
Spinning Rotor Gauge......Page 219
Crystal Oscillation Gauge......Page 222
Penning Gauge......Page 225
Sputter Ion Pump as a Pressure Indicator......Page 228
Bayard-Alpert Ionization Gauge......Page 229
Extractor Gauge......Page 236
Hot-Cathode Magnetron Ionization Gauge......Page 239
Cold-Cathode Ionization Gauge for UHV......Page 240
Magnetic Sector [6-24]......Page 242
Quadrupole Mass-Filter [6-24]......Page 244
Mass Spectra Cracking Patterns......Page 246
Outgassing from Ionization Gauges with Incandescent Filaments......Page 247
Gas Species Emitted from Ionization Gauges with Incandescent Filaments......Page 252
New Gauges for Measuring Extreme High Vacuum......Page 255
References......Page 265
7. Microdischarges in High Vacuum......Page 272
Charging of Dielectric Surfaces......Page 273
Gas Molecules on Insulator Surfaces......Page 282
Triple Junction......Page 285
Surface Flashover in SF[sub(6)] Gas......Page 287
Review......Page 288
Anode-Initiation Mechanism......Page 289
Ion-Exchange Process and Total-Voltage Effect......Page 293
Gas Molecules on Electrode Surfaces......Page 298
Ar-Glow Conditioning......Page 299
High-Voltage Conditioning (HVC)......Page 300
Conditioning Effect......Page 301
References......Page 303
Keywords......Page 307
Characteristics......Page 310
Remolding......Page 312
Emission Noise......Page 318
Build-up Treatment......Page 323
FE-Initiated Vacuum Arc......Page 324
Morphological Changes of Tip......Page 326
FE-Related Technology......Page 327
Review......Page 330
Characteristics......Page 331
Surface Geometry......Page 332
Properties......Page 335
Characteristics......Page 338
Mounting Methods......Page 339
Material Loss......Page 344
Review......Page 346
References......Page 347
C......Page 351
D......Page 352
F......Page 353
K......Page 354
N......Page 355
P......Page 356
S......Page 357
T......Page 358
Z......Page 359