Etching of III-V semiconductors: an electrochemical approach

Preface  Contents  List of symbols and abbreviations  1. Introduction  Part I: Electrochemistry  2. Basic principles of semiconductor electrochemistry  2.1. Introduction  2.2. Charge and potential distribution at the semiconductor/electrolyte interface  2.3. Charge transfer reactions  2.4. Anodic dissolution of III-V semiconductors  2.5. Principle of electroless dissolution  2.6. Principle of chemical dissolution  2.7. Kinetic considerations in etching reactions  References  3. Experimental considerations  3.1. Introduction  3.2. Electrochemicalmeasurements  3.2.1. Electrode preparation  3.2.2. Instrumentation  3.2.3. Flow-cell measurements  3.3. Etching experiments  3.3.1. Mask preparation and orientation  3.3.2. Etching conditions  References  4. Anodic Dissolution of GaAs  4.1. Introduction  4.2. Kinetics of anodic dissolution  4.2.1. Introduction  4.2.2. Results  4.2.3. Discussion  4.2.4. Conclusions  4.3. Surface charging under oxide-free conditions  4.3.1. Introduction  4.3.2. Results  4.3.3. Discussion  4.3.4. Conclusions  4.4. Interface charging under oxide-forming conditions  4.4.1. Introduction  4.4.2. Results  4.4.3. Discussion  4.4.4. Conclusions  References  5. Redox reactions at GaAs electrodes  5.1. Introduction  5.2. Reduction of Fe^{3+} and its complexes  5.2.1. Introduction  5.2.2. Results  5.2.3. Discussion  5.2.4. Conclusions  5.3. Reduction of Fe(CN)^{3-}_6 in alkaline solutions  5.3.1. Introduction  5.3.2. Results  5.3.3. Discussion  5.3.4. Conclusions  5.4. Hypochlorite reduction in alkaline solutions  5.4.1. Introduction  5.4.2. Results  5.4.3. Discussion  5.4.4. Conclusions  5.5. Hydrogen peroxide: reduction and chemical etching  5.5.1. Introduction  5.5.2. Results and discussion  5.5.3. A new model  5.5.4. Conclusions  5.6. The halogens: reduction and chemical etching  5.6.1. Introduction  5.6.2. Results  5.6.3. Discussion  5.6.4. Conclusions  5.6.5. Postscript  5.7. The electrochemistry of CrO_3-HF solutions  5.7.1. Introduction  5.7.2. Results  5.7.3. Discussion  5.7.4.Conclusions  References  6. Reactions at InP electrodes  6.1. Introduction  6.2. VB and CB charge transfer reactions  6.2.1. Introduction  6.2.2. Results  6.2.3. Discussion  6.2.4. Conclusions  6.3. Electrochemistry and etching in HCl and HBr solutions  6.3.1. Introduction  6.3.2. Results  6.3.3. Discussion  6.3.4. Conclusions  6.4. Electrochemistry and etching in Br_2 solutions  6.4.1. Introduction  6.4.2. Results  6.4.3. Discussion  6.4.4. Conclusions  References  Part II: Practtical etching  7. Overview of etching mechanisms and kinetics of various etchant  7.1. Introduction  7.2. General considerations  7.2.1. Anodic dissolution  7.2.2. Electroless dissolution  7.2.3. Chemical dissolution  7.3. Etching Table  References  8. Profile etching  8.1. Introduction  8.2. Kinetically-controlled etching profiles  8.2.1. Introduction  8.2.2. Results and discussion  8.3. Diffusion-controlled etching processes  8.3.1. Introduction  8.3.2. Results of mathematical modelling  8.3.3. Experimental confirmation  8.3.4. Cathodic protection of crystallographic facets  8.4. Intermediate etching profiles  8.4.1. Introduction  8.4.2. Results and discussion  8.5. Influence of native oxide layers on the etched profiles  8.5.1. Introduction  8.5.2. Results and discussion  8.6. Summary  References  9. Polishing and defect-revealing  9.1. Introduction  9.2. Strategies for controlling surface morphology  9.2.1. Polishing  9.2.2. Defect-revealing  9.3. Results and discussion  9.3.1. Anodic dissolution  9.3.2. Electroless etching in the dark  9.3.3. Electroless etching under illumination  9.3.4. The CrO_3-HF system  9.4. Final remarks  BookmarkTitle: References  10. Material-selective etching  10.1. Introduction  10.2. How to achieve selectivity  10.2.1. Anodic etching  10.2.2. Electroless etching  10.2.3. Chemical etching  10.2.4. Passivation  10.3. Results and discussion  10.3.1. Anodic etching  10.3.2. Electroless etching  10.3.3. Chemical etching  10.3.4. Passivation  References  Author index  Subject index