Simulation of Semiconductor Devices and Processes: Vol. 6

Front Matter....Pages i-xiv
Numerical Modelling and Materials Characterisation for Integrated Micro Electro Mechanical Systems....Pages 1-9
Fast and Accurate Aerial Imaging Simulation for Layout Printability Optimization....Pages 10-13
Efficient and Rigorous 3D Model for Optical Lithography Simulation....Pages 14-17
Application of the Two-dimensional Numerical Simulation for the Description of Semiconductor Gas Sensors....Pages 18-21
Analysis of Piezoresistive Effects in Silicon Structures Using Multidimensional Process and Device Simulation....Pages 22-25
Modeling of magnetic-field-sensitive GaAs devices using 3D Monte Carlo simulation....Pages 26-29
Quasi Three-Dimensional Simulation of Heat Transport in Thermal-Based Microsensors....Pages 30-33
Simulating Deep Sub-Micron Technologies: An Industrial Perspective....Pages 34-41
An Improved Calibration Methodology for Modeling Advanced Isolation Technologies....Pages 42-45
Algorithms for the Reduction of Surface Evolution Discretization Error....Pages 46-49
Polygonal Geometry Reconstruction after Cellular Etching or Deposition Simulation....Pages 50-53
A Data-Model for a Technology and Simulation Archive....Pages 54-57
A Programmable Tool for Interactive Wafer-State Level Data Processing....Pages 58-61
Layout Design Rule Generation with TCAD Tools for Manufacturing....Pages 62-65
ALAMODE: A Layered Model Development Environment....Pages 66-69
TCAD Optimization Based on Task-Level Framework Services....Pages 70-73
Cellular Automata Simulation of GaAs-IMPATT-Diodes....Pages 74-77
Two-Dimensional Simulation of Deep-Trap Effects in GaAs MESFETs with Different Types of Surface States....Pages 78-81
An Efficient Numerical Method to Solve the Time-Dependent Semiconductor Equations Including Trapped Charge....Pages 82-85
Advances in Numerical Methods for Convective Hydrodynamic Model of Semiconductor Devices....Pages 86-89
An Advanced Cellular Automaton Method with Interpolated Flux Scheme and its Application to Modeling of Gate Currents in Si MOSFETs....Pages 90-93
Piezoresistance and the Drift-Diffusion Model in Strained Silicon....Pages 94-97
A Novel Approach to HF-Noise Characterization of Heterojunction Bipolar Transistors....Pages 98-101
Ge Profile for Minimum Neutral Base Transit Time in Si/Si 1-y Ge y Heterojunction Bipolar Transistors....Pages 102-105
Performance optimization in Si/SiGe heterostructure FETs....Pages 106-109
On the Integral Representations of Electrical Characteristics in Si Devices....Pages 110-113
Large Signal Frequency Domain Device Analysis Via the Harmonic Balance Technique....Pages 114-117
A Method for Extracting the Threshold Voltage of MOSFETs Based on Current Components....Pages 118-121
2-D MOSFET Simulation by Self-Consistent Solution of the Boltzmann and Poisson Equations Using a Generalized Spherical Harmonic Expansion....Pages 122-125
Ultra High Performance, Low Power 0.2 µ m CMOS Microprocessor Technology and TCAD Requirements....Pages 126-134
Viscoelastic Modeling of Titanium Silicidation....Pages 135-138
Multidimensional Nonlinear Viscoelastic Oxidation Modeling....Pages 139-142
Three-Dimensional Integrated Process Simulator: 3D-MIPS....Pages 143-146
Effect of Process-Induced Mechanical Stress on Circuit Layout....Pages 147-150
The Simulation System for Three-Dimensional Capacitance and Current Density Calculation with a User Friendly GUI....Pages 151-154
Numerical and analytical modelling of head resistances of diffused resistors....Pages 155-158
New Spreading Resistance Effect For Sub-0.50 µ m MOSFETs: Model and Simulation....Pages 159-162
The Role of SEMATECH in Enabling Global TCAD Collaboration....Pages 163-165
Three Dimensional Simulation for Sputter Deposition Equipment and Processes....Pages 166-169
Comprehensive Reactor, Plasma, and Profile Simulator for Plasma Etch Processes....Pages 170-173
Modeling the Wafer Temperature in a LPCVD Furnace....Pages 174-177
Determination of Electronic States in Low Dimensional Heterostructure and Quantum Wire Devices....Pages 178-181
An Exponentially Fitted Finite Element Scheme for Diffusion Process Simulation on Coarse Grids....Pages 182-185
Achievement of Quantitatively Accurate Simulation of Ion-Irradiated Bipolar Power Devices....Pages 186-189
Modeling of Substrate Bias Effect in Bulk and SOI SiGe-channel p-MOSFETs....Pages 190-193
A Very Fast Three-Dimensional Impurity Profile Simulation Incorporating An Accumulated Diffusion Length and Its Application to the Design of Power MOSFETs....Pages 194-197
Recovery of Vectorial Fields and Currents in Multidimensional Simulation....Pages 198-201
An Efficient Approach to Solving The Boltzmann Transport Equation in Ultra-fast Transient Situations....Pages 202-205
Modeling of a Hot Electron Injection Laser....Pages 206-209
Scaling Considerations of Bipolar Transistors using 3D Device Simulation....Pages 210-213
Three-Dimensional Monte Carlo Simulation of Boron Implantation into <100>Single-Crystal Silicon Considering Mask Structure....Pages 214-217
A fully 2D, Analytical Model for the Geometry and Voltage Dependence of Threshold Voltage in Submicron MOSFET’s....Pages 218-221
On the influence of band structure and scattering rates on hot electron modeling....Pages 222-225
Finite Element Monte Carlo Simulation of Recess Gate FETs....Pages 226-229
Coupled 2D-microscopic/macroscopic simulation of nanoelectronic heterojunction devices....Pages 230-233
On the Discretization of van Roosbroeck’s Equations with Magnetic Field....Pages 234-237
Modeling of Impact Ionization in a Quasi Deterministic 3D Particle Dynamics Semiconductor Device Simulation Program....Pages 238-241
Accurate Modeling of Ti/TiN Thin Film Sputter Deposition Processes....Pages 242-245
Monte Carlo Simulation of InP/InGaAs HBT with a Buried Subcollector....Pages 246-249
Design and Optimization of Millimeter-Wave IMPATT Oscillators Using a Consistent Model for Active and Passive Circuit Parts....Pages 250-253
Generalised Drift-Diffusion Model of Bipolar Transport in Semiconductors....Pages 254-257
Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors....Pages 258-261
Preventing critical conditions in IGBT chopper circuits by a multi-step gate drive mode....Pages 262-265
Control of Plasma Dynamics within Double-Gate-Turn-Off Thyristors (D-GTO)....Pages 266-269
A Vector Level Control Function for Generalized Octree Mesh Generation....Pages 270-273
Comparison of Hydrodynamic Formulations for Non-Parabolic Semiconductor Device Simulations....Pages 274-277
Influence of Analytical MOSFET Model Quality on Analog Circuit Simulation....Pages 278-281
2-D Adaptive Simulation of Dopant Implantation and Diffusion....Pages 282-285
Optimization of a Recessed LOCOS using a tuned 2-D process simulator....Pages 286-289
Simulation of Complex Planar Edge Termination Structures for Vertical IGBTs by Solving the Complete Semiconductor Device Equations....Pages 290-293
Numerical Analysis of Hot-Electron Effects in GaAs MESFETs....Pages 294-297
Capacitance Model of Microwave InP-Based Double Heterojunction Bipolar Transistors....Pages 298-301
Estimation of the Charge Collection for the Soft-Error Immunity by the 3D-Device Simulation and the Quantitative Investigation....Pages 302-305
D.C. Electrothermal Hybrid BJT Model for SPICE....Pages 306-309
Alpha-Particle Induced Soft Error Rate Evaluation Tool and User Interface....Pages 310-313
Hydrodynamic Modeling of Electronic Noise by the Transfer Impedance Method....Pages 314-317
Monte Carlo Simulation of S-Type Negative Differential Conductance in Semiconductor Heterostructures....Pages 318-321
Two-Barrier model for Description of Charge Carriers Transport Processes in Structures with Porous Silicon....Pages 322-324
Monte-Carlo simulation of inverted hot carrier distribution under strong carrier-optical phonon scattering....Pages 325-327
Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor....Pages 328-331
An Approach for Explaining Drift Phenomena in GTO Devices Using Numerical Device Simulation....Pages 332-335
Parallel 3D Finite Element Power Semiconductor Device Simulator Based on Topologically Rectangular Grid....Pages 336-339
Investigation of Silicon Carbide Diode Structures via Numerical Simulations Including Anisotropic Effects....Pages 340-343
A new physical compact model of CLBTs for circuit simulation including two-dimensional calculations....Pages 344-347
Combining 2D and 3D Device Simulation with Circuit Simulation for Optimising High-Efficiency Silicon Solar Cells....Pages 348-351
A New Quasi-two Dimensional HEMT Model....Pages 352-355
Simulations of the forward behaviour of hybrid Schottky-/pn-diodes....Pages 356-359
HFET Breakdown Study by 2D and Quasi 2D Simulations: Topology Influence....Pages 360-363
Investigation of GTO Turn-on in an Inverter Circuit at Low Temperatures using 2-D Electrothermal Simulation....Pages 364-367
Large Scale Thermal Mixed Mode Device and Circuit Simulation....Pages 368-371
Scaling of Conventional MOSFET’s to the 0.1-µm Regime....Pages 372-379
Monte Carlo Simulation of Carrier Capture at Deep Centers for Silicon and Gallium Arsenide Devices....Pages 380-383
A New Statistical Enhancement Technique in Parallelized Monte Carlo Device Simulation....Pages 384-387
Stability Issues in Self-Consistent Monte Carlo-Poisson Simulations....Pages 388-391
The Path Integral Monte Carlo Method for Quantum Transport on a Parallel Computer....Pages 392-395
A Monte Carlo Transport Model Based on Spherical Harmonics Expansion of the Valence Bands....Pages 396-399
Full-Band Monte Carlo Transport Calculation in an Integrated Simulation Platform....Pages 400-403
On Particle-Mesh Coupling in Monte Carlo Semiconductor Device Simulation....Pages 404-407
T 2 CAD: Total Design for Sub-um Process and Device Optimization with Technology-CAD....Pages 408-415
Modelling Impact-Ionization in the Framework of the Spherical-Harmonics Expansion of the Boltzmann Transport Equation with Full-Band Structure Effects....Pages 416-419
Impact Ionization Model Using Second- and Fourth-Order Moments of Distribution Function....Pages 420-423
An Accurate NMOS Mobility Model for 0.25µm MOSFETs....Pages 424-427
A 2-D modeling of Metal-Oxide-Polycrystalline Silicon-Silicon (MOPS) structures for the determination of interface state and grain boundary state distributions....Pages 428-431
Sensitivity Analysis of an Industrial CMOS Process using RSM Techniques....Pages 432-435
Process- and Devicesimulation of Very High Speed Vertical MOS Transistors....Pages 436-439
Two-Dimensional Transient Simulation of Charge-Coupled Devices Using MINIMOS NT....Pages 440-443
Determination of Vacancy Diffusivity in Silicon for Process Simulation....Pages 444-447
Precipitation phenomena and transient diffusion/activation during high concentration boron annealing....Pages 448-451
Modelling of silicon interstitial surface recombination velocity at non-oxidizing interfaces....Pages 452-455
Efficient Hybrid Solution of Sparse Linear Systems....Pages 456-459
Mesh Generation for 3D Process Simulation and the Moving Boundary Problem....Pages 460-463
Three-Dimensional Grid Adaptation Using a Mixed-Element Decomposition Method....Pages 464-467
Unified Grid Generation and Adaptation for Device Simulation....Pages 468-471
Platinum Diffusion at Low Temperatures....Pages 472-475
Lattice Monte-Carlo Simulations of Vacancy-Mediated Diffusion and Implications for Continuum Models of Coupled Diffusion....Pages 476-479
A New Hydrodynamic Equation for Ion-Implantation Simulation....Pages 480-483
Monte Carlo Simulation of Multiple-Species Ion Implantation and its Application to the Modeling of 0.1µ PMOS Devices....Pages 484-487
Analytical Model for Phosphorus Large Angle Tilted Implantation....Pages 488-491
Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation....Pages 492-495
Back Matter....Pages 496-501