The Physics and Fabrication of Microstructures and Microdevices: Proceedings of the Winter School Les Houches, France, March 25–April 5, 1986

Front Matter....Pages I-XI
Front Matter....Pages 1-1
High Resolution Lithography (Some Comments on Limits and Future Possibilities)....Pages 2-14
Submicron Lithography Tools....Pages 15-35
Electron Beam Nanolithography....Pages 36-50
The Spin Coating Process Mechanism....Pages 51-58
Resists Patterning....Pages 59-64
Dry Etching: Concepts, Methods and Applications....Pages 65-82
Overlayers....Pages 83-93
Self-Aligned Growth of Microstructures....Pages 94-108
Laser-Induced Growth of Microstructures....Pages 109-120
Structural Characterization of Superlattices by X-Ray Diffraction....Pages 121-135
Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces....Pages 136-149
Fabrication of Small Structures of Semiconductors and Metals....Pages 150-157
Atomically Controlled Growth in 2, 1 and OD, and Applications....Pages 158-165
Microstructure of Organic Mono- and Multilayers....Pages 166-172
Front Matter....Pages 173-173
Fundamentals of Low Dimensional Physics....Pages 174-196
Electron States in Semiconductor Microstructures....Pages 197-209
Quantum Transport Theory for Small-Geometry Structures....Pages 210-230
Noise in Microstructures....Pages 231-254
Transport Physics of Multicontact Si MOS Nanostructures....Pages 255-265
1D Structures — Field Confinement Approach....Pages 266-279
Front Matter....Pages 173-173
Excitons in GaAs Quantum Wells: Interface Disorder and Mobility....Pages 280-288
Nonlinear Optics and Electro-Optics of Quantum Wells....Pages 289-302
Quantum Interference Effects in Small Systems: Normal and Superconducting Networks....Pages 303-322
2D Localisation and Interaction Effects in Semiconductor Structures....Pages 323-330
Optical Nonlinearities in Small Particles and Composite Materials....Pages 331-342
Tunnel Currents and Electron Tunnelling Times in Semiconductor Heterostructure Barriers in the Presence of an Applied Magnetic Field....Pages 343-350
Front Matter....Pages 351-351
Scaling Limits of Silicon VLSI Technology....Pages 352-369
Three Part Series on Heterojunction Transistors....Pages 370-393
CAD: Overview and Perspectives....Pages 394-417
Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics....Pages 418-424
The Metal Base Transistors....Pages 425-434
An Integrated Microfabrication System for Low-Dimensionality Structures and Devices....Pages 435-442
Fabrication of Gate Array Interconnect Structures Using Direct-Write Deposition Processes....Pages 443-452
Electronic Neural Computing....Pages 453-460
Front Matter....Pages 461-461
Fabrication of Submicron Structures Combining E-Beam and Deep-UV Exposure....Pages 462-462
Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography....Pages 462-462
2D Josephson Junction Networks....Pages 462-463
Electric Field Heating of Supported and Free-Standing AuPd Fine Wires....Pages 463-463
High-Frequency Limits of Quantum Noise Detectors Based on Superconducting Tunnel Junction Mixers....Pages 463-464
Photoresponse and Transport Properties of a ‘Quasi’ Graded Gap Superlattice P-I-N Diode....Pages 464-464
Front Matter....Pages 461-461
Disorder and Two-Dimensional Electronic Sub-Bands....Pages 464-464
A Model for the Oscillatory Structure in the J(V) Characteristics of GaAs/(AlGa)As Tunneling Structures....Pages 465-466
A Minute Metallic Sphere Close to Flat Metal Surface System: A Scanning Tunneling Microscope Problem....Pages 466-466
A Calculation of the Effect of Subband Structure on the Thermopower of a Quasi-1D Wire....Pages 466-466
The Effect of Electron-Electron Scattering on the Distribution Function in Semiconductors....Pages 466-467
Back Matter....Pages 469-472