The Physics and Technology of Amorphous SiO2

Front Matter....Pages i-xii
Current Models for Amorphous SiO 2 ....Pages 1-13
Structural Similarities and Dissimilarities Between SiO 2 and H 2 O....Pages 15-35
Geometrical Methods in the Theory of Glassses....Pages 37-46
Low Lying Excitations in Silica....Pages 47-53
New Methods of IR Spectroscopic Investigation of Amorphous Insulating Films....Pages 55-61
Vibrational Studies of Amorphous SiO 2 ....Pages 63-70
Raman Spectra of SiO 2 Fibers at High Tensile Strain....Pages 71-75
A Comparison of the Structure of a-SiO 2 Prepared by Different Routes....Pages 77-82
NMR Studies of Neutron-Irradiated Crystalline and Vitreous Silica....Pages 83-89
Electronic Structure of Defects in Amorphous SiO 2 ....Pages 91-101
Electron and Hole Traps Related to A π-Bonded Oxygen Vacancy Center in SiO 2 ....Pages 103-106
Theory of Oxygen-Vacancy Defects in Silicon Dioxide....Pages 107-112
Total Energy Calculations for Intrinsic Defects in Amorphous SiO 2 ....Pages 113-117
Boron Impurity Centers in SiO 2 a Tight Binding Consideration....Pages 119-124
Intrinsic and Extrinsic Point Defects in a-SiO 2 ....Pages 125-134
Self-Trapped Excitons in Amorphous and Crystalline SiO 2 ....Pages 135-140
Identification of Native Defects in a-SiO 2 ....Pages 141-151
UV and VUV Optical Absorption due to Intrinsic and Laser Induced Defects in Synthetic Silica Glasses....Pages 153-159
Incommensurate Phase of Quartz: Microscopic Origin and Interaction with Defects....Pages 161-164
Gamma-Ray Induced 2 eV Optical Absorption Band in Pure-Silica Core Fibers....Pages 165-170
On the Decay of X-Ray Induced Luminescence of SiO 2 ....Pages 171-174
Transformation of Radiation Induced Defect Centers as a Probe of Molecular Diffusion in a-SiO 2 ....Pages 175-179
Observation of the Neutral Oxygen Vacancy in Silicon Dioxide....Pages 181-186
New Insight Into the Structure of SiO 2 Glass from a Point Defect Study....Pages 187-192
Hydrogen Bonds Between Peroxy Radicals and Hydrogen Molecules in SiO 2 Glass....Pages 193-198
ESR Studies of Paramagnetic Defects formed in Amorphous SiO 2 by High Energy Heavy Ions....Pages 199-203
On the Radiation Induced Coloration of SiO 2 ....Pages 205-210
Effects of Processing on Radiation Damage Thresholds in Silica Glasses....Pages 211-214
The Structure of Defects in Doped SiO 2 ....Pages 215-221
Electrical and Optical Characteristics of Vanadium Doped Amorphous Silicon Dioxide Films Prepared by CVD....Pages 223-229
Theory of Dangling Orbital Defects at the <111> Si/SiO 2 Interface....Pages 231-235
Structure and Hyperfine Interaction of Si 3 ≡ Si• Defect Clusters....Pages 237-247
On the Relationship Between Thermal Growth and Thickness Inhomogeneities in Very Thin SiO 2 Films....Pages 249-254
The P b Center at the Si-SiO 2 Precipitate Interfaces in Buried Oxide Materials: 29 Si Hyperfine Interactions and Linewidths....Pages 255-258
Metastabile and Multiply-Charged Individual Defects at the Si:SiO 2 Interface....Pages 259-265
The Influence of Disorder on the Si 2p XPS Lineshape at the Si — SiO 2 Interface....Pages 267-272
Si — SiO 2 Interfaces — a Hrtem Study....Pages 273-277
Electrical and Interface Properties of MOS Structures of Getter Treated Silicon....Pages 279-283
Influence of Different Preparation Methods on Interfacial (SiO 2 /Si) Parameters of Very Thin SiO 2 Layers....Pages 285-289
Thermal Oxidation of Silicon....Pages 291-296
A Framework for Incorporating Memory Effects of Structural Relaxation in Models for Thermal Oxidation of Silicon....Pages 297-306
Analysis of Stress Relaxation and Growth Kinetics for Two-Step Thermal Oxidation of Silicon....Pages 307-313
Photo-Induced Oxidation Processes in Silicon....Pages 315-319
Growth and Structure of Argon Laser Grown SiO 2 ....Pages 321-329
Transport Properties of Plasma Enhanced CVD Silicon Oxynitride Films....Pages 331-336
Characteristics of SiO 2 and SiO X N Y , Obtained by Rapid Thermal Processes....Pages 337-343
Evidence for Oxygen Bubbles in Fluorine Doped Amorphous Silicon Dioxide Thin Films....Pages 345-352
Low Temperature P.E.C.V.D. Silicon Rich Silicon Dioxide Films Doped with Fluorine....Pages 353-358
High Field Transport in SiO 2 ....Pages 359-363
Hot Electrons in SiO 2 : Ballistic and Steady-State Transport....Pages 365-373
Electronic Charge Transport in Thin SiO 2 Films....Pages 375-389
The Role of Hole Traps in the Degradation of Thermally Grown SiO 2 Layers....Pages 391-409
The Influence of High Temperature Nitrogen Annealing on the Electrical Properties of Plasma Nitrided Oxides....Pages 411-419
High-Field Positive-Charge Generation and its Relation to Breakdown in a-SiO 2 ....Pages 421-425
Breakdown Mechanisms of Thermally Grown....Pages 427-441
Field Dependence of Time-To-Breakdown Distribution of Thin Oxides....Pages 443-447
Radiation Effects in MOS VLSI Structures....Pages 449-454
Relationship Between Hole Trapping and Interface....Pages 455-463
Radiation-Induced Conductivity of Thin Silicon Dioxide Films on Silicon....Pages 465-471
Interface Degradation in Short-Channel MOSFETs....Pages 473-479
Synthesis of Buried Dielectric Layers in Silicon by Ion Implantation....Pages 481-486
Electrical Properties of Simox Material and Devices....Pages 487-516
Formation Mechanisms and Structures of Thin Buried Layers of SiO 2 Fabricated Using Ion Beam Synthesis....Pages 517-530
Low-Temperature ESR Study of SIMOX Structures....Pages 531-537
Defects in Silicon-on-Insulator Structures Formed by O + Implantation: Their Dependence on Implantation Temperature....Pages 539-545
Interface Properties and Recombination Mechanisms in Simox Structures....Pages 547-552
Porous Silica Sol-Gel Coatings for Nd: Glass High-Power Pulsed Laser Uses....Pages 553-559
Vacuum Re-Emission of Positrons from a-SiO 2 Layers....Pages 561-567
Back Matter....Pages 569-573
....Pages 575-579