Handbook of Microscopy for Nanotechnology

CONTENTS......Page 6
Plate Section......Page 734
Preface......Page 13
List of Contributors......Page 15
I. OPTICAL MICROSCOPY, SCANNING PROBE MICROSCOPY, ION MICROSCOPY, AND NANOFABRICATION......Page 19
1. Introduction......Page 20
2. The Confocal Microscope......Page 22
3. Applications to Nanotechnology......Page 32
4. Summary and Future Perspectives......Page 37
References......Page 38
1. Scanning Near-Field Optical Microscopy and Nanotechnology......Page 42
2. Basic Concepts......Page 43
3. Instrumentation......Page 44
4. Applications in Nanoscience......Page 51
5. Perspectives......Page 67
References......Page 68
1. Basic Principles of Scanning Tunneling Microscopy......Page 72
2. Surface Structure Determination by Scanning Tunneling Microscopy......Page 76
3. Scanning Tunneling spectroscopies......Page 98
4. STM-based Atomic Manipulation......Page 109
5. Recent Developments......Page 115
References......Page 126
Introductory Remarks......Page 130
Basics of Atomic Force Microscopy......Page 132
Imaging of Macromolecules and their Self-Assemblies......Page 151
Studies of Heterogeneous Systems......Page 163
Concluding Remarks......Page 170
References......Page 171
1. Introduction......Page 173
2. Nanoscale Pen Writing......Page 178
3. Nanoscale Scratching......Page 183
4. Nanoscale Manipulation......Page 187
5. Nanoscale Chemistry......Page 190
6. Nanoscale Light Exposure......Page 194
7. Future Perspectives......Page 195
References......Page 196
1. Introduction......Page 199
2. Instrumentation of Scanning Thermal and Thermoelectric Microscopy......Page 200
3. Theory of Scanning Thermal and Thermoelectric Microscopy......Page 207
4. Applications of Scanning Thermal and Thermoelectric Microscopy in Nanotechnology......Page 213
5. Summary and Future Aspects......Page 219
References......Page 220
1. Secondary Ion Mass Spectrometry and Nanotechnology......Page 222
2. Introduction to Secondary Ion Mass Spectrometry......Page 223
3. Experimental Issues in Imaging SIMS......Page 228
4. Applications in Nanotechnology......Page 231
5. Summary and Future Perspectives......Page 235
References......Page 237
1. Atom Probe Tomography and Nanotechnology......Page 241
2. Instrumentation of Atom Probe Tomography......Page 242
3. Basic Information......Page 251
4. Data Interpretation and Visualization......Page 252
5. Sample Analysis of Nanomaterials: Multilayer Films......Page 258
Acknowledgement......Page 259
References......Page 260
1. Introduction......Page 261
2. Principles and Practice of the Focused Ion Beam System......Page 264
3. Application of Focused Ion Beam Instrumentation......Page 280
References......Page 298
1. Electron Beam Lithography and Nanotechnology......Page 301
2. Instrumentation of Electron Beam Lithography......Page 303
3. Electron-Solid Interactions......Page 314
4. Pattern Transfer Process......Page 320
5. Applications in Nanotechnology......Page 324
6. Summary and Future Perspectives......Page 332
References......Page 333
II. ELECTRON MICROSCOPY......Page 336
1. Introduction: Scanning Electron Microscopy and Nanotechnology......Page 337
2. Electron-Specimen Interactions......Page 341
3. Instrumentation of the Scanning Electron Microscope......Page 346
4. The Resolution of Secondary and Backscattered Electron Images......Page 354
5. Contrast Mechanisms of SE and BE Images of Nanoparticles and Other Systems......Page 357
6. Applications to Characterizing Nanophase Materials......Page 364
7. Summary and Perspectives......Page 367
References......Page 370
1. Introduction......Page 372
2. The Nanomaterials Characterization Challenge: Bulk Nanostructures and Discrete Nanoparticles......Page 373
3. Physical Basis of the Electron-Excited Analytical Spectrometries......Page 375
4. Nanoscale Elemental Characterization with High Electron Beam Energy......Page 377
5. EELS Quantification......Page 381
6. Spatial Sampling of the Target with EELS......Page 382
7. Nanoscale Elemental Characterization with Low and Intermediate Electron Beam Energy......Page 390
8. Examples of Applications to Nanoscale Materials......Page 401
References......Page 410
1. Introduction......Page 412
2. Historical Development of EBSD......Page 413
3. Origin of EBSD Patterns......Page 414
4. Resolution of EBSD......Page 419
5. Sample Preparation of Nano-materials for EBSD......Page 424
6. Applications of EBSD to Nano-materials......Page 426
References......Page 435
1. HRTEM and Nanotechnology......Page 437
2. Principles and Practice of HRTEM......Page 438
3. Applications of HRTEM......Page 444
4. Current Trends......Page 453
5. Ongoing Problems......Page 458
6. Summary and Future Perspective......Page 459
References......Page 460
1. Introduction......Page 464
2. STEM Imaging......Page 468
3. STEM Imaging of Crystals......Page 474
4. Diffraction in STEM Instruments......Page 478
5. Microanalysis in STEM......Page 482
6. Studies of Nanoparticles and Nanotubes......Page 483
7. Studies of Crystal Defects and Interfaces......Page 484
8. The Structure and Composition of Surfaces......Page 486
9. Amorphous Materials......Page 489
10. STEM Holography......Page 491
11. Ultra-High-Resolution STEM......Page 493
12. Conclusions......Page 496
Reference......Page 497
1. Introduction......Page 501
2. Thermal Induced Surface Dynamic Processes of Nanocrystals......Page 503
3. Measuring Dynamic Bending Modulus By Electric Field Induced Mechanical Resonance......Page 504
4. Young\'s Modulus of Composite Nanowires......Page 514
5. Bending Modulus of Oxide Nanobelts......Page 516
6. Nanobelts as Nanocantilevers......Page 520
8. Work Function at the Tips of Nanotubes and Nanobelts......Page 521
9. Mapping the Electrostatic Potential at the Nanotube Tips......Page 525
10. Field Emission Induced Structural Damage......Page 526
12. In-situ Transport Measurement of Nanotubes......Page 529
Acknowledgement......Page 536
References......Page 537
1. Introduction......Page 539
2. History of ETEM......Page 540
3. Data Collection......Page 546
4. Experimental Design Strategies......Page 549
5. Applications to Nanomaterials......Page 551
6. Conclusions......Page 570
References......Page 571
1. Introduction......Page 574
2. Electron Diffraction Modes and Geometry......Page 575
3. Theory of Electron Diffraction......Page 579
4. Experimental Analysis......Page 591
5. Applications to Nanostructure Characterization......Page 597
References......Page 605
1. Introduction......Page 607
2. Tomography......Page 609
3. Tomography in the Electron Microscope......Page 615
4. STEM HAADF (Z-Contrast) Tomography......Page 621
5. EFTEM Tomography......Page 627
6. Conclusions......Page 629
References......Page 630
1. Electron Holography and Nanotechnology......Page 634
2. Description of Off-Axis Electron Holography......Page 635
3. Nanoscale Electrostatic Fields......Page 643
4. Nanoscale Magnetic Fields......Page 648
5. Future Perspectives......Page 653
References......Page 654
1. Introduction: EELS and Nanotechnology......Page 657
2. Understanding the Information Contained in an EELS Spectrum......Page 659
3. Spatially Resolved EELS......Page 667
4. Elemental Mapping of Individual Nanoparticles using Core-Loss Signals......Page 673
5. Mapping Bonding States and Electronic Structures with ELNES Features......Page 678
6. Conclusion......Page 682
References......Page 683
1. Introduction......Page 686
2. Lorentz Microscopy......Page 687
3. Electron Holography......Page 700
4. Summary......Page 716
References......Page 717
A......Page 719
C......Page 720
E......Page 721
F......Page 723
H......Page 724
I......Page 725
M......Page 726
N......Page 727
P......Page 728
S......Page 729
T......Page 732
Z......Page 733