Introduction to Plasma Technology: Science, Engineering and Applications

Introduction to Plasma Technology......Page 2
Contents......Page 6
Preface......Page 12
Symbols......Page 14
Pressure Units Conversion......Page 16
Electronic Symbols......Page 17
1.1 Introduction......Page 18
Kinetic Plasmas......Page 21
Simple Ballistic and Statistical Models......Page 22
Statistical Behaviour......Page 23
Collisions Between Particles......Page 25
Coulomb Forces......Page 26
Degree of Ionization......Page 27
1.5 The De.ning Characteristics of a Plasma......Page 28
Further Reading......Page 30
2.2 The Drift Velocity......Page 32
Mobility......Page 34
Collision Frequency......Page 35
Collision Cross-section......Page 36
2.3 Inelastic Collision Processes......Page 38
Metastable Processes......Page 39
Ionization and Recombination Processes......Page 40
Recombination......Page 41
Metastable Ionization......Page 42
References......Page 43
3.2 The Behaviour of Plasmas at DC and Low Frequencies in the Near Field......Page 46
Charged Particles in Electromagnetic Fields......Page 48
Behaviour of a Charged Particle in an Oscillating Electric Field......Page 49
Plasma Frequency......Page 51
The Debye Radius......Page 52
3.3 Behaviour of Charged Particles in Magnetic Fields (Magnetized Plasmas)......Page 54
3.5 Similarity Conditions......Page 58
Further Reading......Page 60
4.2 Direct Coupling......Page 62
The Cathode......Page 66
Emission Processes......Page 68
Secondary Emission......Page 69
Thermionic Emission......Page 71
The Cathode Fall Region......Page 73
The Discharge Column......Page 74
Interaction of Magnetic Fields with a Discharge or Plasma......Page 76
Induction Coupling......Page 79
Capacitive Coupling......Page 81
Propagation of an Electromagnetic Wave......Page 82
The Helical Resonator......Page 85
Microwave Waveguides......Page 86
Electron Cyclotron Resonance......Page 87
The Helicon Plasma Source......Page 91
Further Reading......Page 92
5.2 Plasma Processes Used in Electronics Fabrication......Page 94
The Glow Discharge Diode......Page 97
The Magnetron......Page 100
Inductively Coupled Plasmas......Page 101
Electron Cyclotron Resonance Reactor......Page 102
The Helical Reactor......Page 103
The Helicon Reactor......Page 104
The Low-pressure Mercury Vapour Lamp......Page 105
5.4 Gas Lasers......Page 108
Electron and Ion Beam Evaporation......Page 111
Ion Beam Processes......Page 112
High-power Electron Beams......Page 114
5.6 Glow Discharge Surface Treatment......Page 116
5.7 Propulsion in Space......Page 117
Further Reading......Page 118
6.2 Atmospheric Pressure Discharges......Page 120
Corona Discharges......Page 122
Corona Discharges on Conductors......Page 125
Electrostatic Precipitators......Page 127
Electrostatic Deposition......Page 130
6.4 Dielectric Barrier Discharges......Page 131
6.6 Manufacture of Ozone......Page 133
6.9 Partial Discharges......Page 135
6.10 Surface Discharges......Page 137
Further Reading......Page 138
7.1 Introduction......Page 140
7.2 Arc Welding......Page 141
Metal Inert Gas Welding......Page 143
Tungsten Inert Gas Welding......Page 144
The Plasma Torch......Page 146
The Three-phase AC Arc Furnace......Page 148
DC Arc Furnaces......Page 151
Electric Arc Smelting......Page 152
Plasma Melting Furnaces......Page 153
Vacuum Arc Furnaces......Page 154
7.4 Arc Gas Heaters......Page 155
Inductively Coupled Arc Discharges......Page 156
7.5 High-pressure Discharge Lamps......Page 158
7.6 Ion Lasers......Page 161
7.7 Arc Interrupters......Page 162
Vacuum Circuit Breakers and Contactors......Page 164
7.9 Generation of Electricity by Nuclear Fusion......Page 166
Lightning......Page 167
Further Reading......Page 169
8.2 Neutral Particle Density Measurement......Page 172
The Langmuir Probe......Page 173
Magnetic Probes......Page 175
Optical Emission Spectroscopy......Page 176
Scattering Measurements......Page 178
8.5 Interferometry......Page 179
Microwave Interferometer......Page 180
8.6 Mass Spectrometry......Page 181
8.7 Electrical Measurements......Page 182
Electrical Instrumentation......Page 183
The Oscilloscope......Page 184
Electrical Measurements Using Probes......Page 185
Current Measurement......Page 187
Further Reading......Page 189
9.2 The Plasma Characteristic......Page 190
Reactive Stabilization......Page 193
9.5 Interaction between the Plasma and Power Supply Time Constants......Page 196
9.6 Matching......Page 197
9.7 Resonance......Page 199
9.8 Parasitic Inductance and Capacitance......Page 200
Further Reading......Page 202
10.2 Transformers and Inductors......Page 204
10.3 Recti.cation......Page 208
The Inverter Circuit......Page 210
Current Control......Page 212
The Inverter Circuit......Page 213
Converter Circuits......Page 214
High-Frequency Inverter......Page 215
10.6 Microwave Power Supplies......Page 216
10.7 Pulsed Power Supplies......Page 217
10.8 Ignition Power Supplies......Page 218
10.9 Electromagnetic Interference......Page 222
Conduction......Page 223
Further Reading......Page 224
Index......Page 226