MEMS and Nanotechnology, Volume 2: Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics

Front Matter....Pages i-ix
Nanomechanical standards based on the intrinsic mechanics of molecules and atoms....Pages 1-7
Magneto-Mechanical MEMS Sensors for Bio-Detection....Pages 9-15
Recent Progress of Piezoelectric MEMS for Energy Harvesting Devices....Pages 17-23
Performance of Piezoelectric Power Generator in Environmental Conditions....Pages 25-31
Comparison of Transduction Efficiency for Energy Harvester between Piezoelectric Modes....Pages 33-39
Size Effects Associated with Microcompression Experiments on Single-Crystal Magnesium....Pages 41-42
Mechanically probing time-dependent mechanics in metallic MEMS....Pages 43-48
Small mass measurements for tuning fork-based atomic force microscope cantilever spring constant calibration....Pages 49-56
Linear and Nonlinear Mass Sensing Using Piezoelectrically-Actuated Microcantilevers....Pages 57-65
Calibrating Force and Displacement in the Face of Property Variation....Pages 67-74
Standardization of Nanoscale Interfacial Experiments Using MEMS....Pages 75-79
Arrays of Robust Carbon Nanotube-Based NEMS: A Combined Experimental/Computational Investigation....Pages 81-82
Electro-Mechanical Response of Carbon Nanotube Reinforced Polymer Composites....Pages 83-84
A Test Platform for Systematic Investigation of Tribology in MEMS....Pages 85-95
Full Optical Scatter Analysis for Novel Photonic and Infrared Metamaterials....Pages 97-105
Thermal Management and Metamaterials....Pages 107-113
MEMS integrated metamaterial structure having variable resonance for RF applications....Pages 115-120
Characterization and Testing of Adaptive RF Metamaterial Structure Using MEMS....Pages 121-127
Design of a microfluidic pump, based on conducting polymers....Pages 129-138
Micromotor Fabrication by Surface Micromachining Technique.....Pages 139-146
Improvement of Piezoresistive Microcantilever Beams for Gas Detection and Sensing....Pages 147-155
Investigation of the Young’s Modulus of Fibers in an Electrospun PCL Scaffold Using AFM and its Correlation to cell Attachment....Pages 157-162
Recent Progress in E-Beam Lithography for SEM Patterning....Pages 163-166
Analysis of Scattering-type Scanning Near-field Optical Microscopy for Residual-strain Measurements....Pages 167-171
Experimental Methods for Tensile Testing of Metallic Thin Films at High Temperatures....Pages 173-180
Surface Texturing Using Gold Nanoparticles to Reduce Adhesion in MEMS....Pages 181-187
Design of Microswitch Systems Avoiding Stiction due to Surface Contact....Pages 189-195
Measurement of adhesive force between two mica surfaces with multiple beam interferometry....Pages 197-201
Performance Studies of A Prototypical MEMS Thermal Actuator....Pages 203-208
A New Electrothermal Microactuator with Z-shaped Beams....Pages 209-213
Electrothermal Actuators for Integrated MEMS Safe and Arming Devices....Pages 215-222
Contrast Reversal on Surface Plasmon Resonance Reflectivity in Nickel and Nickel Alloy Films....Pages 223-228
Effect of Accelerated Ultra Violet and Thermal Exposure on Nano Scale Mechanical Properties of Nylon Fibers....Pages 229-235
High Thermal Conductivity Polyurethane-Boron Nitride Nanocomposite Encapsulants....Pages 237-242
Advanced hard mask approach of ICs copper interconnects processes integration....Pages 243-252
Advances in Thin Film Nanoindentation....Pages 253-260
Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications....Pages 261-266
Fracture Between Self-Assembled Monolayers....Pages 267-267
Control and Quantification of Residual Stresses in Anodically Bonded MEMS Structures....Pages 269-273
Sub-micron Scale Mechanical Properties of Polypropylene Fibers Exposed to Ultraviolet and Thermal Degradation....Pages 275-281