Laser Processing and Diagnostics: Proceedings of an International Conference, University of Linz, Austria, July 15–19, 1984

Front Matter....Pages I-XI
Front Matter....Pages 1-1
Fundamentals of Laser Annealing....Pages 2-13
Inhomogeneous Energy Deposition in Crystalline Silicon with Picosecond Pulses of One Micron Radiation....Pages 14-18
Instabilities of Crystallization in Amorphous Germanium Under Pulsed Laser Irradiation....Pages 19-24
Time Resolved Calorimetry of 30 nm Te-Films During Laser Annealing....Pages 25-28
Pulsed Laser Annealing of GaAs: A Comparison Between Calculation and Experiment....Pages 29-34
Melting Model for UV Lasers....Pages 35-39
Applications of Laser Annealing....Pages 40-49
Optical Regulation Using Crystalline Silicon....Pages 50-53
Optical and Electrical Properties of Laser Annealed Heavily Doped Silicon....Pages 54-60
CW-Laser Annealing of CdTe Epitaxial Layers....Pages 61-66
InSb Optical and Electrical Property Changes Induced by Multi-Pulsed TEA CO 2 -Laser Irradiation....Pages 67-72
Laser Processing in Silicon on Insulator (SOI) Technologies....Pages 73-84
Laser Recrystallisation of Silicon-on-Oxide....Pages 85-89
Fundamentals of Laser Micromachining of Metals....Pages 90-106
Surface Modelling During Laser Microprocessing....Pages 107-113
Front Matter....Pages 115-115
Electronic Structure of Adsorbed Layers....Pages 116-129
Laser Photochemistry of Molecular Systems Involving Gas-Surface Interactions....Pages 130-136
Selective Laser-Induced Heterogeneous Chemistry on Surfaces....Pages 137-142
Spectroscopy of Adsorbates by Transient Laser Calorimetry....Pages 143-147
Laser Vaporization of Clean and CO-Covered Polycrystalline Copper Surfaces....Pages 148-153
Front Matter....Pages 115-115
Laser Investigation of the Dynamics of Molecule-Surface Interactions....Pages 154-163
Front Matter....Pages 165-165
Laser-Induced Chemical Vapor Deposition....Pages 166-182
Structure of Platinum and Tin Films Formed by Laser-Induced Chemical Vapor Deposition....Pages 183-187
Laser Deposition of Single Crystalline GaAs and Stimulated Sheet Doping....Pages 188-196
IR Laser Photo-Assisted Deposition of Silicon Films....Pages 197-204
IR Laser Pyrolysis of Silane....Pages 205-209
Multiphoton Excitation and Dissociation of SiH 4 Exposed to CO 2 Laser Radiation....Pages 210-214
Deposition of Silicon Films by Photodissociation of Silane Under IR Laser Irradiation....Pages 215-220
Characterization of Reactive Intermediates in Silicon Etching and Deposition Using Laser Techniques....Pages 221-224
The Physics of Ultraviolet Photodeposition....Pages 225-233
Low Temperature Growth of HgTe by a UV Photosensitisation Method....Pages 234-238
Applications of Excimer Lasers to Semiconductor Processing....Pages 239-251
Linear-Focused ArF Excimer Laser Beam for Depositing Hydrogenated Silicon Films....Pages 252-256
Analysis of UV Laser-Induced Heterogeneous Deposition: Platinum....Pages 257-262
Laser Photolytic Deposition of Metals on Indium Phosphide....Pages 263-268
Laser Photochemical Deposition of Metals....Pages 269-273
Laser Assisted Pyrolytic Growth and Photochemical Deposition of Thin Oxide Films....Pages 274-287
Laser-Induced Oxidation of Silicon Surfaces....Pages 288-299
Laser-Assisted Chemical Etching of Inorganic Materials: Mechanistic Studies....Pages 300-314
Maskless Dry Etching of GaAs by Focused Laser Beam....Pages 315-319
Front Matter....Pages 165-165
Laser Induced Reduction and Etching of Oxidic Perovskites....Pages 320-322
Laser Enhanced Plating and Etching: A Review....Pages 323-331
Laser Surface Modification Below a Liquid Layer....Pages 332-336
Selectivity of Etching III–V Compounds by Laser-Induced Electrochemistry....Pages 337-338
Photochemical Microetching of InP....Pages 339-342
Ultraviolet Laser Ablation of Organic Polymer Films....Pages 343-354
Laser-Induced Synthesis of Compound Semiconductors....Pages 355-365
Laser Synthesis of Thin Film CuInSe 2 ....Pages 366-369
Metal/Silicon Reactions Using Pulsed Excimer and Ruby Lasers....Pages 370-374
Structural Investigation of Laser Processed PZT Ceramics....Pages 375-378
Light-Induced Sublimation of Cadmium Sulphide....Pages 379-385
Laser Direct Writing Applications....Pages 386-395
Laser Fabrication of Integrated Circuits....Pages 396-416
Front Matter....Pages 417-417
Thermal and Acoustic Techniques for Monitoring Pulsed Laser Processing....Pages 418-424
Temperature Diagnostics for Laser Writing....Pages 425-436
Laser Selective Photoionization Technique: Photoion Beam Epitaxy and Semiconductor Trace Impurity Diagnostics....Pages 437-445
Optical Microanalysis of Device Materials and Structures....Pages 446-457
Laser Diagnostics of Submicron VLSI-Structures....Pages 458-463
Determination of the Mechanical Amplitude Distribution of Quartz Crystal Resonators by Use of a New Noninterferometric Laser Speckle Vibration Measurement System....Pages 464-468
Characterization of Laser Induced Defects in (Al,Ga)As by Photoetching and TEM Measurements....Pages 469-474
Front Matter....Pages 417-417
Optical Characterization of Implantation Damage Recovery and Electrical Activation in GaAs by Raman Scattering....Pages 475-479
Characterization of Gallium Arsenide Layers on Insulators with Germanium Interface Islands....Pages 480-485
Surface-Enhanced Raman Scattering as a Diagnostic Method in Preparing Organic Semiconductor Films....Pages 486-490
Raman-Microsampling Technique Applying Optical Levitation by Radiation Pressure....Pages 491-496
Photothermal Analysis of Thin Films....Pages 497-501
Front Matter....Pages 503-503
Raman Diagnostics of Heterogeneous Chemical Processes....Pages 504-514
Laser Spectroscopy and Gas-Phase Chemistry in CVD....Pages 515-525
Laser Diagnostic Studies of Plasma Etching and Deposition....Pages 526-529
Light Scattering Diagnostics of Gas-Phase Epitaxial Growth (MOCVD-GaAs)....Pages 530-535
On the Generation of C 2 -Radicals by IR-Multiple-Photon Dissociation....Pages 536-541
Back Matter....Pages 543-554