Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems

Production Planning and Control for Semiconductor Wafer Fabrication Facilities
......Page 4
Preface......Page 6
Contents......Page 8
Notation......Page 12
1.1 Motivation......Page 14
1.2 Outline of the Book......Page 16
2.1 Semiconductor Manufacturing Overview......Page 24
2.2.1 Overall Framework for Manufacturing Systems......Page 26
2.2.2 Description of the Base System......Page 27
2.2.3 Description of the Base Process......Page 33
2.3 Production Planning and Control Hierarchy......Page 39
3.1 Systems and Models......Page 42
3.1.1 Representation of Systems by Models......Page 43
3.1.2 Types of Models......Page 44
3.2.1 Optimal Approaches vs. Heuristics......Page 45
3.2.2 Branch-and-Bound Algorithms......Page 46
3.2.3 Mixed Integer Programming......Page 47
3.2.4 Stochastic Programming......Page 48
3.2.5 Dynamic Programming......Page 50
3.2.6 Neighborhood Search Techniquesand Genetic Algorithms......Page 51
3.2.7 Queueing Theory......Page 54
3.2.8 Discrete-Event Simulation Techniques......Page 57
3.2.9 Response Surface Methodology......Page 65
3.2.10 Learning Approaches......Page 66
3.3 Performance Assessment......Page 67
3.3.1 Performance Assessment Methodology......Page 68
3.3.2 Architecture for Simulation-Based Performance Assessment......Page 75
4.1 Motivation and Taxonomy of Dispatching Rules......Page 78
4.2.1 JS-Related Dispatching Rules......Page 81
4.2.2 MS-Related Dispatching Rules......Page 85
4.3.1 Critical Ratio Dispatching Rules......Page 87
4.3.2 ATC-Type Dispatching Rules......Page 88
4.3.3 Composite Dispatching Rules for the MS......Page 90
4.4 Simulation Results for Assessing Dispatching Rules......Page 91
4.5 Batching Rules......Page 92
4.6.1 Dynamic Batching Heuristic......Page 94
4.6.2 Next Arrival Control Heuristic......Page 97
4.6.3 Additional Look-Ahead Research......Page 103
4.6.4 BATC-Type Rules......Page 104
4.7.1 Rule-Based Systems......Page 107
4.7.2 Determining Parameters of Dispatching Rules Based on Iterative Simulation......Page 109
4.7.3 Construction of Blended Dispatching Rules......Page 111
4.7.4 Automated Discovery of Dispatching Rules......Page 114
5.1 Motivation and Definitions......Page 118
5.2 Simulation-Based Scheduling......Page 121
5.3.1 Scheduling Jobs on a Single Batch Machine......Page 123
5.3.2 Scheduling Jobs on a Single Cluster Tool......Page 131
5.3.3 Scheduling Jobs on Parallel Machineswith Sequence-Dependent Setup Times......Page 136
5.3.4 Scheduling Jobs with Ready Times on ParallelBatch Machines......Page 144
5.3.5 Scheduling Problems for Parallel Machines with Auxiliary Resources......Page 151
5.3.6 Multiple Orders per Job Scheduling Problems......Page 157
5.4.1 Motivation and Problem Statement......Page 162
5.4.2 Disjunctive Graph Representationfor Job Shop Problems......Page 163
5.4.3 Decomposition Approach......Page 169
5.4.4 Subproblem Solution Procedures......Page 174
5.4.5 Simulation-Based Performance Assessment......Page 176
5.4.6 Distributed Shifting Bottleneck Heuristic......Page 179
5.4.7 Multicriteria Approach to Solve Large-Scale Job Shop Scheduling Problems......Page 182
6.1 Push Versus Pull Approaches......Page 189
6.1.2 Pull Approaches for Order Release......Page 190
6.2.1 Starvation Avoidance......Page 192
6.2.2 Workload Regulation......Page 193
6.2.3 Subsequent Order Release Methods......Page 195
6.3.1 Scheduling Approach and Order Release Schemes......Page 197
6.3.2 Experimental Setting and Computational Results......Page 199
6.4 A Large-Scale Order Release Study......Page 202
6.4.2 Release Timing Case Study......Page 203
6.4.3 Release Quantity Case Study......Page 207
6.5 Optimization-Based Order Release......Page 208
7.1 Short-Term Capacity Planning......Page 218
7.1.2 Spreadsheet-Based Approaches for Wafer Fabs......Page 219
7.1.3 Spreadsheet-Based Approaches for Back-End......Page 223
7.1.4 An Integrated Approach Using Simulation......Page 225
7.2 Master Planning......Page 226
7.3 Capacity Planning......Page 230
7.4 Enterprise-Wide Planning......Page 233
7.5.1 Cycle Time Throughput Curves......Page 242
7.5.2 Iterative Simulation......Page 250
7.5.3 Clearing Functions......Page 252
8.1 Motivation and State of the Art......Page 258
8.2 Requirements of Production Planningand Control Systems......Page 260
8.3.1 MES Core Functionality......Page 262
8.3.2 Dispatching Systems......Page 264
8.3.3 Scheduling Systems......Page 266
8.3.4 FABMAS: An Agent-Based Scheduling System......Page 267
8.3.5 Additional Application Systems as Partof the Control System......Page 273
8.4.1 ERP and APS Core Functionality......Page 275
8.4.2 Interaction with Other Systems......Page 277
References......Page 278
Index......Page 295