Vacuum Deposition onto Webs, Films, and Foils

VACUUM DEPOSITION ONTO WEBS, FILMS, AND FOILS......Page 8
Contents......Page 10
Preface......Page 20
Acknowledgments......Page 22
PART 1 VACUUM BASICS......Page 24
1 Vacuum, What It Is and Why It Can Be Useful......Page 26
2 Products Using Vacuum Deposited Coatings......Page 36
3 Pressure Measurement......Page 76
4 Pumping......Page 86
5 Process Diagnostics and Coating Characteristics......Page 104
6 Leaks,Water Vapor, and Leak Testing......Page 138
7 Mass Spectrometers, Helium Leak Detectors, and Residual Gas Analyzers......Page 146
PART 2 SUBSTRATES, SURFACE MODIFICATION, AND NUCLEATION......Page 154
8 Substrates—Surface Quality,Cleaning—Adhesion and Adhesion Testing......Page 156
9 Surface Treatment of Webs and Foils......Page 200
10 Nucleation, Coalescence, and Film Growth......Page 228
PART 3 PROCESS......Page 248
11 The DC Glow Dischargeor Plasma......Page 250
12 Electron Beam (E-Beam) Evaporation......Page 262
13 Thermal Evaporation......Page 274
14 Radiant Heated and Induction-Heated Sources......Page 298
15 Chemical Vapor Deposition/Polymerization onto Webs......Page 308
16 Planar Magnetron Sputtering—Source Design and Operation......Page 320
17 Planar Magnetron Design Options......Page 348
18 Reactive Sputter Deposition—Setup and Control......Page 358
PART 4 SYSTEM ISSUES......Page 372
19 Machine Specification and Build Issues—Risk Analysis—Process......Page 374
20 Heat Load on the Webs/Foils......Page 384
21 Process Variables......Page 394
22 Mechanical Design......Page 408
23 Winding Webs in Vacuum......Page 418
24 Metallizer Machine BuildingTrends......Page 434
25 System Design......Page 440
26 Hazards......Page 450
27 Troubleshooting......Page 462
28 Final Thoughts......Page 482
Index......Page 484