Towards Synthesis of Micro-/Nano-systems: The 11th International Conference on Precision Engineering (ICPE) August 16–18, 2006, Tokyo, Japan

Merging Technologies for Optics....Pages 1-9
Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth....Pages 11-19
Microsystem Technologies for Automotive Applications....Pages 21-27
Study on Manufacturing Method to Reduce Cogging Torque of Motor with Separate Core....Pages 95-100
A High Power and Precision Ultrasonic Linear Motor with Lateral Flexible Supports....Pages 101-106
A Precise Motion Measurement of a Miniature Robot Driven by the Deformation of Piezoelectric Actuators....Pages 107-112
Development of IVUS (Intravascular Ultrasound) Driven by Ultrasonic Micromotor —Principle of Drive and Detection Methods—....Pages 113-116
Development of Membrane Driven Micropump —Principle of Microbubble Driving Mechanism and Prototype—....Pages 117-120
A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators....Pages 121-126
System Concept and Innovative Component Design for Ultra-Precision Assembly Processes....Pages 29-34
Development of a Design Tool for Machine Tools Combining Conceptual Design Support and Detail Design Method....Pages 35-40
Precision Contouring Control of Multi-Axis Feed Drive Systems....Pages 41-46
Areal Gear Flank Description as a Requirement for Optical Gear Metrology....Pages 47-52
Detecting Perturbation Occurrence during Walking....Pages 53-57
Supporting the Reuse of Parts Based on Operation Histories of Products and Preference of Consumers....Pages 59-63
Multi-objective Reactive Scheduling Based on Genetic Algorithm....Pages 65-70
Ultraprecision Wide-angle Profile Measurement with Air-bearing Cylinder Slant Probes....Pages 71-76
Development of a Laser-Guided Deep-Hole Measuring System: Autocollimation System....Pages 77-82
Development of an Optical Measuring Device for Rotation Accuracy of Micro-Spindle —Application to Measurements of a High-Speed Spindle—....Pages 83-88
Laser Interferometric Measurement of Involute Profile by Rolling of Artifact....Pages 89-93
Selective Anodising Technologies for Obtaining Translucent Micro Structures....Pages 175-179
Development of Rectangular Microblasting Nozzle....Pages 181-186
Thick SU-8 Mask for Micro Channeling of Glass by using Micro Abrasive Jet Machining....Pages 187-190
Fabrication of Self-assembled Microstructure using Controlled Liquid Spreading on Textured Surface....Pages 191-196
Improving Performance of Direct Photosynthetic/Metabolic Micro Bio Fuel Cell (DPBFC) by Gene Manipulation of Bacteria....Pages 197-201
Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to Nano-Structuring Process....Pages 203-207
Investigation on Fabricating 3D Structures Using Inkjet Printing Technology....Pages 209-213
Miniaturization of Dot Pattern by Metal Forming for Direct Marking of 2D Barcode Symbols....Pages 215-219
Active Damping of a Wafer Loading Robot using Piezoceramic Actuators....Pages 127-132
Plasma Etching Based Processes for the Fabrication of Micro Structured Linear Guide....Pages 221-225
Ultraprecision Finishing of Photomask Substrate by Utilizing Atmospheric Pressure Plasma....Pages 227-231
Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric Pressure Plasma....Pages 233-237
Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams....Pages 239-242
Visual Feedback Control of a Micro Lathe....Pages 133-137
An 8-Axis Robot Based Rough Cutting System for Surface Sculpturing....Pages 139-144
A New Position Surveying System for the Underground Pipes Using Two Rotary Encoders....Pages 145-150
Measurement of Cutting Torque by Speed Increasing Spindle....Pages 151-156
Diamond Turning using Water Drive Spindle....Pages 157-161
Development and Evaluation of a High-Precision Machining Center with Friction-Less Drives....Pages 163-167
Machining Feature-Driven 5-Axis CNC Machine Tools....Pages 169-174
Laser Machining of Cobalt Cemented Tungsten Carbides....Pages 243-248
Study of Thermal Deformation of a Base Sheet Caused by Laser Cutting....Pages 249-254
Laser Welding of Transparent Resin Plates....Pages 255-259
Fabrication of Carbon Nanotube Reinforced Hydroxyapatite Coating on Stainless Steel 316L by Laser Surface Treatment....Pages 261-265
Novel Abrasive-free Planarization of Si and SiC using Catalyst....Pages 267-270
Polishing of Single Crystal SiC with the LHA Pad....Pages 271-275
A Computational Study on Slurry Flow between a Wafer and CMP Pad with Grooves....Pages 277-280
Multilevel Computer Generated Hologram on a Curved Surface for High Power CO 2 Laser Beam Shaping....Pages 281-284
Milling-Combined Laser Metal Sintering System and Production of Injection Molds with Sophisticated Functions....Pages 285-290
Development of Optical Elements with ELID-grinding and MRF Synergistic Finishing Process....Pages 291-294
Fabrication of Ultraprecisely Figured Mirror for Nano Focusing Hard-x-ray....Pages 295-300
Surfaces Formation of Precision ELID Grinding Rock Minerals....Pages 301-304
Dressing of Coarse-Grained Diamond Wheels for Ductile Machining of Brittle Materials....Pages 305-307
Study on Subsurface Damage Generated in Ground Si Wafer....Pages 309-313
Fabrication of High-quality Surfaces on Precise Lens Mold Materials by a new ELID Grinding Wheel....Pages 315-318
A GA-based Optimization of Compliant Micro-manipulator....Pages 319-320
Path Control Scheme for Vision Guided Micro Manipulation System....Pages 321-322
Machined Surface Analysis for 5-axis Machine Tools....Pages 323-324
A New Approach Manufacturing Cell Scheduling based on Skill-based Manufacturing Integrated to Genetic Algorithm....Pages 325-326
Slide-bending Formation of Thin Metal Sheet by Using an Industrial Robot....Pages 327-328
High Accuracy and High Capacity Motor Cooling System Using Phase Change of Refrigerant for Semiconductor Lithography Apparatus....Pages 329-330
Development of the Earthworm Robot using a Shape Memory Alloy....Pages 331-332
Improvement of Propulsion Mechanism based on the Inertial Force....Pages 333-334
A High-order Spline Filter for Surface Roughness Measurement....Pages 335-336
Surface structure of monocrystalline silicon anisotropically etched with the help of microwaves....Pages 337-338
Development of an Ultra-Thin 100 μm Diametrical Coaxial Cable using a Coating Technique....Pages 339-340
Study on Si Wafer Cooling by Low Pressure Argon Gas in Vacuum Eenvironment....Pages 341-342
Research on Development of Advanced Analyzer Components with Ultraprecision....Pages 343-344
Effects of Wear of Single Crystal Diamond Tool with Large Nose Radius on Work Hardening and Residual Stress....Pages 345-346
Experimental Analysis and Optimization of Cutting Parameters for End Milling Aluminium Alloy....Pages 347-348
Study on the ELID Grinding Forces of Ceramics and Steels....Pages 349-350
Grinding of C/C-SiC Composite in Dry Method....Pages 351-352
Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers....Pages 353-354
Development of an Automatic Scraping Machine with Recognition for Bearing of Scraped Surfaces — Construction of Automatic Scraping Machine —....Pages 355-356