Mechanical Properties of Structural Films (ASTM Special Technical Publication, 1413)

Foreword......Page 4
Contents......Page 5
Overview......Page 7
Surface Topology and Fatigue in Si MEMS Structures......Page 9
Cross Comparison of Direct Strength Testing Techniques on Polysilicon Films......Page 22
Fatigue and Fracture in Membranes for MEMS Power Generation......Page 34
Effects of Microstructure on the Strength and Fracture Toughness of Polysilicon: A Wafer Level Testing Approach......Page 43
Fatigue Crack Growth of a Ni-P Amorphous Alloy Thin Film......Page 58
Direct Tension and Fracture Toughness Testing Using the Lateral Force Capabilities of a Nanomechanical Test System......Page 68
Fracture Behavior of Micro-Sized Specimens with Fatigue Pre- Crack Prepared from a Ni-P Amorphous Alloy Thin Film......Page 78
Integrated Platform for Testing MEMS Mechanical Properties at the Wafer Scale by the IMaP Methodology......Page 89
Influence of the Film Thickness on Texture, Residual Stresses and Cracking Behavior of PVD Tungsten Coatings Deposited on a Ductile Substrate......Page 100
High Accuracy Measurement of Elastic Constants of Thin Films by Surface Brillouin Scattering......Page 113
Effect of Nitrogen Feedgas Addition on the Mechanical Properties of Nano-Structured Carbon Coatings......Page 131
Characterization of the Young\'s Modulus of CMOS Thin Films......Page 143
Derivation of Elastic Properties of Thin Films from Measured Acoustic Velocities......Page 156
Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression......Page 172
Mechanical Tests of Free-Standing Aluminum Microbeams for MEMS Application......Page 206
Tensile Testing of Thin Films Using Electrostatic Force Grip......Page 217
Tensile Tests of Various Thin Films......Page 232
Ductile Thin Foils of Ni3AI......Page 251
Microstructural and Mechanical Characterization of Electrodeposited Gold Films 4......Page 265
Determining the Strength of Brittle Thin Films for MEMS......Page 281
Thermomechanical Characterization of Nickel-Titanium- Copper Shape Memory Alloy Films......Page 294
Deformation and Stability of Gold/Polysilicon Layered MEMS Plate Structures Subjected to Thermal Loading......Page 307
The Effects of Radiation on the Mechanical Properties of Polysilicon and Polydiamond Thin Films......Page 319
Author Index......Page 329
Subject Index......Page 331