Ion Implantation in Semiconductors and Other Materials

Front Matter....Pages i-xii
Front Matter....Pages 1-1
Radiation Damage in Metals and Semiconductors....Pages 3-16
Ionization Effects in Self-Interstitial Migration and Implant Damage Annealing in Silicon....Pages 17-17
Internal Friction Study of Point Defects in Boron-Implanted Silicon....Pages 19-30
Strain Induced Effects on EPR Centers in Silicon Generated By P + Ion Implantation....Pages 31-38
Calorimetric Determination of Optical Absorption in Proton-Bombarded GaAs....Pages 39-48
Defect Aggregation in Ion-Implanted GaAs....Pages 49-58
On Silicon Amorphisation During Different Mass Ions Implantation....Pages 59-71
Front Matter....Pages 73-73
The Depth Distribution of Phosphorus Ions Implanted into Silicon Crystals....Pages 75-85
Arsenic Implanted and Implanted-Diffused Profiles in Silicon Using Secondary Ion Emission and Differential Resistance....Pages 87-98
The Effect of Ion Implantation on the Lattice Location of Arsenic in Arsenic — Doped Si....Pages 99-110
Concentration Profiles of Arsenic Implanted in Silicon....Pages 111-118
Energy Dependence and Annealing Behaviour of Boron Range Distributions in Silicon....Pages 119-131
Experimental Analysis of Concentration Profiles of Boron Implanted in Silicon....Pages 133-145
Channeling Analysis and Electrical Behavior of Boron Implanted Silicon....Pages 147-157
Si-SiO 2 Interface States Induced by Implantation of Various Ion Species....Pages 159-168
Front Matter....Pages 169-169
Theory of the Spatial Distributions of Ion Range and Energy Deposition....Pages 171-192
Theoretical and Experimental Studies on Lateral Spread of Implanted Ions....Pages 193-202
Determination of the Critical Dose for Different Mass Ions Implanted into Silicon....Pages 203-214
Boron Doping Profiles and Annealing Behavior of Amorphous Implanted Silicon Layers....Pages 215-224
Ranges and Distributions of Ions Implanted in Dielectrics....Pages 225-241
Front Matter....Pages 169-169
Computation of Third Central Moments for Projected Range Distributions of Common Ion-Implanted Dopants in Silicon....Pages 243-253
Front Matter....Pages 255-255
The Influence of the Amorphous Phase on Boron Atom Distributions in Ion Implanted Silicon....Pages 257-266
The Application of Ion Implantation to the Study of Diffusion of Boron in Silicon....Pages 267-274
The Isothermal Annealing of Defects Created in Phosphorus Ion Doped Silicon by Additional Bombardment with Phosphorus Ions....Pages 275-284
Physical Profile Measurements in Insulating Layers Using the Ion Analyser....Pages 285-294
Lattice Location of Low-Z Impurities in Medium-Z Targets Using Ion-Induced X-Rays....Pages 295-303
Ion Implantation Damage Gettering and Phosphorus Diffusion Gettering of Cu and Au in Silicon....Pages 305-315
The Diffusion of Cu Through Si and Gettering at Ion Damaged Surface Layers in the Presence of O....Pages 317-329
Front Matter....Pages 331-331
Photoluminescence, Optical Absorption, and Cathodoluminescence in Ion Implanted CdS....Pages 333-351
Annealing Studies of Broad-Band Luminescence from Ion-Implanted ZnSe....Pages 353-362
Thermoluminescence and Related Experiments on Br-Implanted ZnS Single Crystals....Pages 363-372
Lattice Disorder in Br, Cl, and F Implanted CdS — Channeling Study....Pages 373-383
Lattice Disorder in Br, Cl, and F Implanted CdS — Optical Reflection Study....Pages 385-394
Electroluminescence and Photoluminescence of N + Implanted CdS....Pages 395-401
Front Matter....Pages 403-403
The Influence of Ion Implantation Upon the High Temperature Oxidation of Titanium and Stainless Steel....Pages 405-414
The Effects of Yttrium Ion Implantation Upon the Oxidation Behaviour of an Austenitic Stainless Steel....Pages 415-422
Frictional Changes Induced by the Ion Implantation of Steel....Pages 423-436
Possible Radiation Enhanced Diffusion of Nickel Ions in Titanium....Pages 437-442
The Influence of Ion Bombardment on the Corrosion of Metals....Pages 443-453
Implantation and Diffusion of Cu in Be....Pages 455-464
Front Matter....Pages 403-403
Ion Implantation and Radiation Damage in Vanadium....Pages 465-476
An Exacting Test of the Channeling Technique for Atom Location: Br Implanted into Fe....Pages 477-490
The Lattice Site Location of C Implanted into Fe....Pages 491-502
Front Matter....Pages 503-503
Ion Implantation Effects in Magnetic Bubble Garnets....Pages 505-522
Nucleation and Crystallization of Ion-Implanted Glass....Pages 523-530
Lateral Stress Measurements in Ion-Implanted Metals and Insulators....Pages 531-540
Changes in the Electrical Properties of Thin Anodic TiO 2 Films Induced by Ion Implantation....Pages 541-550
Electrical and Structural Changes in Ion-Bombarded TiO 2 ....Pages 551-566
Ion Implantation in Silver Bromide....Pages 567-574
Refractive Index Profiles Produced in Silica Glass by Ion Implantations....Pages 575-584
Ion Implanted Silicon-Metal Systems Si 1-x M x ....Pages 585-596
Front Matter....Pages 597-597
Damage Profiles in Ion-Implanted Semiconductors at Low (25°K) Temperatures....Pages 599-609
Lattice Disorder Produced in GaAs by Cadmium Implantation....Pages 611-619
Compensation of GaAs by Oxygen Implantation....Pages 621-630
Properties of Tellurium Implanted Gallium Arsenide....Pages 631-640
Vaporization of Ion-Implanted GaAs....Pages 641-654
Back Matter....Pages 655-657