Thermophysical Properties and Measuring Technique of Ge-Sb-Te Alloys for Phase Change Memory

Preface
Contents
About the Author
1 Introduction
	1.1 Background
	1.2 Thermal Conductivity Theory
		1.2.1 Electronic Thermal Conductivity (λe)
		1.2.2 Phonon Thermal Conductivity
		1.2.3 Other Mechanisms
	1.3 Previous Studies on Ge–Sb–Te Alloy System
		1.3.1 Phase Diagram
		1.3.2 Crystallographic Structure
		1.3.3 Electrical Resistivity
		1.3.4 Thermal Conductivity
		1.3.5 Optical Properties
	References
2 Establishment of the Hot-Strip Method for Thermal Conductivity Measurements of Ge–Sb–Te Alloys
	2.1 Introduction
	2.2 Establishment of Hot-Strip Method
		2.2.1 Principle
		2.2.2 Measurement Setup Modifications
		2.2.3 Parameters α and R0 Optimization
	2.3 Sample and Experiment Procedure
	2.4 Reliability Verification of the Hot-Strip Method
	2.5 Application of the Hot-Strip Method to Ge–Sb–Te Alloys
		2.5.1 Characterization of Sb2Te3 Alloys Before and After Measurements
		2.5.2 Thermal Conductivity Results of Sb2Te3 Alloy
	2.6 Uncertainty in Thermal Conductivity Measurement of Sb2Te3 Alloy
		2.6.1 Uncertainty in Current (I)
		2.6.2 Uncertainty in  ΔRΔθ , XT and  dΔVdlnt
		2.6.3 Uncertainty in Distance Between Potential Terminals (l)
		2.6.4 Sensitivity Coefficients
		2.6.5 Combined Standard Uncertainty
	2.7 Conclusions
	References
3 Thermal Conductivities of Ge–Sb–Te Alloys
	3.1 Introduction
	3.2 Sample and Experimental Procedure
	3.3 Characterization of Sb–Te and GeTe–Sb2Te3 Alloys
		3.3.1 Characterization of Sb–Te Alloys
		3.3.2 Characterization of GeTe–Sb2Te3 Alloys
	3.4 Thermal Conductivities of Sb–Te and GeTe–Sb2Te3 Alloys
		3.4.1 Thermal Conductivities of Sb–Te Alloys
		3.4.2 Thermal Conductivities of GeTe–Sb2Te3 Pseudobinary Alloys
	3.5 Uncertainty in Thermal Conductivity Measurements of Ge–Sb–Te Alloys
		3.5.1 Uncertainty in Current (I)
		3.5.2 Uncertainty in  ΔRΔθ , XT and  dΔVdlnt
		3.5.3 Uncertainty in Distance Between Potential Terminals (l)
		3.5.4 Sensitivity Coefficients
		3.5.5 Combined Standard Uncertainty
	3.6 Comparison with Reported Data
	3.7 Conclusions
	References
4 Electrical Resistivities of Ge–Sb–Te Alloys
	4.1 Introduction
	4.2 Experimental
		4.2.1 Sample
		4.2.2 Four-Terminal Method
		4.2.3 Measurement Setup and Procedure
	4.3 Characterization of GeTe–Sb2Te3 Alloys
	4.4 Electrical Resistivities of GeTe–Sb2Te3 Alloys
	4.5 Uncertainty in Electrical Resistivity Measurements of GeTe–Sb2Te3 Pseudobinary Alloys
		4.5.1 Uncertainty in Resistance (R)
		4.5.2 Uncertainty in Diameter of Sample (d)
		4.5.3 Uncertainty in Distance Between Inner Electrodes (l)
		4.5.4 Sensitivity Coefficients
		4.5.5 Combined Standard Uncertainty
	4.6 Comparison with Reported Data
	4.7 Conclusions
	References
5 Thermal Conduction Mechanisms and Prediction Equations of Thermal Conductivity for Ge–Sb–Te Alloys
	5.1 Introduction
	5.2 Thermal Conduction Mechanisms
		5.2.1 Structural Similarity
		5.2.2 Sb–Te Binary Alloys
		5.2.3 Ternary GeTe–Sb2Te3 Pseudobinary Alloys
		5.2.4 GeTe Alloy
	5.3 Prediction Equations of Thermal Conductivity
		5.3.1 Sb–Te Binary Alloys
		5.3.2 Sb2Te3–GeTe Pseudobinary Alloys
	5.4 Conclusions
	References
6 Densities of Ge–Sb–Te Alloys
	6.1 Introduction
	6.2 Sessile Drop Method
		6.2.1 Sample
		6.2.2 Sessile Drop Method
		6.2.3 Substrate Selection
		6.2.4 Parameter Calibration
		6.2.5 Archimedean Method
	6.3 Density Results
		6.3.1 Substrate Selection
		6.3.2 Parameter Calibration
		6.3.3 Density Results
	6.4 Discussion
		6.4.1 Comparison with Reported Data
		6.4.2 Application Discussion
	6.5 Conclusions
	References
7 Summary and Conclusions