Si Silicon: Silicon Nitride in Microelectronics and Solar Cells

Front Matter....Pages N2-XV
Introductory Remarks....Pages 1-2
Preparation and Patterning of Silicon Nitride Layers and Films....Pages 3-33
Silicon Nitride Application as Masks....Pages 34-71
Insulating Silicon Nitride Films....Pages 72-76
Silicon Nitride for Gettering....Pages 77-79
Silicon Nitride for Protecting and Passivating Devices. Improving the Radiation Resistance....Pages 80-98
Silicon Nitride in Encapsulation and Recrystallization....Pages 99-118
Silicon Nitride Applied for the Manufacture of Contacts and Interconnections....Pages 119-138
Silicon Nitride for Isolating Devices and Device Components....Pages 139-152
Silicon Nitride in Resistor Fabrication....Pages 153-154
Silicon Nitride Dielectrics and Masks in Capacitors....Pages 155-160
Silicon Nitride as Mask and Dielectric in Field Effect Devices....Pages 161-188
Silicon Nitride Substrates, Masks and Dielectrics in Thin-Film Devices on Insulators....Pages 189-200
Charge-Coupled Devices (CCDs)....Pages 201-203
Schottky Diodes....Pages 204-205
Silicon Nitride in Bipolar Devices (Diodes, Transistors and Thyristors)....Pages 206-220
Silicon Nitride in Integrated Circuit (IC) Technology....Pages 221-232
Silicon Nitride in Field Effect Transistor-Based Integrated Circuits (FET ICs)....Pages 233-238
Silicon Nitride in Bipolar Device-Based Integrated Circuits....Pages 239-242
Silicon Nitride in Random Access Memories (RAMs)....Pages 243-245
Read-Only Memories (ROMs)....Pages 246-249
Silicon Nitride in Compound Semiconductor Field Effect Transistors....Pages 250-262
Silicon Nitride in Light-Emitting Diodes (LEDs), Lasers and Displays....Pages 263-269
Silicon Nitride in Photoelectric Devices....Pages 270-283
Silicon Nitride in Compound Semiconductor Integrated Circuits (ICs)....Pages 284-284
Silicon Nitride in Integrated Optics....Pages 285-286
Silicon Nitride in Epitaxy and Superlattices....Pages 287-297
Silicon Nitride in High-T c Superconductor and Superconducting Device Technology....Pages 298-299
Silicon Nitride in Sensors....Pages 300-311
Silicon Nitride in Magnetic Devices....Pages 312-315
Specific Applications of Silicon Nitride Films....Pages 316-320
Application of Silicon Nitride for Solar Cells....Pages 321-362
Back Matter....Pages 363-401