Physics and Applications of Complex Plasmas

Contents......Page 12
Preface......Page 8
1.1.1 Dust particles in plasmas......Page 18
1.1.2 Weakly coupled and strongly coupled dusty plasmas......Page 24
1.1.3 Experiments on complex plasmas......Page 25
1.2 New Paradigms and Directions of Complex Plasma Research......Page 28
2. Basics of Plasma-Dust Particle Interactions......Page 34
2.1.1 Negatively and positively charged grains......Page 35
2.1.2.1 Orbit Motion Limited approximation......Page 40
2.1.2.2 Charging of small and non-spherical particles......Page 45
2.1.3.1 Dust charging rate......Page 47
2.1.3.2 Kinetic theory of dusty plasmas with variable charge......Page 48
2.1.4 Main forces acting on dust particles in a plasma......Page 52
2.1.5 Dust levitation in a collisionless sheath region......Page 55
2.2.1 Charging dynamics and charge fluctuations......Page 59
2.2.2 Charging in the plasma stream......Page 60
2.2.3 Effect of trapped ions on dust charging and shielding......Page 62
2.2.4 Charge as a function of the grain size......Page 65
2.3 Interactions of Grain Particles with Ion Flows......Page 69
2.3.1 Ion wake behind a charged point-like particle......Page 72
2.3.2 Dust Cooper pairing: Hamiltonian description......Page 77
2.3.3 Wakes behind dipoles and non-spherical particles......Page 82
2.3.3.1 Wakes behind dipoles......Page 83
2.3.3.2 Wakes behind elongated particles (rods)......Page 86
2.3.4 Subsonic plasma wakes......Page 90
2.3.5 Simulations on plasma wakes......Page 97
2.3.5.1 Wake of a single test particle......Page 99
2.3.5.2 Wake of two particles......Page 102
3 . Production and Diagnostics of Complex Plasmas......Page 110
3.1 Discharge Plasmas......Page 112
3.1.1 RF-capacitive systems......Page 114
3.1.2 DC discharges......Page 115
3.1.2.1 Sheath......Page 116
3.1.2.2 Striations......Page 119
3.1.2.3 Double layers......Page 120
3.1.3 Inductively coupled plasmas......Page 122
3.2 Complex Plasmas with Positive Grains......Page 124
3.2.1 UV-induced plasmas......Page 125
3.2.2 Thermal plasmas......Page 127
3.2.3 Nuclear-induced complex plasmas......Page 130
3.3 Traditional Diagnostic Techniques in Complex Plasmas......Page 131
3.3.1 Probe measurements......Page 132
3.3.2 Spectroscopic techniques......Page 136
3.4 Detection and Diagnostics of Dust Particles......Page 140
3.4.1 Detection in laboratory and processing plasmas......Page 141
3.4.2 Dust structure diagnostics......Page 143
3.4.3 Methods of measuring charges on grain particles......Page 147
3.5 Dust Grains as a Diagnostic Tool......Page 150
3.5.1 Plasma sheath diagnostics......Page 151
3.5.2 Spatial profiles of main plasma parameters......Page 155
4.1 Dynamic Phenomena......Page 158
4.1.1 Modeling dust particle dynamics in a plasma sheath......Page 159
4.1.2 Dynamics of particles in chemically active plasmas......Page 167
4.1.2.1 Dynamics of fine particles in silane plasmas......Page 168
4.1.2.2 Levitation in fluorocarbon plasmas......Page 169
4.1.3 Oscillations of a particle in a plasma sheath......Page 175
4.1.4 Diffusion of dust particles......Page 179
4.2 Arrangements and Instability of Confined Dust Particles......Page 186
4.2.1 Modeling stability of dust particles confinement......Page 187
4.2.2 Experiments on particle arrangements and stability......Page 195
4.2.3 Self-excitation of vertical motions of dust particles......Page 202
5. Structures and Phase Transitions in Complex Plasmas......Page 208
5.1.1 Dust-plasma sheath as a self-organized structure......Page 209
5.1.2 Dust voids: observations and main mechanisms......Page 216
5.1.3.1 Collisionless dust voids......Page 219
5.1.3.2 Voids in collision-dominated plasmas......Page 224
5.2 Liquid and Crystal-Like Structures......Page 230
5.2.1 Structures in capacitively coupled RF discharge......Page 231
5.2.2 ICP and DC discharge structures......Page 236
5.2.3 Ordered structures in thermal plasmas......Page 240
5.2.4 Dust structures in nuclear and UV induced complex plasmas......Page 244
5.3.1 Order controlling parameters in a complex plasma......Page 250
5.3.2 Criteria of phase transitions......Page 254
5.3.3 Experimental observations of phase transitions......Page 258
6. Waves and Instabilities in Complex Plasmas......Page 262
6.1.1 Dust-lattice waves......Page 264
6.1.2 Experiments on dust-lattice waves......Page 268
6.1.3 Dust-lattice transverse waves with out-of plane motions......Page 273
6.1.3.1 Oscillation modes in one-dimensional chains of particles......Page 274
6.1.3.2 Oscillation modes in two vertically arranged one-dimensional chains......Page 276
6.1.4 Dust-lattice waves in the arrays of rod-like particles......Page 281
6.1.5 Waves in chains of magnetized particles......Page 286
6.1.5.1 Compressional and bending modes......Page 289
6.1.5.2 Angular magnetic lattice modes......Page 292
6.2.1 Langmuir waves......Page 293
6.2.2 Ion-acoustic waves......Page 297
6.2.3 Dust-acoustic waves......Page 300
6.2.4.1 Ion-acoustic surface waves at the dielectric-complex plasma interface......Page 304
6.2.4.2 Electrostatic surface waves at the dusty plasma-metal interface......Page 306
6.2.4.3 Electromagnetic surface waves in a dust-contaminated large-area plasma source......Page 308
6.3 Waves in Weakly Coupled Magnetized Complex Plasmas......Page 311
6.3.1 The Alfven resonance......Page 313
6.3.2 Waves in a weakly non-uniform plasma......Page 314
6.3.3.1 Dispersion......Page 317
6.3.3.2 Damping......Page 319
6.4.1 Dust ion-acoustic instability......Page 321
6.4.2 Dust-acoustic instability......Page 325
6.4.3 Buneman “dust-ion streaming” instability......Page 330
6.4.4 Parametric and modulational instabilities in magnetized complex plasmas......Page 333
6.4.4.1 Parametric pumping......Page 334
6.4.4.2 Modulational instabilities......Page 335
6.4.5 Other instabilities......Page 337
7. Fine Particles in Industrial Applications......Page 340
7.1 Growth and Characterization of Nano- and Micron-Sized Particles......Page 341
7.1.1.1 Silane plasmas......Page 342
7.1.1.2 Hydrocarbon plasmas......Page 347
7.1.1.3 Fluorocarbon plasmas......Page 354
7.1.2 Effects of fine particles on discharge stability......Page 357
7.1.3 Particle growth in plasma-enhanced sputtering facilities......Page 362
7.1.4 Problems of particle detection in the nanometer range......Page 365
7.2.1 Particulate powders as process contaminants in microelectronics......Page 371
7.2.2 Removal and growth suppression of dust particles......Page 373
7.2.3 Role of dust particles in fusion reactors......Page 377
7.3.1 Nanoparticles in the plasma-assisted assembly of carbon-based nanostructures......Page 380
7.3.2 Nanopowders in plasma-enhanced chemical vapor deposition of nanostructured silicon-based films......Page 386
7.3.3 High-rate cluster and particulate deposition on nanostructured surfaces: a new paradigm in thin film fabrication......Page 392
7.3.4 Particle size as a key factor in nano-scale technologies......Page 398
7.3.5 Other industrial applications of nano- and micron- sized particles......Page 403
7.3.6 Concluding remarks......Page 411
Conclusions......Page 416
Bibliography......Page 420
Index......Page 452