Progress in Precision Engineering: Proceedings of the 6th International Precision Engineering Seminar (IPES 6)/2nd International Conference on Ultraprecision in Manufacturing Engineering (UME 2), May, 1991 Braunschweig, Germany

Front Matter....Pages I-XII
Investigation and Compensation of the Non-linearity of Heterodyne Interferometers....Pages 1-14
Technology and Application of Grating Interferometers in High-precision Measurement....Pages 15-30
Silicon as a Length- and Angle Ruler in Nanotechnology....Pages 31-38
Electron Tunnel Sensors....Pages 39-49
Diode Lasers for Industrial Length Measurements....Pages 50-55
Paving the Way to Thermally Stable Coordinate Measuring Machines....Pages 56-76
Towards Quadrilateration using Steel Ball Retroreflectors....Pages 77-81
Testing of Algorithms for Coordinate Measuring Machines....Pages 82-84
Experiences in the Development of Ultra Stiff CNC Aspheric Generating Machine Tools for Ductile Regime Grinding of Brittle Materials....Pages 85-94
Development of High-precision Aspheric Grinding/Turning Machine....Pages 95-102
Design and Testing of a Self Coupling Hydrostatic Leadscrew....Pages 103-105
Application of Contisure for the Verification of the Contouring Performance of Precision Machines....Pages 106-123
An Evaluation of Ultra-precise Machine Tool Contouring Performance: The Low Amplitude Sine Tracking (LAST) Test....Pages 124-127
Examination of High Precision Slow-motion Feed-drive Systems for the Sub-micrometre Range....Pages 128-140
The Influence of the Crystallographic Structure of the Substrate Material on Surface Quality and Cutting Forces in Micromachining....Pages 141-152
Mirror Surface Grinding by Metal Bonded Super-abrasive Wheel with Electrolytic In-process Dressing....Pages 153-165
Results of Non-linear Mixing in Precision Machining....Pages 166-173
Micropositioning for Submicron Electron Beam Lithography....Pages 174-185
Refinements in Postprocess Gaging with Feedback in the Production of Diamond Turned Optics....Pages 186-191
Evaluation of Silicon Wafer Polishing Pads — Rheological Behaviour of Polishing Pads and Improvement of Wafer Flatness....Pages 192-201
High Aspect Ratio Laser Machining of Composite Ceramics....Pages 202-208
Particle Beam Figuring — An Ideal Tool for Precision Figuring of Optics?....Pages 209-214
Some Aspects of Ultra-precision Science and Engineering in Medicine and Biosciences....Pages 215-224
Microelectronic and Nanoelectronic Interfacing Techniques for Biological Systems....Pages 225-230
Cutting Experiments in a Computer using Atomic Models of a Copper Crystal and a Diamond Tool....Pages 231-242
Precision Aspheric Generators for Off-axis X-ray Mirrors and Asymmetric Aspheric Lenses....Pages 243-254
Design and Modeling of a Linear Microactuator....Pages 255-265
Photon Scanning Tunneling Microscopy and Reflection Scanning Microscopy....Pages 266-276
Design and Performance Considerations of the Continuos Four-roll Bender: A Precision Machine for the Roller Bending of Plates....Pages 277-289
Application of Variable Parametric Programming in Precision Machining Processes....Pages 290-298
Micromachining of Hydraulic Elements....Pages 299-307
An Interferometer for Measurement of Grating and Index Scale....Pages 308-310
Ultraprecision Machining — A Theoretical Analysis of the Mechanisms of Surface Formation....Pages 311-312
A Stylus Profilometer with one Nanometre Precision....Pages 313-314
An Infinite-stiffness Aerostatic Bearing with an Exhaust-control Restrictor....Pages 315-316
Analysis of Dynamic Coefficients for Multirecess Hydrostatic Journal Bearings with Journal Rotation by Finite Element Method....Pages 317-318
Measurement of Sub Surface Damage in Silicon Wafers....Pages 319-320
Absolute Laserrefractometer....Pages 321-323
Accuracy Average Effect of Linear Motion Ball Guides System for NC Machines — Theoretical Analysis....Pages 324-324
Accuracy Average Effect of Linear Motion Ball Guides System for NC Machines — Experimental Verification....Pages 325-325
Investigation of the Geometrical Properties of CCD Line Image Sensors....Pages 326-327
Optical Linewidth Measurement on Masks and Wafers in the Micrometre and Submicrometre Range....Pages 328-329
Absolute Flatness Testing....Pages 330-331
Kinetic Factors in Electropolishing....Pages 332-334
Precise Performance Tests of Machine Tools with the Use of a Computerised Measuring System....Pages 335-336
The Real Contact Area Measurement by Means of Scanning Profilometry....Pages 337-338
High-efficiency Polishing of Polycrystalline Diamond....Pages 339-339
A Differential Laser Autocollimation Probe for On-Machine-Measurement....Pages 340-340
A New Method of Angle Measurement Based on Internal Reflection Effect....Pages 341-341
An Ultra-fine Infeed Controller....Pages 342-342
Intercomparison Flatness Measurements on a Granite Surface Plate....Pages 343-343
Is it Possible to use Carbide Tools for Ultra-precision Cutting?....Pages 344-344
The Straightness Error Compensation Based on the P-integrator Learning Control in High Precision Lathe....Pages 345-346
The Research of Super-precision Grinding Control System for Axital Dimension of Hydro Servo Valve Rod....Pages 347-348
Bluntness of the Tool and Process Forces in High-precision Cutting....Pages 349-349
Design of High Performance Externally Pressurized Gas Bearings....Pages 350-351
Mechanisms and Models of Diamond Turning: Theoretical Analysis and Experimental Investigation....Pages 352-353
Effect of Crystallographic Orientation on Micro-deformation Processing....Pages 354-354
Long Travel Optical Servo Probe....Pages 355-355
A New Optical Profilometer for Optical Smooth Surfaces....Pages 356-357
Precision Engineering of Aspherical Optical Surfaces for Silicate Glass Components....Pages 358-359
Investigations on Single Crystal Diamond Tools for the Ultra-precision Manufacturing Process....Pages 360-361
Micro-positioning Stage of 6 Degree-of-freedom with Nanometer Resolution....Pages 362-362
Measurement of Flatness of Technical Surfaces Using Anamorphotic Planinterferometer....Pages 363-363
Measurement of Gap and Parameters in the Polishing Process of Optical Glass....Pages 364-365
Results of Contactless Measurement of Lubricant Film Thickness in Precision Ball Bearings....Pages 366-368
Acceleration and Distance Sensors for Machine Vibration Measurement....Pages 369-370
Design and Manufacture of Ultra-precision Three-Axis Test System with Air Bearing Supports....Pages 371-372
Computersimulation for Determining the Machined Surface Using Process Parameters in Single Point Diamond Turning....Pages 373-374
Dynamical Behaviour of an Ultra-precision Turning Machine....Pages 375-376
Advanced Wheel Conditioning Technique for Form Wheel Diamond Grinding of Ceramic and Glass Materials....Pages 377-378
Front Matter....Pages 379-379
Some Observations on Tool Wear in Single Point Diamond Turning of Stainless Steel....Pages 381-383
High Resolution Optical Spectroscopy....Pages 384-391
Consequence of Orientation on the Single Crystal Diamond Cutting Tool....Pages 392-402
Ceramics in Finish Machining....Pages 403-414
Separation and Correction of the Dynamic Error of the Grating Type Single-flank Mesh Gear Tester....Pages 415-415
Back Matter....Pages 416-417