Micro and Smart Devices and Systems

Front Matter....Pages i-xxvi
Front Matter....Pages 1-1
Design, Development, Fabrication, Packaging, and Testing of MEMS Pressure Sensors for Aerospace Applications....Pages 3-17
MEMS Piezoresistive Accelerometers....Pages 19-34
A Handheld Explosives Detector Based on Amplifying Fluorescent Polymer....Pages 35-47
Development of a Surface Plasmon Resonance-Based Biosensing System....Pages 49-72
Design and Development of Ion-Sensitive Field-Effect Transistor and Extended-Gate Field-Effect Transistor Platforms for Chemical and Biological Sensors....Pages 73-87
Front Matter....Pages 89-89
RF MEMS Single-Pole-Multi-Throw Switching Circuits....Pages 91-109
Piezoelectric Actuators in Helicopter Active Vibration Control....Pages 111-125
Design and Development of a Piezoelectrically Actuated Micropump for Drug Delivery Application....Pages 127-141
Development and Characterization of PZT Multilayered Stacks for Vibration Control....Pages 143-154
Development of Piezoelectric and Electrostatic RF MEMS Devices....Pages 155-177
Front Matter....Pages 179-179
Nickel–Titanium Shape Memory Alloy Wires for Thermal Actuators....Pages 181-198
Processing and Characterization of Shape Memory Films for Microactuators....Pages 199-211
Piezoceramic Coatings for MEMS and Structural Health Monitoring....Pages 213-228
Cost-Effective Processing of Polymers and Application to Devices....Pages 229-247
Chemical Synthesis of Nanomaterials and Structures, Including Nanostructured Thin Films, for Different Applications....Pages 249-263
A Study on Hydrophobicity of Silicon and a Few Dielectric Materials....Pages 265-283
Materials for Embedded Capacitors, Inductors, Nonreciprocal Devices, and Solid Oxide Fuel Cells in Low Temperature Co-fired Ceramic....Pages 285-301
Smart Materials for Energy Harvesting, Energy Storage, and Energy Efficient Solid-State Electronic Refrigeration....Pages 303-315
Front Matter....Pages 317-317
Vibratory MEMS and Squeeze Film Effects....Pages 319-338
Streaming Potential in Microflows and Nanoflows....Pages 339-353
Front Matter....Pages 317-317
A Simulation Module for Microsystems using Hybrid Finite Elements: An Overview....Pages 355-373
Structural Health Monitoring: Nonlinear Effects in the Prognostic Analysis of Crack Growth in Structural Joints....Pages 375-383
Front Matter....Pages 385-385
Smart e-Textile-Based Nanosensors for Cardiac Monitoring with Smart Phone and Wireless Mobile Platform....Pages 387-401
Polymer-Based Micro/Nano Cantilever Electro-Mechanical Sensor Systems for Bio/Chemical Sensing Applications....Pages 403-422
Smart Materials Technology for Aerospace Applications....Pages 423-437
Electronic Circuits for Piezoelectric Resonant Sensors....Pages 439-452
A Universal Energy Harvesting Scheme for Operating Low-Power Wireless Sensor Nodes Using Multiple Energy Resources....Pages 453-466
RF MEMS True-Time-Delay Phase Shifter....Pages 467-485
MEMS Sensors for Underwater Applications....Pages 487-502
Back Matter....Pages 503-508