Porous Silicon Carbide and Gallium Nitride: Epitaxy, Catalysis, and Biotechnology Applications

Porous Silicon Carbide and Gallium Nitride......Page 3
Contents......Page 7
Preface......Page 13
1.1 Introduction......Page 17
1.2.1 Crystal Anodization......Page 18
1.2.2 Description of the Porous Structure......Page 19
1.2.3 Model of the Morphology......Page 25
1.3.1 Experimental......Page 31
1.3.2 Results......Page 32
1.3.3 Discussion......Page 34
1.4 Summary......Page 42
References......Page 43
2.1 Introduction......Page 47
2.2 Formation of Porous Layer......Page 48
2.3 Diffusion in Porous SiC......Page 58
2.4 Oxidation......Page 63
2.5 Contacts to Porous SiC......Page 65
References......Page 69
3.1 Introduction......Page 71
3.2 SiC CVD Growth......Page 73
3.3.1 Growth on Porous Si Substrates......Page 74
3.3.2 Growth on Stabilized Porous Si Substrates......Page 78
3.4.1 Growth in LPCVD Cold-wall Reactor......Page 80
3.5 Growth of 4H-SiC on Porous 4H-SiC......Page 83
3.6 Conclusion......Page 89
References......Page 90
4.1 Introduction......Page 93
4.2 Creation of Porous GaN by Electroless Etching......Page 94
4.3.1 Porous GaN Derived from Unintentionally Doped Films......Page 96
4.3.2 Transmission Electron Microscopy (TEM) Characterization......Page 100
4.4 Luminescence of Porous GaN......Page 101
4.4.1 Cathodoluminescence (CL) of Porous GaN......Page 102
4.4.2 Photoluminescence (PL) of Porous GaN......Page 104
4.5.1 Characteristics of Raman scattering in GaN......Page 105
4.5.2 Raman Spectra of Porous GaN Excited Below Band Gap......Page 107
References......Page 111
5.1 Introduction......Page 117
5.2.1 Porous Substrates......Page 120
5.2.2 Hydrogen Etching......Page 121
5.3.1 Experimental Details......Page 124
5.3.2 Film Structure......Page 126
5.3.3 Film Strain......Page 130
5.4 Summary......Page 132
References......Page 133
6.1 Introduction......Page 137
6.2 Epitaxy of GaN on Porous SiNx Network......Page 138
6.2.1 Three-step Growth Method......Page 139
6.2.2 Structural and Optical Characterization......Page 144
6.2.3 Schottky Diodes (SDs) on Undoped GaN Templates......Page 151
6.2.4 Deep Level Transition Spectrum......Page 154
6.3.1 Formation of Porous TiN......Page 156
6.3.2 Growth of GaN on Porous TiN......Page 158
6.3.4 Characterization by TEM......Page 162
6.3.5 Characterization by PL......Page 168
6.4 Growth of GaN on Porous SiC......Page 170
6.4.1 Fabrication of Porous SiC......Page 172
6.4.2 GaN Growth on Hydrogen Polished Porous SiC......Page 173
6.4.3 GaN Growth on Chemical Mechanical Polished Porous SiC......Page 180
References......Page 183
7.1 Introduction......Page 187
7.2 PSC Substrate Fabrication and Properties......Page 188
7.2.1 Formation of Various Types of SPSC Structure......Page 189
7.2.2 Dense Layer......Page 193
7.2.3 Monitoring of Anodization Process......Page 194
7.2.4 Vacancy Model of Primary Pore Formation......Page 199
7.2.5 Stability of SPSC Under Post-Anodization Treatment......Page 206
7.3.1 The Growth and Its Effect on the Structure of the PSC Substrate......Page 211
7.3.2 Properties of the GaN Films Grown......Page 214
7.4 Summary......Page 222
References......Page 223
8.1 Introduction......Page 229
8.2 Extended Defects in Epitaxially Grown GaN Thin Layers......Page 230
8.3 Dislocation Mechanisms in Conventional Lateral Epitaxy Overgrowth of GaN......Page 233
8.4 Growth of GaN on Porous SiC Substrates......Page 236
8.5 Growth of GaN on Porous SiN and TiN Interlayers......Page 238
8.5.1 GaN Growth on a TiN Interlayer......Page 239
8.5.2 GaN Growth on a SiN Interlayer......Page 240
8.6 Summary......Page 242
References......Page 243
9.1 Introduction......Page 247
9.2 Resistivity and Hall Effect......Page 248
9.3.1 Fundamentals of DLTS......Page 250
9.3.2 Method of Solving the General Equation......Page 252
9.4 Sample Considerations......Page 253
9.5 Potential Energy Near a Pore......Page 254
9.6 DLTS Data and Analysis......Page 256
References......Page 259
10.1 Introduction......Page 261
10.2 Mn-Doped GaN Crystal......Page 263
10.3 Mn-Doped GaN Thin Films......Page 264
10.3.1 Mn-Doped GaN (1120) Surface......Page 265
10.3.2 Mn-Doped GaN (1010) Surface......Page 268
10.3.3 Mn and C Codoped in GaN (1010) Surface......Page 273
10.4.1 Mn-Doped GaN Nanowires......Page 275
10.4.2 Cr-Doped GaN Nanotubes......Page 278
10.4.3 Cr-Doped GaN Nanohole Arrays......Page 281
10.5.1 Giant Magnetic Moments of MnxN Clusters......Page 284
10.5.2 N-induced Magnetic Transition in Small CrxN Clusters......Page 285
10.6 Summary......Page 286
References......Page 287
11.1 Introduction......Page 291
11.2 Silicon Carbide Support......Page 292
11.3 Heat Effects During Reaction......Page 293
11.4 Reactions on SiC as Catalytic Supports......Page 294
11.5.1 Pt/• -SiC Catalyst for Catalytic Combustion of Carbon Particles in Diesel Engines......Page 295
11.5.3 SiC-Supported MoO3-Carbon-Modified Catalyst for the n-Heptane Isomerization......Page 296
11.5.4 Selective Oxidation of H2S Over SiC-Supported Iron Catalysts into Elemental Sulfur......Page 297
11.5.5 Partial Oxidation of n-Butane to Maleic Anhydride Using SiC-Mixed and Pd-Modified Vanadyl Pyrophosphate (VPO) Catalysts (Case study)......Page 298
References......Page 304
12.1 The Rationale for Implantable Semi-Permeable Materials......Page 307
12.2 The Biology of Soluble Signaling Proteins in Tissue......Page 308
12.3 Measuring Cytokine Secretion In Living Tissues and Organs......Page 310
12.4 Creating a Biocompatible Tissue – Device Interface: Advantages of SiC......Page 311
12.5 The Testing of SiC Membranes for Permeability of Proteins......Page 312
12.6 Improving the Structure of SiC Membranes for Biosensor Interfaces......Page 315
12.7 Theoretical Considerations: Modeling Diffusion through a Porous Membrane......Page 317
12.7.1 Effective Medium Models for a Porous Membrane......Page 318
12.7.2 Comparison with Experiment......Page 320
12.8 Future Development: Marriage of Membrane and Microchip......Page 321
Acknowledgements......Page 323
References......Page 324
Index......Page 327
Color_Plate......Page 335