Nanoelectronics : materials, devices, applications

Content: Forewords     PART I. Fundamentals on Nanoelectronics  Introduction  More-than-Moore Technologies and Applications  Logic Devices Challenges and Opportunities in the NanoEra  Memory Technologies     PART II. Devices in the Nano Era  Beyond CMOS Low Power Devices: Steep-Slop Switches for Computation and Sensing  RF CMOS  Smart Power Devices Nanotechnology  Integrated Sensors and Actuators: Their Nano-Enabled Evolution into the 21st Century     PART III. Advanced Materials and Materials Combination  Silicon Wafers as a Foundation for Growth  Nanoanalysis     PART IV. Semiconductor Smart Manufacturing  Front-End Processes  Lithography for Nano-Electronics  Reliability of Nano-Electronic Devices     PART V. Circuit Design in Emerging Nanotechnologies  Logic Synthesis of CMOS Circuits and Beyond  System Design in the Cyber-Physical Era  Heterogeneous Systems  Nanotechnologies Testing     PART VI. Nanoelectronics (Enabled Sectors) and Societal Challenges  Introducing Industrial Applications  Health  Smart Energy  Validation of Highly Automated Safe and Secure Vehicles  Nanotechnology for Consumer Electronics     PART VII. From Device to Systems  Nanoelectronics for Smart Cities     PART VIII. Industrialisation - Economics/Markets - Business Values - European Visions - Technology Renewal and Extended Functionality  Europe Positioning in Nanoelectronics  30 Years of Cooperative Research and Innovation in Europe: The Case for Micro and Nano-Electronics and Smart Systems Integration  The Education Challenge  Conclusions Foreword by Andreas Wild XXV Nanoelectronics for Digital Agenda by Paul Rubig and Livio Baldi XXXVII Electronics on the EU   s Political Agenda by Carl-Christian Buhr XLI Preface by Livio Baldi and Marcel H. van de Voorde XLVII Volume 1 Part One Fundamentals on Nanoelectronics 1 1 A Brief History of the Semiconductor Industry 3Paolo A. Gargini 1.1 From Microelectronics to Nanoelectronics and Beyond 3 1.2 The Growth of the Semiconductor Industry: An Eyewitness Report 22 Acknowledgments 52 2 More-than-Moore Technologies and Applications 53Joachim Pelka and Livio Baldi 2.1 Introduction 53 2.2    More Moore    and    More-than-Moore    54 2.3 From Applications to Technology 56 2.4 More-than-Moore Devices 58 2.5 Application Domains 61 2.6 Conclusions 70 Acknowledgement 71 References 71 3 Logic Devices Challenges and Opportunities in the Nano Era 73Frederic Boeuf 3.1 Introduction: Dennard   s Scaling and Moore   s Law Trends and Limits 73 3.2 Power Performance Trade-Off for 10 nm, 7 nm, and Below 75 3.3 Device Structures and Materials in Advanced CMOS Nodes 89 4 Memory Technologies 113Barbara De Salvo and Livio Baldi 4.1 Introduction 113 4.2 Mainstream Memories (DRAM and NAND): Evolution and Scaling Limits 115 4.3 Emerging Memories Technologies 120 4.4 Emerging Memories Architectures 130 4.5 Opportunities for Emerging Memories 133 4.6 Conclusions 134 Part Two Devices in the Nano Era 137 5 Beyond-CMOS Low-Power Devices: Steep-Slope Switches for Computation and Sensing 139Adrian M. Ionescu 5.1 Digital Computing in Post-Dennard Nanoelectronics Era 139 5.2 Beyond CMOS Steep-Slope Switches 143 5.3 Convergence of Requirements for Energy-Efficient Computing and Sensing Technologies: Enabling Smart Autonomous Systems for IoE 148 5.4 Conclusions and Perspectives 149 References 151 6 RF CMOS 153Patrick Reynaert, Wouter Steyaert and Marco Vigilante 6.1 Introduction 153 6.2 Toward 5G and Beyond 153 6.3 CMOS @ Millimeter-Wave: Challenges and Opportunities 156 6.4 Terahertz in CMOS 159 6.5 Conclusions 161 References 162 7 Smart Power Devices Nanotechnology 163Gaudenzio Meneghesso, Peter Moens, Mikael OEstling, Jan Sonsky, and Steve Stoffels 7.1 Introduction 163 7.2 Si Power Devices 164 7.3 SiC Power Semiconductor Devices 176 7.4 Power GaN Device Technology 184 7.5 New Materials and Substrates for WBG Power Devices 198 References 201 8 Integrated Sensors and Actuators: Their Nano-Enabled Evolution into the Twenty-First Century 205Frederik Ceyssens and Robert Puers 8.1 Introduction 205 8.2 Sensors 208 8.3 Actuators 214 8.4 Molecular Motors 217 8.5 Transducer Integration and Connectivity 218 8.6 Conclusion 219 References 220 Part Three Advanced Materials and Materials Combinations 223 9 Silicon Wafers as a Foundation for Growth 225Peter Stallhofer 9.1 Introduction 225 9.2 Si Availability and Technologies to Produce Hyperpure Silicon in Large Quantities 226 9.3 The Exceptional Physical and Technological Properties of Monocrystalline Silicon for Device Manufacturing 237 9.4 Silicon and New Materials 241 9.5 Example of Actual Advanced 300 mm Wafer Specification for Key Parameters 242 Acknowledgments 242 References 242 10 Nanoanalysis 245Narciso Gambacorti 10.1 Three-Dimensional Analysis 246 10.2 Strain Analysis 250 10.3 Compositional and Chemical Analysis 256 10.4 Conclusions 260 Glossary 261 Acknowledgments 262 References 262 Part Four Semiconductor Smart Manufacturing 265 11 Front-End Processes 267Marcello Mariani and Nicolas Posseme 11.1 A Standard MOS FEOL Process Flow 267 11.2 Cleaning 268 11.3 Silicon Oxidation 271 11.4 Doping and Dopant Activation 272 11.5 Deposition 275 11.6 Etching 279 Bibliography 288 12 Lithography for Nanoelectronics 289Kurt Ronse 12.1 Historical Perspective of Lithography for Nanoelectronics 289 12.2 Challenges for Lithography in Future Technology Nodes 292 12.3 Pattern Roughness: The Biggest Challenge for Geometrical Scaling 311 12.4 Lithography Options in Previous and Future Technology Nodes 313 References 315 13 Reliability of Nanoelectronic Devices 317Anthony S. Oates and K.P. Cheung 13.1 Introduction 317 13.2 Interconnect Reliability Issues 318 13.3 Transistor Reliability Issues 322 13.4 Radiation-Induced Soft Errors in Silicon Circuits 325 13.5 Conclusions 327 Acknowledgments 328 References 328 Volume 2 Part Five Circuit Design in Emerging Nanotechnologies 331 14 Logic Synthesis of CMOS Circuits and Beyond 333Enrico Macii, Andreas Calimera, Alberto Macii, and Massimo Poncino 14.1 Context and Motivation 333 14.2 The Origin: Area and Delay Optimization 335 14.3 The Power Wall 340 14.4 Synthesis in the Nanometer Era: Variation-Aware 345 14.5 Emerging Trends in Logic Synthesis and Optimization 350 14.6 Summary 358 References 358 15 System Design in the Cyber-Physical Era 363Pierluigi Nuzzo and Alberto Sangiovanni-Vincentelli 15.1 From Nanodevices to Cyber-Physical Systems 363 15.2 Cyber-Physical System Design Challenges 365 15.3 A Structured Methodology to Address the Design Challenges 370 15.4 Platform-Based Design with Contracts and Related Tools 380 15.5 Conclusions 390 Acknowledgments 390 References 390 16 Heterogeneous Systems 397Daniel Lapadatu 16.1 Introduction 397 16.2 Heterogeneous Systems Design 400 16.3 Heterogeneous Systems Integration 414 16.4 Testing the Performance and Reliability of Heterogeneous Systems 418 16.5 Conclusions 423 Acknowledgments 424 References 424 17 Nanotechnologies Testing 427Ernesto Sanchez and Matteo Sonza Reorda 17.1 Introduction 427 17.2 Background 428 17.3 Current Challenges 433 17.4 Testing Advanced Technologies 437 17.5 Conclusions 444 References 444 Part Six Nanoelectronics-Enabled Sectors and Societal Challenges 447 18 Industrial Applications 449L. Baldi and M. Van de Voorde 18.1 Introduction 449 18.2 Health, Demographic Change, and Well-being 450 18.3 Food Security, Sustainable Agriculture and Forestry, Marine and Maritime and Inland Water Research, and the Bioeconomy 450 18.4 Secure, Clean, and Efficient Energy 451 18.5 Smart, Green, and Integrated Transport 451 18.6 Climate Action, Environment, Resource Efficiency, and Raw Materials 452 18.7 Europe in a Changing World     Inclusive, Innovative, and Reflective Societies 452 18.8 Secure Societies     Protecting Freedom and Security of Europe and Its Citizens 452 19 Health 455Walter De Raedt and Chris Van Hoof 19.1 Introduction 455 19.2 The Worldwide Context 455 19.3 Requirements and Use Cases for Emerging Wearables 459 19.4 Conclusions 467 References 468 20 Smart Energy 471Moritz Loske 20.1 Energy Revolution     Why Energy Does Have to Become Smart? 471 20.2 Applications of Smart Energy Systems and their Societal Challenges 476 20.3 Nanoelectronics as Key Enabler for Smart Energy Systems 483 20.4 Summary and Outlook 486 References 487 21 Validation of Highly Automated Safe and Secure Vehicles 489Michael Paulweber 21.1 Introduction 489 21.2 Societal Challenges 490 21.3 Automated Vehicles 491 21.4 Key Requirements to Automated Driving Systems 493 21.5 Validation Challenges 496 21.6 Validation Concepts 497 21.7 Challenges to Electronics Platform for Automated Driving Systems 498 21.8 Conclusion 499 References 499 22 Nanotechnology for Consumer Electronics 501Hannah M. Gramling, Michail E. Kiziroglou, and Eric M. Yeatman 22.1 Introduction 501 22.2 Communications 503 22.3 Energy Storage 506 22.4 Sensors 509 22.5 Internet-of-Things Applications 514 22.6 Display Technologies 515 22.7 Conclusions 520 References 520 Part Seven From Device to Systems 527 23 Nanoelectronics for Smart Cities 529Joachim Pelka 23.1 Why    Smart Cities   ? 529 23.2 Infrastructure: All You Need Is Information 531 23.3 Nothing Will Work Without Energy 535 23.4 Application: What Can Be Done with Information 537 23.5 Trusted Hardware: Not Only for Data Security 546 23.6 Closing Remarks 548 Acknowledgement 548 Part Eight Industrialization: Economics/Markets     Business Values     European Visions     Technology Renewal and Extended Functionality 551 24 Europe Positioning in Nanoelectronics 553Andreas Wild 24.1 What is the    European    Industry 553 24.2 European Strategic Initiatives 554 24.3 Policy Implementation Instruments 556 24.4 Europe   s Market Position 558 24.5 European Perspectives 564 25 Thirty Years of Cooperative Research and Innovation in Europe: The Case for Micro- and Nanoelectronics and Smart Systems Integration 567Dirk Beernaert and Eric Fribourg-Blanc 25.1 Introduction 567 25.2 Nanoelectronics and Micro-Nanotechnology in the European Research Programs 570 25.3 A Bit of History Seen from an ICT: Nanoelectronics Integrated Hardware Perspective 571 25.4 ESPRIT I, II, III, and IV 572 25.5 The 5th Framework (1998   2002) 574 25.6 The 6th Framework (2002   2006) 575 25.7 The 7th Framework (2007   2013) 576 25.8 H2020 (2014   2020) 579 25.9 Some Results of FP7 and H2020 581 25.10 Results of the JTI ENIAC and ARTEMIS 583 25.11 An Analysis of Beyond CMOS in FP7 and H2020 584 25.12 MEMS, Smart Sensors, and Devices Related to Internet of Things 586 25.13 From FP6 to FP7: An integrated approach for micro-nanoelectronics and micro-nanosystems 587 25.14 Enabling the EU 2050+ Future: Superintelligence, Humanity, and the    Singularity    589 25.15 EU 2050+/-: Driven by a Superintelligence Ambient 590 25.16 Conclusion 592 26 The Education Challenge in Nanoelectronics 595Susanna M. Thon, Sean L. Evans, and Annastasiah Mudiwa Mhaka 26.1 Introduction 595 26.2 Traditional Programs in Nanoelectronics Education 596 26.3 Challenges in Nanoelectronics Education 600 26.4 New Cross-Discipline Applications 604 26.5 Future Education Programs 605 Acknowledgments 610 References 610 27 Conclusions 613Robert Puers, Livio Baldi, and Marcel Van de Voorde 613 Index 617