Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices

Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices......Page 2
Preface and Committee Members......Page 5
Table of Contents......Page 8
I. Technology of Semiconductor-On-Insulator Structures and Devices......Page 10
ZnO Films and Crystals on Bulk Silicon and SOI Wafers: Formation, Properties and Applications......Page 11
Influence of Hydrogen Plasma Treatment on a-SiC Resistivity of the SiC/SiO2/Si Structures......Page 28
Diamond – Graphite Heterostructures Formed by Nitrogen and Hydrogen Implantation and Annealing......Page 33
Hydrogen Gettering within Processed Oxygen-Implanted Silicon......Page 40
II. Physics of New SOI Devices......Page 46
Gate Control of Junction Impact Ionization Avalanche in SOI MISFETs: Theoretical Model......Page 47
Semi-Analytical Models of Field-Effect Transistors with Low-Dimensional Channels......Page 54
Model of Nonuniform Channel for the Charge Carrier Transport in Nanoscale FETs......Page 61
High Temperature Effects on Harmonic Distortion in Submicron SOI Graded-Channel MOSFETs......Page 68
Some Issues of Modeling the Double Barrier Metal-Oxide-Semiconductor Tunnel Structures......Page 77
Electrical Properties of High-K LaLuO3 Gate Oxide for SOI MOSFETs......Page 86
Effects of High–Energy Neutrons on Advanced SOI MOSFETs......Page 93
III. SOI Sensors and MEMS......Page 104
Polysilicon on Insulator Structures for Sensor Application at Electron Irradiation & Magnetic Fields......Page 105
On-Chip Tensile Testing of the Mechanical and Electro-Mechanical Properties of Nano-Scale Silicon Free-Standing Beams......Page 113
Non-Standard FinFET Devices for Small Volume Sample Sensors......Page 123
3D SOI Elements for System-on-Chip Applications......Page 132
Routes towards Novel Active Pressure Sensors in SOI Technology......Page 140
IV. Nanodots, Nanowires and Nanofilms......Page 151
Photovoltage Performance of Ge/Si Nanostructures Grown on Intermediate Ultrathin SiOX Layers......Page 152
Interface and Bulk Properties of High-K Gadolinium and Neodymium Oxides on Silicon......Page 160
Effect of Ge Nanoislands on Lateral Photoconductivity of Ge-SiOX-Si Structures......Page 172
A Model of the Evolution of the Au/Si Droplet Ensembles during Rapid Thermal Annealing at High Temperatures......Page 180
The Nanometer Scaled Defects Induces with the Dislocation Motion in II-VI Insulated Semiconductors......Page 188
Keywords Index......Page 196
Authors Index......Page 198