Excimer Laser Technology

Introductory Remarks....Pages 1-7
Historical Review of Excimer Laser Development....Pages 8-21
Trends in Worldwide Excimer Laser Sales....Pages 22-29
Some Fundamentals of Laser Physics....Pages 33-40
Principles of Excimer Lasers....Pages 41-45
Design and Technology of Excimer Lasers....Pages 47-73
High-Repetition-Rate and High-Power Lasers....Pages 75-80
High-Energy Lasers....Pages 81-88
Excimer Lasers for Microlithography....Pages 89-103
Laser Beam Characterization....Pages 105-117
Optical Coatings for Excimer Laser Applications....Pages 119-126
Small Structures with Large Excimer Lasers....Pages 127-136
Overview....Pages 139-147
Ablation....Pages 149-154
Micro-Machining....Pages 155-186
Via Drilling....Pages 187-200
Micro-Processing of Borosilicate Glass and Polymers....Pages 201-219
F 2 -Laser Microfabrication for Photonics and Biophotonics....Pages 221-277
Nano-Structuring with Femtosecond Excimer Laser Pulses....Pages 279-283
Physical Aspects of Ultra-Fast UV Laser Transfer....Pages 285-294
Microlithography....Pages 295-305
TFT Annealing....Pages 306-312
Fiber Bragg Gratings....Pages 313-320
Marking....Pages 321-330
Activation and Metallization of Dielectrics....Pages 331-333
Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films....Pages 335-350
Combustion Analysis....Pages 351-360
Medical Applications of Excimer Lasers....Pages 361-371
High-Intensity Applications of Excimer Lasers....Pages 373-383
High-Repetition-Rate Applications of Excimer Lasers....Pages 385-397
New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm ....Pages 399-422